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Journal Articles

Comparison study on C–Cr and a-C coatings on titanium plates for PEMFCs applications via midfrequency magnetron sputtering

Hanzhuo He, Song Li, Saiqiang Wang, De Ning, Ming Ma, Jiao Yang, Zhi Long, Dongfeng Xue, Chunlei Yang, Weimin Li
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 033101 (2025)
https://doi.org/10.1116/6.0004271
Published: March 2025
View article titled, Comparison study on C–Cr and a-C coatings on titanium plates for PEMFCs applications via midfrequency magnetron sputtering
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Journal Articles

Generation of ultra-low work function surfaces by caesium and water coadsorption in view of negative hydrogen ion sources

A. Heiler, N. Klose, R. Friedl, U. Fantz, D. Vlachos
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 033203 (2025)
https://doi.org/10.1116/6.0004354
Published: March 2025
View article titled, Generation of ultra-low work function surfaces by caesium and water coadsorption in view of negative hydrogen ion sources
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Journal Articles

X-ray photoelectron spectroscopy investigation of chemical changes to nickel oxide and iron–nickel oxide surfaces caused by monoatomic argon ion and gas cluster ion beam sputtering

Michael C. Burrell, Caleb Hustedt, Robert A. Morris
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 033202 (2025)
https://doi.org/10.1116/6.0004377
Published: March 2025
View article titled, X-ray photoelectron spectroscopy investigation of chemical changes to nickel oxide and iron–nickel oxide surfaces caused by monoatomic argon ion and gas cluster ion beam sputtering
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Journal Articles

MgF2-based conformal antireflection coatings on highly curved lenses by atomic layer deposition

Yuma Sugai, Hironori Sugata, Takuya Sugawara, Safdar Muhammad, Parmish Kaur, Jani Hämäläinen, Nina Lamminmäki, Juhana Kostamo
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 032403 (2025)
https://doi.org/10.1116/6.0004251
Published: March 2025
View article titled, MgF<sub>2</sub>-based conformal antireflection coatings on highly curved lenses by atomic layer deposition
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Journal Articles

Molybdenum carbonitride Schottky contacts prepared by thermal atomic layer deposition on gallium nitride

Jacob W. Clark, Chan-Wen Chiu, Bangzhi Liu, Thomas J. Larrabee, Sr., Nathan S. Banner, Nicholas D. Redwing, Jennifer Gray, Suzanne E. Mohney
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 032402 (2025)
https://doi.org/10.1116/6.0004241
Published: March 2025
View article titled, Molybdenum carbonitride Schottky contacts prepared by thermal atomic layer deposition on gallium nitride
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Journal Articles

Recent trends in thermal atomic layer deposition chemistry

Featured
Georgi Popov, Miika Mattinen, Anton Vihervaara, Markku Leskelä
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 030801 (2025)
https://doi.org/10.1116/6.0004320
Published: March 2025
View article titled, Recent trends in thermal atomic layer deposition chemistry
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Journal Articles

SiO2 atomic-layer fluorination-passivation for dual-material molybdenum/polypyrrole area-selective deposition and strategies for surface reactivation

Editor’s Pick
Hwan Oh, Hyuenwoo Yang, Nicholas M. Carroll, Yujin Jang, Gregory N. Parsons
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 032401 (2025)
https://doi.org/10.1116/6.0004298
Published: March 2025
View article titled, SiO<sub>2</sub> atomic-layer fluorination-passivation for dual-material molybdenum/polypyrrole area-selective deposition and strategies for surface reactivation
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Journal Articles

Perspective on comparative radiation hardness of Ga2O3 polymorphs

Featured
S. J. Pearton, Fan Ren, Alexander Y. Polyakov, Eugene B. Yakimov, Leonid Chernyak, Aman Haque
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 038501 (2025)
https://doi.org/10.1116/6.0004444
Published: March 2025
View article titled, Perspective on comparative radiation hardness of Ga<sub>2</sub>O<sub>3</sub> polymorphs
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Journal Articles

Role of a cyclopentadienyl ligand in Hf precursors using H2O or O3 as oxidant in atomic layer deposition

Editor’s Pick
Youngmin Song, Hui-Jin Kim, Soo Hyun Lee, Sujin Kwon, Bonggeun Shong, Il-Kwon Oh
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 022414 (2025)
https://doi.org/10.1116/6.0004358
Published: March 2025
View article titled, Role of a cyclopentadienyl ligand in Hf precursors using H<sub>2</sub>O or O<sub>3</sub> as oxidant in atomic layer deposition
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Journal Articles

Investigation on properties of the TiSiN/TiSi-diamondlike carbon multilayer coatings prepared by hybrid deposition technique

Menghui Chen, Mai Yang, Tao Huang, Yibing Su, Yuzhe Han, Qizhong Li, Meijun Yang, Song Zhang, Takashi Goto, Rong Tu
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 023107 (2025)
https://doi.org/10.1116/6.0004356
Published: March 2025
View article titled, Investigation on properties of the TiSiN/TiSi-diamondlike carbon multilayer coatings prepared by hybrid deposition technique
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Journal Articles

