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Journal Articles
J. Vac. Sci. Technol. A 42, 063004 (2024)
Published: November 2024
Journal Articles
J. Vac. Sci. Technol. A 40, 063003 (2022)
Published: October 2022
Journal Articles
J. Vac. Sci. Technol. A 39, 063001 (2021)
Published: September 2021
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 36, 03E108 (2018)
Published: May 2018
Journal Articles
J. Vac. Sci. Technol. A 36, 031302 (2018)
Published: March 2018
Journal Articles
J. Vac. Sci. Technol. A 35, 061307 (2017)
Published: September 2017
Journal Articles
J. Vac. Sci. Technol. A 35, 05C315 (2017)
Published: August 2017
Journal Articles
J. Vac. Sci. Technol. A 35, 03E105 (2017)
Published: March 2017
Journal Articles
J. Vac. Sci. Technol. A 35, 021310 (2017)
Published: February 2017
Journal Articles
J. Vac. Sci. Technol. A 34, 031302 (2016)
Published: March 2016
Journal Articles
J. Vac. Sci. Technol. A 33, 061306 (2015)
Published: September 2015
Journal Articles
Takahiro Ohno, Daisuke Yagyu, Shigeru Saito, Yasunori Ohno, Hirofumi Nakano, Masatoshi Itoh, Yoshio Uhara, Tsutomu Miura
J. Vac. Sci. Technol. A 33, 063001 (2015)
Published: July 2015
Journal Articles
J. Vac. Sci. Technol. A 33, 041304 (2015)
Published: June 2015
Journal Articles
J. Vac. Sci. Technol. A 31, 061309 (2013)
Published: September 2013
Journal Articles
J. Vac. Sci. Technol. A 30, 031302 (2012)
Published: April 2012
Journal Articles
J. Vac. Sci. Technol. A 30, 011301 (2012)
Published: November 2011
Journal Articles
J. Vac. Sci. Technol. A 29, 011024 (2011)
Published: January 2011
Journal Articles
J. Vac. Sci. Technol. A 27, 970–974 (2009)
Published: June 2009
Journal Articles
J. Vac. Sci. Technol. A 27, 13–19 (2009)
Published: December 2008
Journal Articles
J. Vac. Sci. Technol. A 26, 842–846 (2008)
Published: July 2008
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