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Journal Articles

Harmonic suppression and uniformity improvement of plasma density in capacitively coupled plasma

Yeong-Min Lim, So-Yeong Park, You He, Young-Hun Hong, Chin-Wook Chung
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 063003 (2022)
https://doi.org/10.1116/6.0002016
Published: October 2022
View article titled, Harmonic suppression and uniformity improvement of plasma density in capacitively coupled plasma
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Journal Articles

Polymethylmethacrylate wettability change spatially correlates with self-organized streamer microdischarge patterns in dielectric barrier discharge plasmas

Oleksandr Polonskyi, Torge Hartig, Joshua R. Uzarski, Michael J. Gordon
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 39, 063001 (2021)
https://doi.org/10.1116/6.0001148
Published: September 2021
View article titled, Polymethylmethacrylate wettability change spatially correlates with self-organized streamer microdischarge patterns in dielectric barrier discharge plasmas
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Includes: Supplementary data
Journal Articles

Effect of water vapor on plasma processing at atmospheric pressure: Polymer etching and surface modification by an Ar/H2O plasma jet

Pingshan Luan, V. S. Santosh K. Kondeti, Andrew J. Knoll, Peter J. Bruggeman, Gottlieb S. Oehrlein
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 37, 031305 (2019)
https://doi.org/10.1116/1.5092272
Published: April 2019
View article titled, Effect of water vapor on plasma processing at atmospheric pressure: Polymer etching and surface modification by an Ar/H<sub>2</sub>O plasma jet
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Journal Articles

Impact of plasma jet geometry on residence times of radical species

James Lalor, Laurence Scally, Patrick J. Cullen, Vladimir Milosavljević
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 36, 03E108 (2018)
https://doi.org/10.1116/1.5022294
Published: May 2018
View article titled, Impact of plasma jet geometry on residence times of radical species
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Journal Articles

Noninvasive electrical plasma monitoring method using reactor substrates as alternative current-sensing electrodes

Ji-Hwan Park, Chin-Wook Chung
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 36, 031302 (2018)
https://doi.org/10.1116/1.5017944
Published: March 2018
View article titled, Noninvasive electrical plasma monitoring method using reactor substrates as alternative current-sensing electrodes
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Journal Articles

Application of microcracked columnar TiO2 thin films deposited by DC hollow cathode plasma jet in dye-sensitized solar cells

Roman Perekrestov, Pavel Kudrna, Stanislav Daniš, Milan Tichý, Igor Bieloshapka, Rodica Vladoiu
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 35, 061307 (2017)
https://doi.org/10.1116/1.4992081
Published: September 2017
View article titled, Application of microcracked columnar TiO<sub>2</sub> thin films deposited by DC hollow cathode plasma jet in dye-sensitized solar cells
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Journal Articles

Plasma–surface interaction at atmospheric pressure: A case study of polystyrene etching and surface modification by Ar/O2 plasma jet

Pingshan Luan, Andrew J. Knoll, Peter J. Bruggeman, Gottlieb S. Oehrlein
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 35, 05C315 (2017)
https://doi.org/10.1116/1.5000691
Published: August 2017
View article titled, Plasma–surface interaction at atmospheric pressure: A case study of polystyrene etching and surface modification by Ar/O<sub>2</sub> plasma jet
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Journal Articles

Plasma source development for fusion-relevant material testing

John B. O. Caughman, Richard H. Goulding, Theodore M. Biewer, Timothy S. Bigelow, Ian H. Campbell, Juan Caneses, Stephanie J. Diem, Andy Fadnek, Dan T. Fehling, Ralph C. Isler, Elijah H. Martin, Chad M. Parish, Juergen Rapp, Kun Wang, Clyde J. Beers, David Donovan, Nischal Kafle, Holly B. Ray, Guinevere C. Shaw, Melissa A. Showers
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 35, 03E114 (2017)
https://doi.org/10.1116/1.4982664
Published: May 2017
View article titled, Plasma source development for fusion-relevant material testing
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Journal Articles

Impact of atmospheric pressure nonequilibrium plasma discharge on polymer surface metrology

Laurence Scally, James Lalor, Patrick J. Cullen, Vladimir Milosavljević
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 35, 03E105 (2017)
https://doi.org/10.1116/1.4978254
Published: March 2017
View article titled, Impact of atmospheric pressure nonequilibrium plasma discharge on polymer surface metrology
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Journal Articles

