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Journal Articles

Influence of collision processes in the sheath on ion energy distribution functions in radio frequency discharges

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Yu-Meng Cui, Fang-Fang Ma, Zi-Heng Liu, Nosir Matyakubov, Eugenia Krutsilina, Quan-Zhi Zhang
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 033007 (2025)
https://doi.org/10.1116/6.0004221
Published: May 2025
View articletitled, Influence of collision processes in the sheath on ion energy distribution functions in radio frequency discharges
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Journal Articles

Investigation of the impact of magnetic field intensity on the multimode operational characteristics of kilowatt-class double-stage anode layer Hall thrusters utilizing krypton

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Rui Ding, Yong Wang, Tianlin Wu, Lei Wang, Yi Li, Zijian Liu, Guanrong Hang, Qimeng Xia, Hong Li, Liqiu Wei, Yongjie Ding
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 033006 (2025)
https://doi.org/10.1116/6.0004334
Published: April 2025
View articletitled, Investigation of the impact of magnetic field intensity on the multimode operational characteristics of kilowatt-class double-stage anode layer Hall thrusters utilizing krypton
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Journal Articles

Effect of magnetic field on capacitively coupled plasma modulated by electron beam injection

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Minghan Yan, Tianxiang Zhang, Yanli Peng, Hao Wu, Shali Yang
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 013005 (2025)
https://doi.org/10.1116/6.0004088
Published: January 2025
View articletitled, Effect of magnetic field on capacitively coupled plasma modulated by electron beam injection
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Journal Articles

3D hybrid simulation of postarc sheath expansion with nonuniform residual plasmas

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Zhenxing Wang, Rui Li, Bo Cao, Haopo Liu, Jing Liu, Liqiong Sun, Yingsan Geng, Jianhua Wang
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 053008 (2024)
https://doi.org/10.1116/6.0003859
Published: September 2024
View articletitled, 3D hybrid simulation of postarc sheath expansion with nonuniform residual plasmas
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Journal Articles

Numerical study of the effects of discharge parameters on capacitively coupled plasma in a magnetic field

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Minghan Yan, Huanhuan Wu, Hao Wu, Yanli Peng, Shali Yang
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 053007 (2024)
https://doi.org/10.1116/6.0003692
Published: September 2024
View articletitled, Numerical study of the effects of discharge parameters on capacitively coupled plasma in a magnetic field
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Journal Articles

Machine learning-based prediction of the electron energy distribution function and electron density of argon plasma from the optical emission spectra

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Fatima Jenina Arellano, Minoru Kusaba, Stephen Wu, Ryo Yoshida, Zoltán Donkó, Peter Hartmann, Tsanko V. Tsankov, Satoshi Hamaguchi
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 053001 (2024)
https://doi.org/10.1116/6.0003731
Published: July 2024
View articletitled, Machine learning-based prediction of the electron energy distribution function and electron density of argon plasma from the optical emission spectra
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Journal Articles

Effects of magnetic field gradient on capacitively coupled plasma driven by tailored voltage waveforms

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Huanhuan Wu, Minghan Yan, Hao Wu, Shali Yang
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 033003 (2024)
https://doi.org/10.1116/6.0003324
Published: March 2024
View articletitled, Effects of magnetic field gradient on capacitively coupled plasma driven by tailored voltage waveforms
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Journal Articles

Optimizing impedance matching parameters for single-frequency capacitively coupled plasma via machine learning

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Dehen Cao, Shimin Yu, Zili Chen, Yu Wang, Hongyu Wang, Zhipeng Chen, Wei Jiang, Ya Zhang
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 013001 (2024)
https://doi.org/10.1116/5.0173921
Published: December 2023
View articletitled, Optimizing impedance matching parameters for single-frequency capacitively coupled plasma via machine learning
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Journal Articles

Effects of the focus ring on the ion kinetics at the wafer edge in capacitively coupled plasma reactors

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Fang-Fang Ma, Quan-Zhi Zhang, Dao-Man Han, Zi-Lan Xiong, Ming Gao, You-Nian Wang
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 053002 (2023)
https://doi.org/10.1116/6.0002585
Published: July 2023
View articletitled, Effects of the focus ring on the ion kinetics at the wafer edge in capacitively coupled plasma reactors
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Journal Articles

Ion velocity distribution functions across a plasma meniscus

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D. Caron, R. John, E. E. Scime, T. E. Steinberger
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 033001 (2023)
https://doi.org/10.1116/6.0002439
Published: March 2023
View articletitled, Ion velocity distribution functions across a plasma meniscus
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Journal Articles

