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Journal Articles
Chang Hyun Cho, Jong Keun Yang, Ji Hun Kim, Dong Chan Seok, Hyun Jong You, Seungryul Yoo, Soo Ouk Jang, Yong-Sup Choi, In Sun Park, In Je Kang
J. Vac. Sci. Technol. A 43, 023004 (2025)
Published: February 2025
Journal Articles
Xingyi Shi, Samaneh Sadighi, Shahid Rauf, Han Luo, Jun-Chieh Wang, Jason Kenney, Jean-Paul Booth, Daniil Marinov, Mickaël Foucher, Nishant Sirse
J. Vac. Sci. Technol. A 43, 013001 (2025)
Published: December 2024
Journal Articles
J. Vac. Sci. Technol. A 42, 052602 (2024)
Published: July 2024
Journal Articles
J. Vac. Sci. Technol. A 42, 032601 (2024)
Published: April 2024
Journal Articles
J. Vac. Sci. Technol. A 42, 033008 (2024)
Published: April 2024
Journal Articles
Pentti Niiranen, Anna Kapran, Hama Nadhom, Martin Čada, Zdeněk Hubička, Henrik Pedersen, Daniel Lundin
J. Vac. Sci. Technol. A 42, 023006 (2024)
Published: February 2024
Journal Articles
J. Vac. Sci. Technol. A 42, 023108 (2024)
Published: February 2024
Journal Articles
J. Vac. Sci. Technol. A 42, 023004 (2024)
Published: February 2024
Journal Articles
J. Vac. Sci. Technol. A 42, 023002 (2024)
Published: January 2024
Journal Articles
J. Vac. Sci. Technol. A 41, 063008 (2023)
Published: October 2023
Journal Articles
J. Zgheib, L. Berthelot, J. Tranchant, N. Ginot, M.-P. Besland, A. Caillard, T. Minea, A. Rhallabi, P.-Y. Jouan
J. Vac. Sci. Technol. A 41, 063003 (2023)
Published: September 2023
Journal Articles
J. Vac. Sci. Technol. A 41, 053003 (2023)
Published: July 2023
Journal Articles
Artem Osipov, Alina Gagaeva, Anastasia Speshilova, Armenak Osipov, Yakov Enns, Alexey Kazakin, Ekaterina Endiiarova, Roman Kornilov, Sergey Alexandrov
J. Vac. Sci. Technol. A 41, 033007 (2023)
Published: April 2023
Journal Articles
J. Vac. Sci. Technol. A 40, 063003 (2022)
Published: October 2022
Journal Articles
Jeffrey M. Woodward, Samantha G. Rosenberg, David R. Boris, Michael J. Johnson, Scott G. Walton, Scooter D. Johnson, Zachary R. Robinson, Neeraj Nepal, Karl F. Ludwig, Jr., Jennifer K. Hite, Charles R. Eddy, Jr.
J. Vac. Sci. Technol. A 40, 062405 (2022)
Published: October 2022
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 40, 053006 (2022)
Published: August 2022
Journal Articles
Yaser H. Helal, Christopher F. Neese, Frank C. De Lucia, Phillip J. Stout, Barry Craver, Michael Armacost
J. Vac. Sci. Technol. A 40, 043004 (2022)
Published: June 2022
Journal Articles
J. Vac. Sci. Technol. A 40, 033001 (2022)
Published: March 2022
Journal Articles
J. Vac. Sci. Technol. A 40, 013002 (2022)
Published: December 2021
Journal Articles
J. Vac. Sci. Technol. A 40, 013001 (2022)
Published: December 2021
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