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Journal Articles
Rahel Heesemann, Isa Bettermann, Roshan Paul, Milena Rey, Thomas Gries, Lilin Feng, Ulrich Schwaneberg, Claus Hummelsheim
J. Vac. Sci. Technol. A 41, 053110 (2023)
Published: August 2023
Journal Articles
J. Vac. Sci. Technol. A 40, 063201 (2022)
Published: September 2022
Journal Articles
J. Vac. Sci. Technol. A 40, 053203 (2022)
Published: August 2022
Journal Articles
Takeru Saito, Kazuki Yoshida, Kentaro Saito, Masanori Miura, Kensaku Kanomata, Bashir Ahmmad, Shigeru Kubota, Fumihiko Hirose
J. Vac. Sci. Technol. A 40, 042406 (2022)
Published: June 2022
Journal Articles
J. Vac. Sci. Technol. A 40, 033201 (2022)
Published: March 2022
Journal Articles
Florian Buchner, Katrin Forster-Tonigold, Tim Bolter, Alexander Rampf, Jens Klein, Axel Groß, R. Jürgen Behm
J. Vac. Sci. Technol. A 40, 023204 (2022)
Published: February 2022
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 40, 013202 (2022)
Published: November 2021
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 39, 063218 (2021)
Published: October 2021
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 39, 063205 (2021)
Published: September 2021
Journal Articles
J. Vac. Sci. Technol. A 39, 063201 (2021)
Published: September 2021
Journal Articles
Hiroyuki Morita, Takumi Matsushima, Kisho Nakamura, Kenta Kaneko, Satoru Kaneko, Akifumi Matsuda, Mamoru Yoshimoto
J. Vac. Sci. Technol. A 39, 043414 (2021)
Published: June 2021
Journal Articles
J. Vac. Sci. Technol. A 39, 043405 (2021)
Published: May 2021
Journal Articles
J. Vac. Sci. Technol. A 38, 040805 (2020)
Published: June 2020
Journal Articles
J. Vac. Sci. Technol. A 38, 043006 (2020)
Published: June 2020
Journal Articles
Zheng Hui Lim, Matthew Chrysler, Abinash Kumar, Jacob P. Mauthe, Divine P. Kumah, Chris Richardson, James M. LeBeau, Joseph H. Ngai
J. Vac. Sci. Technol. A 38, 013406 (2020)
Published: December 2019
Journal Articles
J. Vac. Sci. Technol. A 38, 010801 (2020)
Published: December 2019
Journal Articles
J. Vac. Sci. Technol. A 37, 060801 (2019)
Published: October 2019
Journal Articles
Urmilaben P. Rathod, Bimin Cai, Chukwudi Iheomamere, Gilbert Nyandoto, Andrey A. Voevodin, Nigel D. Shepherd
J. Vac. Sci. Technol. A 37, 051505 (2019)
Published: August 2019
Journal Articles
J. Vac. Sci. Technol. A 37, 040801 (2019)
Published: June 2019
Journal Articles
J. Vac. Sci. Technol. A 36, 06A104 (2018)
Published: October 2018
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