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Journal Articles

Atomic layer deposition of Al_xTi_1−xN via co-evaporation of metal precursors

Pamburayi Mpofu, Pentti Niiranen, Oscar Alm, Jonas Lauridsen, Tommy Larsson, Henrik Pedersen

J. Vac. Sci. Technol. A 43, 032405 (2025)

https://doi.org/10.1116/6.0004420

Published: March 2025

View articletitled, Atomic layer deposition of AlxTi1−xN via co-evaporation of metal precursors

Journal Articles

Enhancing chemical vapor deposition growth and fabrication techniques to maximize hole conduction in tungsten diselenide for monolithic CMOS integration

Jatin Vikram Singh, Matthew N. Disiena, S. S. Teja Nibhanupudi, Nicholas T. Watanabe, JaeHyun Ahn, Dong-Won Kim, Anupam Roy, Sanjay K. Banerjee

J. Vac. Sci. Technol. A 43, 022201 (2025)

https://doi.org/10.1116/6.0003893

Published: February 2025

View articletitled, Enhancing chemical vapor deposition growth and fabrication techniques to maximize hole conduction in tungsten diselenide for monolithic CMOS integration

Journal Articles

Novel precursor for the preparation of vanadium sulfide layers with atomic layer deposition

Zsófia Baji, Zsolt Fogarassy, Attila Sulyok, Zsolt Endre Horváth, Zoltán Szabó

J. Vac. Sci. Technol. A 43, 022405 (2025)

https://doi.org/10.1116/6.0004127

Published: February 2025

View articletitled, Novel precursor for the preparation of vanadium sulfide layers with atomic layer deposition

Journal Articles

Revisiting the assignment of atomic charges in metal oxides based on core-level x-ray photoelectron spectra: The case of Ti in SrTiO₃(001)

Scott A. Chambers, Peter V. Sushko, Paul S. Bagus

J. Vac. Sci. Technol. A 43, 023203 (2025)

https://doi.org/10.1116/6.0004210

Published: February 2025

View articletitled, Revisiting the assignment of atomic charges in metal oxides based on core-level x-ray photoelectron spectra: The case of Ti in SrTiO3(001)

Journal Articles

Effect of nitrogen partial pressure on the structural and mechanical properties of (MoNbTaW)N thin films deposited by DC magnetron sputtering

Saikumar Katta, Bharath Kumar Bandla, Sudharshan Phani Pardasaradhi, Venkata Girish Kotnur

J. Vac. Sci. Technol. A 43, 013404 (2025)

https://doi.org/10.1116/6.0004124

Published: December 2024

View articletitled, Effect of nitrogen partial pressure on the structural and mechanical properties of (MoNbTaW)N thin films deposited by DC magnetron sputtering

Journal Articles

Luminescent silicon nanocrystals capped with naturally occurring ligands

Benjamin J. Stacy, Loc Ngo, Kara Nagasaki, Brian A. Korgel

J. Vac. Sci. Technol. A 43, 013105 (2025)

https://doi.org/10.1116/6.0004101

Published: December 2024

View articletitled, Luminescent silicon nanocrystals capped with naturally occurring ligands

Journal Articles

Chemical mechanism for nucleation enhancement in atomic layer deposition of Pt by surface functionalization

Sujin Kwon, Bonggeun Shong

J. Vac. Sci. Technol. A 43, 012401 (2025)

https://doi.org/10.1116/6.0004143

Published: December 2024

View articletitled, Chemical mechanism for nucleation enhancement in atomic layer deposition of Pt by surface functionalization

Journal Articles

Influence of polymorphism on the lattice thermal conductivity of Ga₂O₃

Haoran Sun, Gang Yang

J. Vac. Sci. Technol. A 42, 062801 (2024)

https://doi.org/10.1116/6.0003844

Published: November 2024

View articletitled, Influence of polymorphism on the lattice thermal conductivity of Ga2O3

Journal Articles

Influence of hydrogen-bonded 3-mercaptopropionic acid bilayers on binary self-assembled monolayer formation

