1-20 of 25
Charge exchange reactions
Close
Save search
Follow your search
Access your saved searches in your account
Close Modal
Sort by
Journal Articles

Temporal evolution of ion energy distribution functions and ion charge states of Cr and Cr-Al pulsed arc plasmas

Koichi Tanaka, André Anders
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 33, 061301 (2015)
https://doi.org/10.1116/1.4926750
Published: July 2015
View article titled, Temporal evolution of ion energy distribution functions and ion charge states of Cr and Cr-Al pulsed arc plasmas
Open the PDF for Temporal evolution of ion energy distribution functions and ion charge states of Cr and Cr-Al pulsed arc plasmas in another window
Journal Articles

Laterally resolved ion-distribution functions at the substrate position during magnetron sputtering of indium-tin oxide films

A. Plagemann, K. Ellmer, K. Wiesemann
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 25, 1341–1350 (2007)
https://doi.org/10.1116/1.2753843
Published: July 2007
View article titled, Laterally resolved ion-distribution functions at the substrate position during magnetron sputtering of indium-tin oxide films
Open the PDF for Laterally resolved ion-distribution functions at the substrate position during magnetron sputtering of indium-tin oxide films in another window
Journal Articles

K ion scattering from Au nanoclusters on Ti O 2 ( 110 )

G. F. Liu, P. Karmakar, J. A. Yarmoff
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 25, 1133–1136 (2007)
https://doi.org/10.1116/1.2723764
Published: July 2007
View article titled, K ion scattering from Au nanoclusters on Ti O 2 ( 110 )
Open the PDF for K ion scattering from Au nanoclusters on Ti O 2 ( 110 ) in another window
Journal Articles

Benjamin Franklin and electrophotography

L. B. Schein
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 25, 1256–1260 (2007)
https://doi.org/10.1116/1.2715957
Published: July 2007
View article titled, Benjamin Franklin and electrophotography
Open the PDF for Benjamin Franklin and electrophotography in another window
Journal Articles

Oxygen ion energy distribution: Role of ionization, resonant, and nonresonant charge-exchange collisions

N. Yu. Babaeva, J. K. Lee, J. W. Shon, E. A. Hudson
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 23, 699–704 (2005)
https://doi.org/10.1116/1.1943451
Published: June 2005
View article titled, Oxygen ion energy distribution: Role of ionization, resonant, and nonresonant charge-exchange collisions
Open the PDF for Oxygen ion energy distribution: Role of ionization, resonant, and nonresonant charge-exchange collisions in another window
Journal Articles

Effects of adsorbates on charge exchange in Li + ion scattering from Ni(100)

Ye Yang, Jory A. Yarmoff
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 21, 1317–1321 (2003)
https://doi.org/10.1116/1.1579012
Published: July 2003
View article titled, Effects of adsorbates on charge exchange in Li + ion scattering from Ni(100)
Open the PDF for Effects of adsorbates on charge exchange in Li + ion scattering from Ni(100) in another window
Journal Articles

Sheath thickness in very-high-frequency plasma chemical vapor deposition of hydrogenated amorphous silicon

W. G. J. H. M. van Sark, H. Meiling, E. A. G. Hamers, J. Bezemer, W. F. van der Weg
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 15, 654–658 (1997)
https://doi.org/10.1116/1.580700
Published: May 1997
View article titled, Sheath thickness in very-high-frequency plasma chemical vapor deposition of hydrogenated amorphous silicon
Open the PDF for Sheath thickness in very-high-frequency plasma chemical vapor deposition of hydrogenated amorphous silicon in another window
Journal Articles

High‐pressure effects in miniature arrays of quadrupole analyzers for residual gas analysis from 10−9 to 10−2 Torr

R. J. Ferran, S. Boumsellek
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 14, 1258–1265 (1996)
https://doi.org/10.1116/1.579938
Published: May 1996
View article titled, High‐pressure effects in miniature arrays of quadrupole analyzers for residual gas analysis from 10<sup>−9</sup> to 10<sup>−2</sup> Torr
Open the PDF for High‐pressure effects in miniature arrays of quadrupole analyzers for residual gas analysis from 10<sup>−9</sup> to 10<sup>−2</sup> Torr in another window
Journal Articles

Ion implantation for silicon device manufacturing: A vacuum perspective

Michael I. Current
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 14, 1115–1123 (1996)
https://doi.org/10.1116/1.580279
Published: May 1996
View article titled, Ion implantation for silicon device manufacturing: A vacuum perspective
Open the PDF for Ion implantation for silicon device manufacturing: A vacuum perspective in another window
Journal Articles

Mass and energy selected ion beam for deposition and ion induced surface modifications

O. M. Küttel, P. Groening, R. G. Agostino, L. Schlapbach
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 13, 2848–2855 (1995)
https://doi.org/10.1116/1.579610
Published: November 1995
View article titled, Mass and energy selected ion beam for deposition and ion induced surface modifications
Open the PDF for Mass and energy selected ion beam for deposition and ion induced surface modifications in another window
Journal Articles

