1-20 of 32
Plasma heating
Close
Save search
Follow your search
Access your saved searches in your account
Close Modal
Sort by
Journal Articles

Temporal evolution of the ion flux to the target in rotational RF multimagnetron plasma

Yasunori Ohtsu, Koya Yasuda, Julian Schulze
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 053006 (2022)
https://doi.org/10.1116/6.0001994
Published: August 2022
View article titled, Temporal evolution of the ion flux to the target in rotational RF multimagnetron plasma
Open the PDF for Temporal evolution of the ion flux to the target in rotational RF multimagnetron plasma in another window
Journal Articles

Plasma source development for fusion-relevant material testing

John B. O. Caughman, Richard H. Goulding, Theodore M. Biewer, Timothy S. Bigelow, Ian H. Campbell, Juan Caneses, Stephanie J. Diem, Andy Fadnek, Dan T. Fehling, Ralph C. Isler, Elijah H. Martin, Chad M. Parish, Juergen Rapp, Kun Wang, Clyde J. Beers, David Donovan, Nischal Kafle, Holly B. Ray, Guinevere C. Shaw, Melissa A. Showers
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 35, 03E114 (2017)
https://doi.org/10.1116/1.4982664
Published: May 2017
View article titled, Plasma source development for fusion-relevant material testing
Open the PDF for Plasma source development for fusion-relevant material testing in another window
Journal Articles

Effect of bias application to plasma density in weakly magnetized inductively coupled plasma

Hyuk Kim, Woohyun Lee, Wanjae Park, Ki-Woong Whang
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 31, 041301 (2013)
https://doi.org/10.1116/1.4804136
Published: May 2013
View article titled, Effect of bias application to plasma density in weakly magnetized inductively coupled plasma
Open the PDF for Effect of bias application to plasma density in weakly magnetized inductively coupled plasma in another window
Journal Articles

Impact of static magnetic fields on the radial line slot antenna plasma source

Jun Yoshikawa, Peter L. G. Ventzek
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 31, 031306 (2013)
https://doi.org/10.1116/1.4802737
Published: April 2013
View article titled, Impact of static magnetic fields on the radial line slot antenna plasma source
Open the PDF for Impact of static magnetic fields on the radial line slot antenna plasma source in another window
Journal Articles

Surface-charging effect of capacitively coupled plasmas driven by combined dc/rf sources

Quan-Zhi Zhang, Wei Jiang, Shu-Xia Zhao, You-Nian Wang
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 28, 287–292 (2010)
https://doi.org/10.1116/1.3305537
Published: February 2010
View article titled, Surface-charging effect of capacitively coupled plasmas driven by combined dc/rf sources
Open the PDF for Surface-charging effect of capacitively coupled plasmas driven by combined dc/rf sources in another window
Journal Articles

Determination of the sticking probability of a Zr–V–Fe nonevaporable getter strip

Ch. Day, X. Luo, A. Conte, A. Bonucci, P. Manini
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 25, 824–830 (2007)
https://doi.org/10.1116/1.2748799
Published: June 2007
View article titled, Determination of the sticking probability of a Zr–V–Fe nonevaporable getter strip
Open the PDF for Determination of the sticking probability of a Zr–V–Fe nonevaporable getter strip in another window
Journal Articles

Effect of multipactor discharge on Alcator C-Mod ion cyclotron range of frequency heating

T. P. Graves, S. J. Wukitch, B. LaBombard, I. H. Hutchinson
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 24, 512–516 (2006)
https://doi.org/10.1116/1.2194937
Published: April 2006
View article titled, Effect of multipactor discharge on Alcator C-Mod ion cyclotron range of frequency heating
Open the PDF for Effect of multipactor discharge on Alcator C-Mod ion cyclotron range of frequency heating in another window
Journal Articles

Spatially resolved mass spectrometric sampling of inductively coupled plasmas using a movable sampling orifice

Xi Li, Gottlieb S. Oehrlein, Marc Schaepkens, Robert E. Ellefson, Louis C. Frees
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 21, 1971–1977 (2003)
https://doi.org/10.1116/1.1619413
Published: October 2003
View article titled, Spatially resolved mass spectrometric sampling of inductively coupled plasmas using a movable sampling orifice
Open the PDF for Spatially resolved mass spectrometric sampling of inductively coupled plasmas using a movable sampling orifice in another window
Journal Articles

Physical properties of nitrogen-doped diamond-like amorphous carbon films deposited by supermagnetron plasma chemical vapor deposition

Haruhisa Kinoshita, Naoki Otaka
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 20, 1481–1485 (2002)
https://doi.org/10.1116/1.1488946
Published: June 2002
View article titled, Physical properties of nitrogen-doped diamond-like amorphous carbon films deposited by supermagnetron plasma chemical vapor deposition
Open the PDF for Physical properties of nitrogen-doped diamond-like amorphous carbon films deposited by supermagnetron plasma chemical vapor deposition in another window
Journal Articles

Thickness-dependent microstructural and electrochromic properties of sputter-deposited Ni oxide films