Lindsey N. Penland, H. H. Hirushan, N. Dissanayake, Rachael G. Farber

J. Vac. Sci. Technol. A 42, 063205 (2024)

https://doi.org/10.1116/6.0003926

Published: September 2024

View articletitled, Influence of hydrogen-bonded 3-mercaptopropionic acid bilayers on binary self-assembled monolayer formation

Journal Articles

Application of FEFF to the x-ray spectroscopy of cerium dioxide

J. G. Tobin

J. Vac. Sci. Technol. A 42, 063203 (2024)

https://doi.org/10.1116/6.0003938

Published: September 2024

View articletitled, Application of FEFF to the x-ray spectroscopy of cerium dioxide

Journal Articles

First-principles calculations on adsorption-diffusion behavior of transition layer Ti atoms on the Fe surface

Haiwei Han, Chunyan Chen, Shunuo Bian, Lihua Yu, Junhua Xu, Xinmeng Wu, Yaohong Jiang, Lijun Zhao

J. Vac. Sci. Technol. A 42, 053406 (2024)

https://doi.org/10.1116/6.0003808

Published: August 2024

View articletitled, First-principles calculations on adsorption-diffusion behavior of transition layer Ti atoms on the Fe surface

Journal Articles

First principles reaction processes of Co(CO)₃NO as an atomic layer deposition precursor on SiO₂ and Co surfaces

Nickolas M. Ashburn, Xiuyao Lang, Youhwan Jo, Yeonghun Lee, Xiaolong Yao, Kyeongjae Cho

J. Vac. Sci. Technol. A 42, 052401 (2024)

https://doi.org/10.1116/6.0003769

Published: July 2024

View articletitled, First principles reaction processes of Co(CO)3NO as an atomic layer deposition precursor on SiO2 and Co surfaces

Journal Articles

Influence of high-temperature thermal annealing on paramagnetic point defects in silicon-rich silicon nitride films formed in a single-wafer-type low-pressure chemical vapor deposition reactor

Kiyoteru Kobayashi, Ryo Miyauchi, Kenshi Kimoto

J. Vac. Sci. Technol. A 42, 050402 (2024)

https://doi.org/10.1116/6.0003778

Published: July 2024

View articletitled, Influence of high-temperature thermal annealing on paramagnetic point defects in silicon-rich silicon nitride films formed in a single-wafer-type low-pressure chemical vapor deposition reactor

Journal Articles

Review of actinide core-level photoemission

Alaina Thompson, William Limestall, Art Nelson, Daniel T. Olive, Jeff Terry

J. Vac. Sci. Technol. A 42, 050802 (2024)

https://doi.org/10.1116/6.0003534

Published: July 2024

View articletitled, Review of actinide core-level photoemission

Journal Articles

Enhanced surface performance of insulating ceramic by plasma polymerization with nanosecond-pulse dielectric barrier discharge: Insight into the effect of the repetition frequency

Xinglei Cui, Long Li, Zhenbo Xu, Xi Zhu, Shakeel Akram, Zhi Fang

J. Vac. Sci. Technol. A 42, 043005 (2024)

https://doi.org/10.1116/6.0003519

Published: June 2024

View articletitled, Enhanced surface performance of insulating ceramic by plasma polymerization with nanosecond-pulse dielectric barrier discharge: Insight into the effect of the repetition frequency

Journal Articles

Mechanism study of H₂-plasma assisted Si₃N₄ layered etch

Ying Rui, Sumeet Pandey, Chenmeng Hsie, Lan Li

J. Vac. Sci. Technol. A 42, 042603 (2024)

https://doi.org/10.1116/6.0003653

Published: June 2024

View articletitled, Mechanism study of H2-plasma assisted Si3N4 layered etch

Journal Articles

Corrosion resistance and conductivity of CrN, CrAlN, and CrTiN coatings applied to bipolar plates for proton exchange membrane fuel cells

Qiang Chen, Mingxu Su, Dandan Liang, Qiong Zhou, Biao Huang, Ergeng Zhang

J. Vac. Sci. Technol. A 42, 043103 (2024)

https://doi.org/10.1116/6.0003601

Published: May 2024

View articletitled, Corrosion resistance and conductivity of CrN, CrAlN, and CrTiN coatings applied to bipolar plates for proton exchange membrane fuel cells

