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Journal Articles

Atomic layer germanium etching for 3D Fin-FET using chlorine neutral beam

Editor’s Pick
Daisuke Ohori, Takuya Fujii, Shuichi Noda, Wataru Mizubayashi, Kazuhiko Endo, En-Tzu Lee, Yiming Li, Yao-Jen Lee, Takuya Ozaki, Seiji Samukawa
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 37, 021003 (2019)
https://doi.org/10.1116/1.5079692
Published: January 2019
View article titled, Atomic layer germanium etching for 3D Fin-FET using chlorine neutral beam
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Journal Articles

Effect of a dielectric layer on plasma uniformity in high frequency electronegative capacitive discharges

Emi Kawamura, De-Qi Wen, Michael A. Lieberman, Allan J. Lichtenberg
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 35, 05C311 (2017)
https://doi.org/10.1116/1.4993595
Published: July 2017
View article titled, Effect of a dielectric layer on plasma uniformity in high frequency electronegative capacitive discharges
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Journal Articles

Characterization of transparent conductive ZnO and Ga-doped ZnO films on polyethylene naphthalate sheets aged for six years in ambient atmospheric

Housei Akazawa
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 35, 041515 (2017)
https://doi.org/10.1116/1.4990538
Published: June 2017
View article titled, Characterization of transparent conductive ZnO and Ga-doped ZnO films on polyethylene naphthalate sheets aged for six years in ambient atmospheric
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Journal Articles

Efficiencies of Eu3+ ions and hydrogen atoms as donors in ZnO thin films

Housei Akazawa
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 34, 051505 (2016)
https://doi.org/10.1116/1.4959543
Published: July 2016
View article titled, Efficiencies of Eu<sup>3+</sup> ions and hydrogen atoms as donors in ZnO thin films
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Journal Articles

Electromagnetic simulation of helicon plasma antennas for their electrostatic shield design

Yorgos Stratakos, Angelos Zeniou, Evangelos Gogolides
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 34, 031307 (2016)
https://doi.org/10.1116/1.4945001
Published: April 2016
View article titled, Electromagnetic simulation of helicon plasma antennas for their electrostatic shield design
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Includes: Supplementary data
Journal Articles

Measurement of spatial and temporal evolution of electromagnetic fields in a 100 MHz plasma source using B dot and double dipole probes

Barton Lane, Colin Campbell, Ikuo Sawada, Peter L. G. Ventzek
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 34, 031302 (2016)
https://doi.org/10.1116/1.4943586
Published: March 2016
View article titled, Measurement of spatial and temporal evolution of electromagnetic fields in a 100 MHz plasma source using B dot and double dipole probes
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Journal Articles

Fluorophore-based sensor for oxygen radicals in processing plasmas

Faraz A. Choudhury, Grzegorz Sabat, Michael R. Sussman, Yoshio Nishi, J. Leon Shohet
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 33, 061305 (2015)
https://doi.org/10.1116/1.4930315
Published: September 2015
View article titled, Fluorophore-based sensor for oxygen radicals in processing plasmas
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Journal Articles

Properties of black silicon obtained at room-temperature by different plasma modes

Maria Gaudig, Jens Hirsch, Thomas Schneider, Alexander N. Sprafke, Johannes Ziegler, Norbert Bernhard, Ralf B. Wehrspohn
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 33, 05E132 (2015)
https://doi.org/10.1116/1.4929540
Published: September 2015
View article titled, Properties of black silicon obtained at room-temperature by different plasma modes
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Journal Articles

Initial growth, refractive index, and crystallinity of thermal and plasma-enhanced atomic layer deposition AlN films

Hao Van Bui, Frank B. Wiggers, Anubha Gupta, Minh D. Nguyen, Antonius A. I. Aarnink, Michel P. de Jong, Alexey Y. Kovalgin
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 33, 01A111 (2015)
https://doi.org/10.1116/1.4898434
Published: October 2014
View article titled, Initial growth, refractive index, and crystallinity of thermal and plasma-enhanced atomic layer deposition AlN films
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Journal Articles

Argon–oxygen dc magnetron discharge plasma probed with ion acoustic waves

Partha Saikia, Bipul Kumar Saikia, Kalyan Sindhu Goswami, Arindam Phukan
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 32, 031303 (2014)
https://doi.org/10.1116/1.4871081
Published: April 2014
View article titled, Argon–oxygen dc magnetron discharge plasma probed with ion acoustic waves
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Journal Articles

Degradation of transparent conductive properties of undoped ZnO and Ga-doped ZnO films left in atmospheric ambient for several years and trials to recover initial conductance