Control of the ion flux and energy distribution of dual-frequency capacitive RF plasmas by the variation of the driving voltages

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Hwan Ho Kim, Ji Hyun Shin, Hae June Lee
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 023004 (2023)
https://doi.org/10.1116/6.0002242
Published: February 2023
View articletitled, Control of the ion flux and energy distribution of dual-frequency capacitive RF plasmas by the variation of the driving voltages
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Journal Articles

Effects of structured electrodes on electron power absorption and plasma uniformity in capacitive RF discharges

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Li Wang, Peter Hartmann, Zoltán Donkó, Yuan-Hong Song, Julian Schulze
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 39, 063004 (2021)
https://doi.org/10.1116/6.0001327
Published: October 2021
View articletitled, Effects of structured electrodes on electron power absorption and plasma uniformity in capacitive RF discharges
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Journal Articles

Plasma polymerization of cyclopropylamine in a low-pressure cylindrical magnetron reactor: A PIC-MC study of the roles of ions and radicals

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Stella Mathioudaki, Cédric R. Vandenabeele, Romain Tonneau, Andreas Pflug, Jonathan Tennyson, Stéphane Lucas
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 38, 033003 (2020)
https://doi.org/10.1116/1.5142913
Published: April 2020
View articletitled, Plasma polymerization of cyclopropylamine in a low-pressure cylindrical magnetron reactor: A PIC-MC study of the roles of ions and radicals
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Journal Articles

Particle-in-cell simulations and passive bulk model of collisional capacitive discharge

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Emi Kawamura, Michael A. Lieberman, Allan J. Lichtenberg, Pascal Chabert
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 38, 023003 (2020)
https://doi.org/10.1116/1.5135575
Published: January 2020
View articletitled, Particle-in-cell simulations and passive bulk model of collisional capacitive discharge
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Journal Articles

Characterization of a pulsed low pressure argon discharge in a cylindrical magnetron reactor by plasma diagnostic and 3D plasma modeling

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Stella Mathioudaki, Cédric Vandenabeele, Romain Tonneau, Andreas Pflug, Stéphane Lucas
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 37, 031301 (2019)
https://doi.org/10.1116/1.5064690
Published: March 2019
View articletitled, Characterization of a pulsed low pressure argon discharge in a cylindrical magnetron reactor by plasma diagnostic and 3D plasma modeling
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Journal Articles

Experimental and numerical investigations of electron density in low-pressure dual-frequency capacitively coupled oxygen discharges

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Jia Liu, De-Qi Wen, Yong-Xin Liu, Fei Gao, Wen-Qi Lu, You-Nian Wang
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 31, 061308 (2013)
https://doi.org/10.1116/1.4822059
Published: September 2013
View articletitled, Experimental and numerical investigations of electron density in low-pressure dual-frequency capacitively coupled oxygen discharges
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Journal Articles

Resonance hairpin and Langmuir probe-assisted laser photodetachment measurements of the negative ion density in a pulsed dc magnetron discharge

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James W. Bradley, Robert Dodd, S.-D. You, Nishant Sirse, Shantanu Kumar Karkari
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 29, 031305 (2011)
https://doi.org/10.1116/1.3580934
Published: April 2011
View articletitled, Resonance hairpin and Langmuir probe-assisted laser photodetachment measurements of the negative ion density in a pulsed dc magnetron discharge
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Journal Articles

Surface-charging effect of capacitively coupled plasmas driven by combined dc/rf sources

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Quan-Zhi Zhang, Wei Jiang, Shu-Xia Zhao, You-Nian Wang
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 28, 287–292 (2010)
https://doi.org/10.1116/1.3305537
Published: February 2010
View articletitled, Surface-charging effect of capacitively coupled plasmas driven by combined dc/rf sources
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Journal Articles

Optimization of cell geometry for a conventional sputter ion pump by a particle-in-cell simulation

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Taekyun Ha, Sukmin Chung, C. D. Park
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 27, 485–491 (2009)
https://doi.org/10.1116/1.3106632
Published: April 2009
View articletitled, Optimization of cell geometry for a conventional sputter ion pump by a particle-in-cell simulation
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Journal Articles

Numerical study of the sputtering in a dc magnetron

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Ivan Kolev, Annemie Bogaerts
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 27, 20–28 (2009)
https://doi.org/10.1116/1.3013856
Published: December 2008
View articletitled, Numerical study of the sputtering in a dc magnetron
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