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Journal Articles

Resolving buried interfaces with low energy ion scattering

Adele Valpreda, Jacobus M. Sturm, Andrey E. Yakshin, Marcelo Ackermann
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 043203 (2023)
https://doi.org/10.1116/6.0002567
Published: May 2023
View article titled, Resolving buried interfaces with low energy ion scattering
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Journal Articles

Inert-gas ion scattering at grazing incidence on smooth and rough Si and SiO2 surfaces

Charisse Marie D. Cagomoc, Michiro Isobe, Eric A. Hudson, Satoshi Hamaguchi
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 023003 (2023)
https://doi.org/10.1116/6.0002381
Published: February 2023
View article titled, Inert-gas ion scattering at grazing incidence on smooth and rough Si and SiO<sub>2</sub> surfaces
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Journal Articles

Comparison of glancing-angle scatterings on different materials in a high aspect ratio plasma etching process using molecular dynamics simulation

Yao Du, Florian Krüger, Sang Ki Nam, Hoki Lee, Suyoung Yoo, Jacob Eapen, Mark J. Kushner, Steven Shannon
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 053007 (2022)
https://doi.org/10.1116/6.0002008
Published: September 2022
View article titled, Comparison of glancing-angle scatterings on different materials in a high aspect ratio plasma etching process using molecular dynamics simulation
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Journal Articles

Low-energy ion scattering from quasicrystals

Robert Bastasz
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 010805 (2022)
https://doi.org/10.1116/6.0001502
Published: December 2021
View article titled, Low-energy ion scattering from quasicrystals
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Journal Articles

Surface characterization of ultrathin atomic layer deposited molybdenum oxide films using high-sensitivity low-energy ion scattering

Raivathari M. Singhania, Henry Price, Vaneck Y. Kounga, Benjamin Davis, Philipp Brüner, Ryan Thorpe, David J. Hynek, Judy J. Cha, Nicholas C. Strandwitz
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 39, 063210 (2021)
https://doi.org/10.1116/6.0001164
Published: October 2021
View article titled, Surface characterization of ultrathin atomic layer deposited molybdenum oxide films using high-sensitivity low-energy ion scattering
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Journal Articles

Highly selective and vertical etch of silicon dioxide using ruthenium films as an etch mask

William J. Mitchell, Brian J. Thibeault, Demis D. John, Thomas E. Reynolds
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 39, 043204 (2021)
https://doi.org/10.1116/6.0001030
Published: May 2021
View article titled, Highly selective and vertical etch of silicon dioxide using ruthenium films as an etch mask
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Journal Articles

Properties of indium tin oxide thin films grown by Ar ion beam sputter deposition

Carsten Bundesmann, Jens Bauer, Annemarie Finzel, Jürgen W. Gerlach, Wolfgang Knolle, Anke Hellmich, Ron Synowicki
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 39, 033406 (2021)
https://doi.org/10.1116/6.0000917
Published: March 2021
View article titled, Properties of indium tin oxide thin films grown by Ar ion beam sputter deposition
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Journal Articles

Irradiation of nanoporous structures with light and heavy low-energy ions: Sputtering enhancement and pore sealing

Anastasia A. Sycheva, Ekaterina N. Voronina, Tatyana V. Rakhimova, Lev S. Novikov, Alexander T. Rakhimov
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 38, 053004 (2020)
https://doi.org/10.1116/6.0000389
Published: August 2020
View article titled, Irradiation of nanoporous structures with light and heavy low-energy ions: Sputtering enhancement and pore sealing
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Journal Articles

Role of defects in the etching of graphene by intercalated oxygen

Editor’s Pick
Tianbai Li, Jory A. Yarmoff
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 36, 031404 (2018)
https://doi.org/10.1116/1.5025489
Published: May 2018
View article titled, Role of defects in the etching of graphene by intercalated oxygen
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Journal Articles

Elucidation of ALD MgZnO deposition processes using low energy ion scattering

Matthew Werner, Joseph W. Roberts, Richard J. Potter, Karl Dawson, Paul R. Chalker
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 36, 02D406 (2018)
https://doi.org/10.1116/1.5015958
Published: February 2018
View article titled, Elucidation of ALD MgZnO deposition processes using low energy ion scattering
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Journal Articles

