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    AVS: Science and Technology of Materials Interfaces and Processing
    Journal of Vacuum Science & Technology A
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    Journal Articles

    Latest innovations in large area web coating technology via plasma enhanced chemical vapor deposition source technology

    M. A. George, H. Chandra, P. Mórse, J. Madocks
    Journal: Journal of Vacuum Science & Technology A
    J. Vac. Sci. Technol. A 27, 970–974 (2009)
    https://doi.org/10.1116/1.3077287
    Published: June 2009
    Abstract
    View article titled, Latest innovations in large area web coating technology via plasma enhanced chemical vapor deposition source technology
    Open the PDF for Latest innovations in large area web coating technology via plasma enhanced chemical vapor deposition source technology in another window
    Journal Articles

    Optimization of cell geometry for a conventional sputter ion pump by a particle-in-cell simulation

    Taekyun Ha, Sukmin Chung, C. D. Park
    Journal: Journal of Vacuum Science & Technology A
    J. Vac. Sci. Technol. A 27, 485–491 (2009)
    https://doi.org/10.1116/1.3106632
    Published: April 2009
    Abstract
    View article titled, Optimization of cell geometry for a conventional sputter ion pump by a particle-in-cell simulation
    Open the PDF for Optimization of cell geometry for a conventional sputter ion pump by a particle-in-cell simulation in another window
    • Online ISSN 1520-8559
    • Print ISSN 0734-2101

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