Journal Articles

In situ atom-resolved observation of Si (111) 7×7 surface with F radical and Ar ion irradiation simulated atomic layer etching

Takayoshi Tsutsumi, Atsuki Asano, Hiroki Kondo, Kenji Ishikawa, Makoto Sekine, Masaru Hori

J. Vac. Sci. Technol. A 42, 032603 (2024)

https://doi.org/10.1116/6.0003432

Published: April 2024

View articletitled, In situ atom-resolved observation of Si (111) 7×7 surface with F radical and Ar ion irradiation simulated atomic layer etching

Journal Articles

Computational study and ion diffusion analyses of native defects and indium alloying in β-Ga₂O₃ structures

Nathan Rabelo Martins, Luiz Augusto Ferreira de Campos Viana, Alan Antônio das Graças Santos, Daiane Damasceno Borges, Eric Welch, Pablo Damasceno Borges, Luisa Scolfaro

J. Vac. Sci. Technol. A 42, 032801 (2024)

https://doi.org/10.1116/6.0003435

Published: March 2024

View articletitled, Computational study and ion diffusion analyses of native defects and indium alloying in β-Ga2O3 structures

Includes: Supplementary data

Journal Articles

Molecular dynamics simulation of amine formation in plasma-enhanced chemical vapor deposition with hydrocarbon and amino radicals

Anjar Anggraini Harumningtyas, Tomoko Ito, Michiro Isobe, Lenka Zajíčková, Satoshi Hamaguchi

J. Vac. Sci. Technol. A 41, 063007 (2023)

https://doi.org/10.1116/6.0002978

Published: October 2023

View articletitled, Molecular dynamics simulation of amine formation in plasma-enhanced chemical vapor deposition with hydrocarbon and amino radicals

Includes: Supplementary data

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Atomic layer deposition of Al_xTi_1−xN via co-evaporation of metal precursors

Enhancing chemical vapor deposition growth and fabrication techniques to maximize hole conduction in tungsten diselenide for monolithic CMOS integration

Novel precursor for the preparation of vanadium sulfide layers with atomic layer deposition

Revisiting the assignment of atomic charges in metal oxides based on core-level x-ray photoelectron spectra: The case of Ti in SrTiO₃(001)

Effect of nitrogen partial pressure on the structural and mechanical properties of (MoNbTaW)N thin films deposited by DC magnetron sputtering

Luminescent silicon nanocrystals capped with naturally occurring ligands

Chemical mechanism for nucleation enhancement in atomic layer deposition of Pt by surface functionalization

Influence of polymorphism on the lattice thermal conductivity of Ga₂O₃

Influence of hydrogen-bonded 3-mercaptopropionic acid bilayers on binary self-assembled monolayer formation

Application of FEFF to the x-ray spectroscopy of cerium dioxide

First-principles calculations on adsorption-diffusion behavior of transition layer Ti atoms on the Fe surface

First principles reaction processes of Co(CO)₃NO as an atomic layer deposition precursor on SiO₂ and Co surfaces

Influence of high-temperature thermal annealing on paramagnetic point defects in silicon-rich silicon nitride films formed in a single-wafer-type low-pressure chemical vapor deposition reactor

Review of actinide core-level photoemission

Enhanced surface performance of insulating ceramic by plasma polymerization with nanosecond-pulse dielectric barrier discharge: Insight into the effect of the repetition frequency

Mechanism study of H₂-plasma assisted Si₃N₄ layered etch

Corrosion resistance and conductivity of CrN, CrAlN, and CrTiN coatings applied to bipolar plates for proton exchange membrane fuel cells

In situ atom-resolved observation of Si (111) 7×7 surface with F radical and Ar ion irradiation simulated atomic layer etching

Computational study and ion diffusion analyses of native defects and indium alloying in β-Ga₂O₃ structures

Molecular dynamics simulation of amine formation in plasma-enhanced chemical vapor deposition with hydrocarbon and amino radicals

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