Determination of the ion velocity in a radio frequency ion beam by laser‐induced fluorescence

A. Brockhaus, Y. Yuan, J. Engemann
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 13, 400–405 (1995)
https://doi.org/10.1116/1.579371
Published: March 1995
View article titled, Determination of the ion velocity in a radio frequency ion beam by laser‐induced fluorescence
Open the PDF for Determination of the ion velocity in a radio frequency ion beam by laser‐induced fluorescence in another window
Journal Articles

Influence of charge exchange on ion/neutral arrival rates in an ion‐assisted deposition system

J‐K. Kim, H. Kheyrandish, J. S. Colligon
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 12, 2733–2738 (1994)
https://doi.org/10.1116/1.579097
Published: September 1994
View article titled, Influence of charge exchange on ion/neutral arrival rates in an ion‐assisted deposition system
Open the PDF for Influence of charge exchange on ion/neutral arrival rates in an ion‐assisted deposition system in another window
Journal Articles

Neutrino‐recoil induced desorption

L. Zhu, R. Avci, G. J. Lapeyre, M. M. Hindi, R. L. Kozub, S. J. Robinson
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 12, 2037–2044 (1994)
https://doi.org/10.1116/1.579133
Published: July 1994
View article titled, Neutrino‐recoil induced desorption
Open the PDF for Neutrino‐recoil induced desorption in another window
Journal Articles

Interaction of molecular BF+ and BF+2 ions with gold surfaces at low energies: Neutralization, dissociation, and deposition

Y. G. Shen, L. J. Huang, W. M. Lau
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 11, 2099–2103 (1993)
https://doi.org/10.1116/1.578375
Published: July 1993
View article titled, Interaction of molecular BF<sup>+</sup> and BF<sup>+</sup><sub>2</sub> ions with gold surfaces at low energies: Neutralization, dissociation, and deposition
Open the PDF for Interaction of molecular BF<sup>+</sup> and BF<sup>+</sup><sub>2</sub> ions with gold surfaces at low energies: Neutralization, dissociation, and deposition in another window
Journal Articles

Energy resolved angular distribution of argon ions at the substrate plane of a radio frequency plasma reactor

Joachim Janes, Christoph Huth
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 10, 3522–3531 (1992)
https://doi.org/10.1116/1.577779
Published: November 1992
View article titled, Energy resolved angular distribution of argon ions at the substrate plane of a radio frequency plasma reactor
Open the PDF for Energy resolved angular distribution of argon ions at the substrate plane of a radio frequency plasma reactor in another window
Journal Articles

Energy and mass‐resolved detection of neutral and ion species using modulated‐pole‐bias quadrupole mass spectroscopy

A. M. Myers, D. N. Ruzic, R. C. Powell, N. Maley, D. W. Pratt, J. E. Greene, J. R. Abelson
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 8, 1668–1672 (1990)
https://doi.org/10.1116/1.576827
Published: May 1990
View article titled, Energy and mass‐resolved detection of neutral and ion species using modulated‐pole‐bias quadrupole mass spectroscopy
Open the PDF for Energy and mass‐resolved detection of neutral and ion species using modulated‐pole‐bias quadrupole mass spectroscopy in another window
Journal Articles

Fundamentals of ion‐beam‐assisted deposition. II. Absolute calibration of ion and evaporant fluxes

G. K. Hubler, D. Van Vechten, E. P. Donovan, C. A. Carosella
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 8, 831–839 (1990)
https://doi.org/10.1116/1.576926
Published: March 1990
View article titled, Fundamentals of ion‐beam‐assisted deposition. II. Absolute calibration of ion and evaporant fluxes
Open the PDF for Fundamentals of ion‐beam‐assisted deposition. II. Absolute calibration of ion and evaporant fluxes in another window
Journal Articles

Particle bombardment effects on thin‐film deposition: A review

D. M. Mattox
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 7, 1105–1114 (1989)
https://doi.org/10.1116/1.576238
Published: May 1989
View article titled, Particle bombardment effects on thin‐film deposition: A review
Open the PDF for Particle bombardment effects on thin‐film deposition: A review in another window
Journal Articles

Low‐energy alkali ion scattering as a probe of resonant charge exchange on cesiated Cu(110)

G. A. Kimmel, D. M. Goodstein, B. H. Cooper
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 7, 2186–2190 (1989)
https://doi.org/10.1116/1.575954
Published: May 1989
View article titled, Low‐energy alkali ion scattering as a probe of resonant charge exchange on cesiated Cu(110)
Open the PDF for Low‐energy alkali ion scattering as a probe of resonant charge exchange on cesiated Cu(110) in another window
Journal Articles

Characterization of a fast atom source for secondary ion mass spectrometry

S. Corcoran, N. Parikh, D. P. Griffis, R. W. Linton
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 7, 1706–1711 (1989)
https://doi.org/10.1116/1.576031
Published: May 1989
View article titled, Characterization of a fast atom source for secondary ion mass spectrometry
Open the PDF for Characterization of a fast atom source for secondary ion mass spectrometry in another window