Growth, intermixing, and surface phase formation for zinc tin oxide nanolaminates produced by atomic layer deposition

Carl Hägglund, Thomas Grehl, Jukka T. Tanskanen, Ye Sheng Yee, Marja N. Mullings, Adriaan J. M. Mackus, Callisto MacIsaac, Bruce M. Clemens, Hidde H. Brongersma, Stacey F. Bent
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 34, 021516 (2016)
https://doi.org/10.1116/1.4941411
Published: February 2016
View article titled, Growth, intermixing, and surface phase formation for zinc tin oxide nanolaminates produced by atomic layer deposition
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Journal Articles

Atomic layer deposition of ultrathin Cu2O and subsequent reduction to Cu studied by in situ x-ray photoelectron spectroscopy

Dileep Dhakal, Khaybar Assim, Heinrich Lang, Philipp Bruener, Thomas Grehl, Colin Georgi, Thomas Waechtler, Ramona Ecke, Stefan E. Schulz, Thomas Gessner
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 34, 01A111 (2016)
https://doi.org/10.1116/1.4933088
Published: October 2015
View article titled, Atomic layer deposition of ultrathin Cu<sub>2</sub>O and subsequent reduction to Cu studied by <em>in situ</em> x-ray photoelectron spectroscopy
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Journal Articles

Thin film analysis by low-energy ion scattering by use of TRBS simulations

Philipp Brüner, Thomas Grehl, Hidde Brongersma, Blanka Detlefs, Emmanuel Nolot, Helen Grampeix, Erich Steinbauer, Peter Bauer
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 33, 01A122 (2015)
https://doi.org/10.1116/1.4901451
Published: November 2014
View article titled, Thin film analysis by low-energy ion scattering by use of TRBS simulations
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Journal Articles

Functionalization of oxide-free silicon surfaces

William J. I. DeBenedetti, Yves J. Chabal
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 31, 050826 (2013)
https://doi.org/10.1116/1.4819406
Published: September 2013
View article titled, Functionalization of oxide-free silicon surfaces
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Journal Articles

Probing ultrathin film continuity and interface abruptness with x-ray photoelectron spectroscopy and low-energy ion scattering

Wenyu Zhang, Rambert K. Nahm, Paul F. Ma, James R. Engstrom
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 31, 061101 (2013)
https://doi.org/10.1116/1.4812695
Published: July 2013
View article titled, Probing ultrathin film continuity and interface abruptness with x-ray photoelectron spectroscopy and low-energy ion scattering
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Includes: Supplementary data
Journal Articles

Relative lability of gold-oxide thin films in contact with air, solvents, or electrolyte solutions

Kevin M. Cook, Gregory S. Ferguson
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 31, 021508 (2013)
https://doi.org/10.1116/1.4791687
Published: February 2013
View article titled, Relative lability of gold-oxide thin films in contact with air, solvents, or electrolyte solutions
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Includes: Supplementary data
Journal Articles

Combining dynamic and static depth profiling in low energy ion scattering

Rik ter Veen, Michael Fartmann, Reinhard Kersting, Birgit Hagenhoff
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 31, 01A113 (2013)
https://doi.org/10.1116/1.4764111
Published: October 2012
View article titled, Combining dynamic and static depth profiling in low energy ion scattering
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Journal Articles

Segregation and interlayer relaxation at the NiPd(111) surface

G. N. Derry, R. Wan, F. Strauch, C. English
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 29, 011015 (2011)
https://doi.org/10.1116/1.3520434
Published: January 2011
View article titled, Segregation and interlayer relaxation at the NiPd(111) surface
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Journal Articles

Modeling of the angular dependence of plasma etching

Wei Guo, Herbert H. Sawin
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 27, 1326–1336 (2009)
https://doi.org/10.1116/1.3231450
Published: October 2009
View article titled, Modeling of the angular dependence of plasma etching
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Journal Articles

Hydrogen mediated transport of Sn to Ru film surface

Nadir Faradzhev, Vadim Sidorkin
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 27, 306–314 (2009)
https://doi.org/10.1116/1.3081968
Published: February 2009
View article titled, Hydrogen mediated transport of Sn to Ru film surface
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