Kwang-Soon Ahn, Yoon-Chae Nah, Yung-Eun Sung
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 20, 1468–1474 (2002)
https://doi.org/10.1116/1.1487871
Published: June 2002
View article titled, Thickness-dependent microstructural and electrochromic properties of sputter-deposited Ni oxide films
Open the PDF for Thickness-dependent microstructural and electrochromic properties of sputter-deposited Ni oxide films in another window
Journal Articles

GaN grown on two-step cleaned C-terminated 6H–SiC by molecular-beam epitaxy

Z. P. Guan, A. L. Cai, H. Porter, J. Cabalu, J. Chen, S. Huang, R. E. Giedd
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 19, 280–286 (2001)
https://doi.org/10.1116/1.1329120
Published: January 2001
View article titled, GaN grown on two-step cleaned C-terminated 6H–SiC by molecular-beam epitaxy
Open the PDF for GaN grown on two-step cleaned C-terminated 6H–SiC by molecular-beam epitaxy in another window
Journal Articles

Crystallization of amorphous-silicon films with seed layers of microcrystalline silicon by plasma heating

Hae-Yeol Kim, Chan-Do Park, Youn-Seon Kang, Kuk-Jin Jang, Jai-Young Lee
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 18, 2085–2089 (2000)
https://doi.org/10.1116/1.1289538
Published: September 2000
View article titled, Crystallization of amorphous-silicon films with seed layers of microcrystalline silicon by plasma heating
Open the PDF for Crystallization of amorphous-silicon films with seed layers of microcrystalline silicon by plasma heating in another window
Journal Articles

Thickness-dependent crystallinity of sputter-deposited titania

J. D. DeLoach, C. R. Aita
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 16, 1963–1968 (1998)
https://doi.org/10.1116/1.581204
Published: May 1998
View article titled, Thickness-dependent crystallinity of sputter-deposited titania
Open the PDF for Thickness-dependent crystallinity of sputter-deposited titania in another window
Journal Articles

Effect of plasma overetch of polysilicon on gate oxide damage

Calvin T. Gabriel, James P. McVittie
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 13, 900–904 (1995)
https://doi.org/10.1116/1.579849
Published: May 1995
View article titled, Effect of plasma overetch of polysilicon on gate oxide damage
Open the PDF for Effect of plasma overetch of polysilicon on gate oxide damage in another window
Journal Articles

On the low‐pressure mode transition in electron cyclotron heated plasmas

R. A. Dandl, G. E. Guest
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 9, 3119–3125 (1991)
https://doi.org/10.1116/1.577182
Published: November 1991
View article titled, On the low‐pressure mode transition in electron cyclotron heated plasmas
Open the PDF for On the low‐pressure mode transition in electron cyclotron heated plasmas in another window
Journal Articles

Effects of magnetic field and microwave power on electron cyclotron resonance‐type plasma characteristics

Oleg A. Popov
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 9, 711–716 (1991)
https://doi.org/10.1116/1.577349
Published: May 1991
View article titled, Effects of magnetic field and microwave power on electron cyclotron resonance‐type plasma characteristics
Open the PDF for Effects of magnetic field and microwave power on electron cyclotron resonance‐type plasma characteristics in another window
Journal Articles

Some effects of ion cyclotron resonance heating on the Joint European Torus boundary plasma

C. S. Pitcher, M. Bures, L. de Kock, S. K. Erents, N. A. Gottardi, G. M. McCracken, M. F. Stamp, P. C. Stangeby, D. D. R. Summers, J. A. Tagle
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 8, 1760–1766 (1990)
https://doi.org/10.1116/1.576844
Published: May 1990
View article titled, Some effects of ion cyclotron resonance heating on the Joint European Torus boundary plasma
Open the PDF for Some effects of ion cyclotron resonance heating on the Joint European Torus boundary plasma in another window
Journal Articles

Tritium neutral beams for the Tokamak Fusion Test Reactor

L. R. Grisham, H. F. Dylla, M. D. Williams, K. Wright, R. Causey
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 7, 944–948 (1989)
https://doi.org/10.1116/1.575824
Published: May 1989
View article titled, Tritium neutral beams for the Tokamak Fusion Test Reactor
Open the PDF for Tritium neutral beams for the Tokamak Fusion Test Reactor in another window
Journal Articles

Floating potential measurements in the near field of an ion cyclotron resonance heating antenna

J. B. O. Caughman, II, D. N. Ruzic, D. J. Hoffman
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 7, 1092–1098 (1989)
https://doi.org/10.1116/1.576236
Published: May 1989
View article titled, Floating potential measurements in the near field of an ion cyclotron resonance heating antenna
Open the PDF for Floating potential measurements in the near field of an ion cyclotron resonance heating antenna in another window
Journal Articles

GAMMA 10 vacuum system and study of wall conditions

K. Yatsu, Y. Nakashima, S. Moriyama, T. Cho, M. Ichimura, Y. Imai, M. Inutake, S. Miyoshi, N. Yamaguchi
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 6, 2546–2551 (1988)
https://doi.org/10.1116/1.575544
Published: July 1988
View article titled, GAMMA 10 vacuum system and study of wall conditions
Open the PDF for GAMMA 10 vacuum system and study of wall conditions in another window