Low-temperature ALD of metallic cobalt using the CoCOhept precursor: Simulation-assisted process development for deposition on temperature sensitive 3D-structures

Editor’s Pick
Mathias Franz, Linda Jäckel, Xiao Hu, Lysann Kaßner, Camilla Thurm, Dirk Rittrich, Christian Helke, Jörg Schuster, Marcus Daniel, Frank Stahr, Natalia Rüffer, Robert Kretschmer, Stefan E. Schulz
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 022412 (2025)
https://doi.org/10.1116/6.0004248
Published: February 2025
View article titled, Low-temperature ALD of metallic cobalt using the CoCOhept precursor: Simulation-assisted process development for deposition on temperature sensitive 3D-structures
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Journal Articles

Effects of ozone on physical and electrical properties of In–Ga–Zn–O film by thermal atomic layer deposition

Yongqing Shen, Xinlv Duan, Jinjuan Xiang, Zhengying Jiao, Liguo Chai, Xueli Ma, Yuting Chen, Di Geng, Guilei Wang, Chao Zhao
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 022411 (2025)
https://doi.org/10.1116/6.0004355
Published: February 2025
View article titled, Effects of ozone on physical and electrical properties of In–Ga–Zn–O film by thermal atomic layer deposition
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Journal Articles

Nucleation studies of high-κ aluminum oxide and hafnium oxide thin films on silicon carbide by plasma-enhanced atomic layer deposition

B. Galizia, E. Schilirò, P. Fiorenza, S. Peters, J. Zessin, F. Roccaforte, R. Lo Nigro
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 022410 (2025)
https://doi.org/10.1116/6.0004252
Published: February 2025
View article titled, Nucleation studies of high-κ aluminum oxide and hafnium oxide thin films on silicon carbide by plasma-enhanced atomic layer deposition
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Journal Articles

Atomic layer deposition of aluminum phosphate layers using tris(dimethylamino)phosphine as P-precursor

Editor’s Pick
Ruben Blomme, Aditya Chalishazar, Lowie Henderick, Frans Munnik, Johan Meersschaut, Matthias M. Minjauw, Christophe Detavernier, Jolien Dendooven
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 022409 (2025)
https://doi.org/10.1116/6.0004267
Published: February 2025
View article titled, Atomic layer deposition of aluminum phosphate layers using tris(dimethylamino)phosphine as P-precursor
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Journal Articles

Enhancing the nucleation in atomic layer deposition: A study on vanadium sulfide and oxide layers

Zsofia Baji, Zsolt Fogarassy, Orsolya Hakkel, Zoltán Szabó
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 022408 (2025)
https://doi.org/10.1116/6.0004247
Published: February 2025
View article titled, Enhancing the nucleation in atomic layer deposition: A study on vanadium sulfide and oxide layers
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Journal Articles

Metallic molybdenum obtained by atomic layer deposition from Mo(CO)6

Kees van der Zouw, Bernhard Y. van der Wel, Jacobus M. Sturm, Antonius A. I. Aarnink, Rob A. M. Wolters, Dirk J. Gravesteijn, Alexey Y. Kovalgin
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 022407 (2025)
https://doi.org/10.1116/6.0004244
Published: February 2025
View article titled, Metallic molybdenum obtained by atomic layer deposition from Mo(CO)<sub>6</sub>
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Includes: Supplementary data
Journal Articles

Area selective PECVD on metal oxide resist

Rosanna A. Robert, Katie Lutker-Lee, Christophe Vallée
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 023407 (2025)
https://doi.org/10.1116/6.0004072
Published: February 2025
View article titled, Area selective PECVD on metal oxide resist
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Journal Articles

Structure and tribological evolution of Ta-N layer by controlling the time of microwave plasma nitriding

Jiacheng Li, Zhigang Xu, Jian Peng, Qiang Shen, Chuanbin Wang
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 023103 (2025)
https://doi.org/10.1116/6.0004327
Published: February 2025
View article titled, Structure and tribological evolution of Ta-N layer by controlling the time of microwave plasma nitriding
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Journal Articles

Comparative study of film quality on c axis oriented AlN deposited by pulsed DC and RF reactive sputtering with optical emission spectroscopy big data analysis

Xue-Li Tseng, Hsuan-Fan Chen, Yu-Shin Chen, Shun-Chien Chiu, Hsiao-Han Lo, Yiin-Kuen Fuh, Tomi T. Li
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 023406 (2025)
https://doi.org/10.1116/6.0004001
Published: February 2025
View article titled, Comparative study of film quality on <em>c</em> axis oriented AlN deposited by pulsed DC and RF reactive sputtering with optical emission spectroscopy big data analysis
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Journal Articles

In situ growth of ultrathin Y2O3 capping layers for Eu-organic thin films via atomic/molecular layer deposition

Topias Jussila, Joona Pekkanen, Anni Virta, Amr Ghazy, Mika Lastusaari, Maarit Karppinen
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 022406 (2025)
https://doi.org/10.1116/6.0004237
Published: February 2025
View article titled, <em>In situ</em> growth of ultrathin Y<sub>2</sub>O<sub>3</sub> capping layers for Eu-organic thin films via atomic/molecular layer deposition
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