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Journal Articles
J. Vac. Sci. Technol. A 41, 063208 (2023)
Published: October 2023
Journal Articles
J. Vac. Sci. Technol. A 41, 033204 (2023)
Published: March 2023
Journal Articles
Benjamen P. Reed, David J. H. Cant, Steve J. Spencer, Abraham Jorge Carmona-Carmona, Adam Bushell, Alberto Herrera-Gómez, Akira Kurokawa, Andreas Thissen, Andrew G. Thomas, Andrew J. Britton, Andrzej Bernasik, Anne Fuchs, Arthur P. Baddorf, Bernd Bock, Bill Theilacker, Bin Cheng, David G. Castner, David J. Morgan, David Valley, Elizabeth A. Willneff, Emily F. Smith, Emmanuel Nolot, Fangyan Xie, Gilad Zorn, Graham C. Smith, Hideyuki Yasufuku, Jeffrey L. Fenton, Jian Chen, Jonathan D. P. Counsell, Jörg Radnik, Karen J. Gaskell, Kateryna Artyushkova, Li Yang, Lulu Zhang, Makiho Eguchi, Marc Walker, Mariusz Hajdyła, Mateusz M. Marzec, Matthew R. Linford, Naoyoshi Kubota, Orlando Cortazar-Martínez, Paul Dietrich, Riki Satoh, Sven L. M. Schroeder, Tahereh G. Avval, Takaharu Nagatomi, Vincent Fernandez, Wayne Lake, Yasushi Azuma, Yusuke Yoshikawa, Claudia L. Compean-Gonzalez, Giacomo Ceccone, Alexander G. Shard
J. Vac. Sci. Technol. A 39, 027001 (2021)
Published: January 2021
Journal Articles
Benjamen P. Reed, David J. H. Cant, Steve J. Spencer, Abraham Jorge Carmona-Carmona, Adam Bushell, Alberto Herrera-Gómez, Akira Kurokawa, Andreas Thissen, Andrew G. Thomas, Andrew J. Britton, Andrzej Bernasik, Anne Fuchs, Arthur P. Baddorf, Bernd Bock, Bill Theilacker, Bin Cheng, David G. Castner, David J. Morgan, David Valley, Elizabeth A. Willneff, Emily F. Smith, Emmanuel Nolot, Fangyan Xie, Gilad Zorn, Graham C. Smith, Hideyuki Yasufuku, Jeffery L. Fenton, Jian Chen, Jonathan D. P. Counsell, Jörg Radnik, Karen J. Gaskell, Kateryna Artyushkova, Li Yang, Lulu Zhang, Makiho Eguchi, Marc Walker, Mariusz Hajdyła, Mateusz M. Marzec, Matthew R. Linford, Naoyoshi Kubota, Orlando Cortazar-Martínez, Paul Dietrich, Riki Satoh, Sven L. M. Schroeder, Tahereh G. Avval, Takaharu Nagatomi, Vincent Fernandez, Wayne Lake, Yasushi Azuma, Yusuke Yoshikawa, Alexander G. Shard
J. Vac. Sci. Technol. A 38, 063208 (2020)
Published: November 2020
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 38, 063203 (2020)
Published: September 2020
Journal Articles
Harm C. M. Knoops, Bas W. H. van de Loo, Sjoerd Smit, Mikhail V. Ponomarev, Jan-Willem Weber, Kashish Sharma, Wilhelmus M. M. Kessels, Mariadriana Creatore
J. Vac. Sci. Technol. A 33, 021509 (2015)
Published: December 2014
Includes: Supplementary data
Journal Articles
Xiaokang Huang, Gaurav Gupta, Weixiang Gao, Van Tran, Bang Nguyen, Eric McCormick, Yongjie Cui, Yinbao Yang, Craig Hall, Harold Isom
J. Vac. Sci. Technol. A 32, 031404 (2014)
Published: April 2014
Journal Articles
Dooho Choi, Bincheng Wang, Suk Chung, Xuan Liu, Amith Darbal, Adam Wise, Noel T. Nuhfer, Katayun Barmak, Andrew P. Warren, Kevin R. Coffey, Michael F. Toney
J. Vac. Sci. Technol. A 29, 051512 (2011)
Published: August 2011
Journal Articles
J. Vac. Sci. Technol. A 26, 1235–1240 (2008)
Published: August 2008
Journal Articles
J. Vac. Sci. Technol. A 25, 721–725 (2007)
Published: May 2007
Journal Articles
J. Vac. Sci. Technol. A 25, 330–333 (2007)
Published: February 2007
Journal Articles
J. Vac. Sci. Technol. A 25, 221–224 (2007)
Published: January 2007
Journal Articles
J. Vac. Sci. Technol. A 24, 1610–1612 (2006)
Published: June 2006
Journal Articles
J. Vac. Sci. Technol. A 23, 1061–1066 (2005)
Published: June 2005
Journal Articles
J. Vac. Sci. Technol. A 23, 316–321 (2005)
Published: March 2005
Journal Articles
J. Vac. Sci. Technol. A 21, 1389–1392 (2003)
Published: July 2003
Journal Articles
J. Vac. Sci. Technol. A 21, 375–380 (2003)
Published: January 2003
Journal Articles
J. Vac. Sci. Technol. A 19, 2043–2047 (2001)
Published: September 2001
Journal Articles
J. Vac. Sci. Technol. A 19, 798–804 (2001)
Published: May 2001
Journal Articles
J. Vac. Sci. Technol. A 14, 95–103 (1996)
Published: January 1996
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