Housei Akazawa
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 32, 021512 (2014)
https://doi.org/10.1116/1.4866233
Published: February 2014
View article titled, Degradation of transparent conductive properties of undoped ZnO and Ga-doped ZnO films left in atmospheric ambient for several years and trials to recover initial conductance
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Journal Articles

Mechanical and transparent conductive properties of ZnO and Ga-doped ZnO films sputtered using electron-cyclotron-resonance plasma on polyethylene naphtalate substrates

Housei Akazawa
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 32, 021503 (2014)
https://doi.org/10.1116/1.4831979
Published: November 2013
View article titled, Mechanical and transparent conductive properties of ZnO and Ga-doped ZnO films sputtered using electron-cyclotron-resonance plasma on polyethylene naphtalate substrates
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Journal Articles

Reduction of angular dip width of surface plasmon resonance sensor by coupling surface plasma waves on sensing surface and inside metal–dielectric–metal structure

Bohr-Ran Huang, Chung-Chi Liao, Chun-Yi Lu, Wen-Cheng Ke, Yi-Lun Huang, Nai-Chuan Chen
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 31, 06F104 (2013)
https://doi.org/10.1116/1.4821505
Published: September 2013
View article titled, Reduction of angular dip width of surface plasmon resonance sensor by coupling surface plasma waves on sensing surface and inside metal–dielectric–metal structure
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Journal Articles

Computational modeling study of the radial line slot antenna microwave plasma source with comparisons to experiments

Laxminarayan L. Raja, Shankar Mahadevan, Peter L. G. Ventzek, Jun Yoshikawa
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 31, 031304 (2013)
https://doi.org/10.1116/1.4798362
Published: April 2013
View article titled, Computational modeling study of the radial line slot antenna microwave plasma source with comparisons to experiments
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Journal Articles

Tetragonal or monoclinic ZrO2 thin films from Zr-based glassy templates

Nikolaos T. Panagiotopoulos, Janez Kovač, Uros Cvelbar, Panagiotis Patsalas, Miran Mozetič, Georgios A. Evangelakis
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 30, 051510 (2012)
https://doi.org/10.1116/1.4742258
Published: July 2012
View article titled, Tetragonal or monoclinic ZrO<sub>2</sub> thin films from Zr-based glassy templates
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Journal Articles

Effect of reactor pressure on the electrical and structural properties of InN epilayers grown by high-pressure chemical vapor deposition

M. K. Indika Senevirathna, Sampath Gamage, Ramazan Atalay, Ananta R. Acharya, A. G. Unil Perera, Nikolaus Dietz, Max Buegler, Axel Hoffmann, Liqin Su, Andrew Melton, Ian Ferguson
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 30, 031511 (2012)
https://doi.org/10.1116/1.4705727
Published: April 2012
View article titled, Effect of reactor pressure on the electrical and structural properties of InN epilayers grown by high-pressure chemical vapor deposition
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Journal Articles

Plasma and vacuum ultraviolet induced charging of SiO2 and HfO2 patterned structures

J. L. Lauer, G. S. Upadhyaya, H. Sinha, J. B. Kruger, Y. Nishi, J. L. Shohet
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 30, 01A109 (2012)
https://doi.org/10.1116/1.3654012
Published: October 2011
View article titled, Plasma and vacuum ultraviolet induced charging of SiO<sub>2</sub> and HfO<sub>2</sub> patterned structures
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Journal Articles

Preferential growth of helium-doped Ti films deposited by magnetron sputtering

Lei Zhang, L. Q. Shi, Z. J. He, B. Zhang, L. B. Wang
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 27, 1392–1399 (2009)
https://doi.org/10.1116/1.3253087
Published: October 2009
View article titled, Preferential growth of helium-doped Ti films deposited by magnetron sputtering
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Journal Articles

Optimization of cell geometry for a conventional sputter ion pump by a particle-in-cell simulation

Taekyun Ha, Sukmin Chung, C. D. Park
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 27, 485–491 (2009)
https://doi.org/10.1116/1.3106632
Published: April 2009
View article titled, Optimization of cell geometry for a conventional sputter ion pump by a particle-in-cell simulation
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Journal Articles

Effect of capacitive to inductive coupling transition in multiple linear U-type antenna on silicon thin film deposition from pure Si H 4 discharges

Hong Bum Kim, Hyoung Cheol Lee, Kyong Nam Kim, Geun Young Yeom
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 26, 842–846 (2008)
https://doi.org/10.1116/1.2924340
Published: July 2008
View article titled, Effect of capacitive to inductive coupling transition in multiple linear U-type antenna on silicon thin film deposition from pure Si H 4 discharges
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