Characterization of a cylindrical ring-cusp ion source with electrically isolated magnet rings

Neil A. Arthur, John E. Foster
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 35, 021310 (2017)
https://doi.org/10.1116/1.4976746
Published: February 2017
View article titled, Characterization of a cylindrical ring-cusp ion source with electrically isolated magnet rings
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Journal Articles

Measurement of spatial and temporal evolution of electromagnetic fields in a 100 MHz plasma source using B dot and double dipole probes

Barton Lane, Colin Campbell, Ikuo Sawada, Peter L. G. Ventzek
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 34, 031302 (2016)
https://doi.org/10.1116/1.4943586
Published: March 2016
View article titled, Measurement of spatial and temporal evolution of electromagnetic fields in a 100 MHz plasma source using B dot and double dipole probes
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Journal Articles

Mass spectrometry measurements of a low pressure expanding plasma jet

Stefano Caldirola, Ruggero Barni, H. Eduardo Roman, Claudia Riccardi
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 33, 061306 (2015)
https://doi.org/10.1116/1.4931612
Published: September 2015
View article titled, Mass spectrometry measurements of a low pressure expanding plasma jet
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Journal Articles

Development of high-vacuum planar magnetron sputtering using an advanced magnetic field geometry

Takahiro Ohno, Daisuke Yagyu, Shigeru Saito, Yasunori Ohno, Hirofumi Nakano, Masatoshi Itoh, Yoshio Uhara, Tsutomu Miura
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 33, 063001 (2015)
https://doi.org/10.1116/1.4927442
Published: July 2015
View article titled, Development of high-vacuum planar magnetron sputtering using an advanced magnetic field geometry
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Journal Articles

Study on spatial distribution of plasma parameters in a magnetized inductively coupled plasma

Hee-Woon Cheong, Woohyun Lee, Ji-Won Kim, Ki-Woong Whang, Hyuk Kim, Wanjae Park
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 33, 041304 (2015)
https://doi.org/10.1116/1.4923027
Published: June 2015
View article titled, Study on spatial distribution of plasma parameters in a magnetized inductively coupled plasma
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Journal Articles

Ion optical effects in a low pressure rf plasma

Hans Oechsner, Hubert Paulus
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 31, 061309 (2013)
https://doi.org/10.1116/1.4823104
Published: September 2013
View article titled, Ion optical effects in a low pressure rf plasma
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Journal Articles

Negative plasma potential in a multidipole chamber with a dielectric coated plasma boundary

J. P. Sheehan, Noah Hershkowitz
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 30, 031302 (2012)
https://doi.org/10.1116/1.4705514
Published: April 2012
View article titled, Negative plasma potential in a multidipole chamber with a dielectric coated plasma boundary
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Journal Articles

Spatially resolved study of primary electron transport in magnetic cusps

Aimee A. Hubble, John E. Foster
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 30, 011301 (2012)
https://doi.org/10.1116/1.3656742
Published: November 2011
View article titled, Spatially resolved study of primary electron transport in magnetic cusps
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Journal Articles

Study of plasma dynamics in a modulated pulsed power magnetron discharge using a time-resolved Langmuir probe

L. Meng, A. N. Cloud, S. Jung, D. N. Ruzic
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 29, 011024 (2011)
https://doi.org/10.1116/1.3528940
Published: January 2011
View article titled, Study of plasma dynamics in a modulated pulsed power magnetron discharge using a time-resolved Langmuir probe
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Journal Articles

Latest innovations in large area web coating technology via plasma enhanced chemical vapor deposition source technology

M. A. George, H. Chandra, P. Mórse, J. Madocks
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 27, 970–974 (2009)
https://doi.org/10.1116/1.3077287
Published: June 2009
View article titled, Latest innovations in large area web coating technology via plasma enhanced chemical vapor deposition source technology
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Journal Articles

Effect on plasma and etch-rate uniformity of controlled phase shift between rf voltages applied to powered electrodes in a triode capacitively coupled plasma reactor

Dougyong Sung, Sangmin Jeong, Youngmin Park, Vladimir N. Volynets, Andrey G. Ushakov, Gon-Ho Kim
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 27, 13–19 (2009)
https://doi.org/10.1116/1.3010717
Published: December 2008
View article titled, Effect on plasma and etch-rate uniformity of controlled phase shift between rf voltages applied to powered electrodes in a triode capacitively coupled plasma reactor
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