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Journal Articles

Atomic layer deposition of lithium metaphosphate from H3PO4 and P4O10 facilitated via direct liquid injection: Experiment and theory

Ivan Kundrata, Antónia Mošková, Martin Moško, Matej Mičušík, Edmund Dobročka, Karol Fröhlich
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 39, 062407 (2021)
https://doi.org/10.1116/6.0001255
Published: November 2021
View article titled, Atomic layer deposition of lithium metaphosphate from H<sub>3</sub>PO<sub>4</sub> and P<sub>4</sub>O<sub>10</sub> facilitated via direct liquid injection: Experiment and theory
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Includes: Supplementary data
Journal Articles

Atomic layer deposition onto fabrics of carbon and silicon carbide fibers: Preparation of multilayers comprising alumina, titania-furfuryl alcohol hybrid, and titanium phosphate

Pauline Dill, Florian Pachel, Christian Militzer, Alexander Held, Georg Puchas, Stefan Knohl, Walter Krenkel, Christoph Tegenkamp, Werner Andreas Goedel
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 39, 052406 (2021)
https://doi.org/10.1116/6.0001193
Published: August 2021
View article titled, Atomic layer deposition onto fabrics of carbon and silicon carbide fibers: Preparation of multilayers comprising alumina, titania-furfuryl alcohol hybrid, and titanium phosphate
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Includes: Supplementary data
Journal Articles

Atomic layer deposition of cobalt phosphate from cobaltocene, trimethylphosphate, and O2 plasma

Valerio Di Palma, Harm C. M. Knoops, Wilhelmus M. M. (Erwin) Kessels, Mariadriana Creatore
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 38, 022416 (2020)
https://doi.org/10.1116/1.5143896
Published: February 2020
View article titled, Atomic layer deposition of cobalt phosphate from cobaltocene, trimethylphosphate, and O<sub>2</sub> plasma
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Includes: Supplementary data
Journal Articles

Plasma-enhanced atomic layer deposition of vanadium phosphate as a lithium-ion battery electrode material

Thomas Dobbelaere, Felix Mattelaer, Philippe M. Vereecken, Christophe Detavernier
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 35, 041513 (2017)
https://doi.org/10.1116/1.4987131
Published: June 2017
View article titled, Plasma-enhanced atomic layer deposition of vanadium phosphate as a lithium-ion battery electrode material
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Journal Articles

Fabrication of ion conductive tin oxide-phosphate amorphous thin films by atomic layer deposition

Suk Won Park, Dong Young Jang, Jun Woo Kim, Joon Hyung Shim
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 33, 041511 (2015)
https://doi.org/10.1116/1.4922577
Published: June 2015
View article titled, Fabrication of ion conductive tin oxide-phosphate amorphous thin films by atomic layer deposition
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Includes: Supplementary data
Journal Articles

Improvement of the surface quality of semi-insulating InP substrates through a novel etching and cleaning method

Jingming Liu, Youwen Zhao, Zhiyuan Dong, Fengyun Yang, Fenghua Wang, Kewei Cao, Tong Liu, Hui Xie, Teng Chen
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 31, 031404 (2013)
https://doi.org/10.1116/1.4798309
Published: March 2013
View article titled, Improvement of the surface quality of semi-insulating InP substrates through a novel etching and cleaning method
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Journal Articles

Atomic layer deposition of titanium phosphate on silica nanoparticles

Monika K. Wiedmann, David H. K. Jackson, Yomaira J. Pagan-Torres, Eunkyung Cho, James A. Dumesic, T. F. Kuech
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 30, 01A134 (2012)
https://doi.org/10.1116/1.3664097
Published: December 2011
View article titled, Atomic layer deposition of titanium phosphate on silica nanoparticles
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Journal Articles

Atomic layer deposition for nanostructured Li-ion batteries

H. C. M. Knoops, M. E. Donders, M. C. M. van de Sanden, P. H. L. Notten, W. M. M. Kessels
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 30, 010801 (2012)
https://doi.org/10.1116/1.3660699
Published: November 2011
View article titled, Atomic layer deposition for nanostructured Li-ion batteries
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Journal Articles

Temporal stability of photothermally fabricated micropatterns in supported phospholipid multilayers

Mareike Mathieu, Daniel Schunk, Steffen Franzka, Christian Mayer, Nils Hartmann
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 28, 953–957 (2010)
https://doi.org/10.1116/1.3271156
Published: June 2010
View article titled, Temporal stability of photothermally fabricated micropatterns in supported phospholipid multilayers
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Journal Articles

Investigation of thin-oxide-free protective coatings on chromium and 316 L stainless steel formed by treatment with etidronic acid

S. L. Johnson, P. M. A. Sherwood
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 26, 654–659 (2008)
https://doi.org/10.1116/1.2902963
Published: June 2008
View article titled, Investigation of thin-oxide-free protective coatings on chromium and 316 L stainless steel formed by treatment with etidronic acid
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Journal Articles

Interfacial interactions of poly(ether ketone ketone) polymer coatings onto oxide-free phosphate films on an aluminum surface

A. L. Asunskis, P. M. A. Sherwood
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 25, 872–877 (2007)
https://doi.org/10.1116/1.2712188
Published: July 2007
View article titled, Interfacial interactions of poly(ether ketone ketone) polymer coatings onto oxide-free phosphate films on an aluminum surface
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Journal Articles

Electrochemical planarization of copper surfaces with submicron features

R. Chalupa, T. Andryushchenko, J. Han, T. Ghosh, S. Shankar, P. Fischer
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 25, 1019–1024 (2007)
https://doi.org/10.1116/1.2731340
Published: July 2007
View article titled, Electrochemical planarization of copper surfaces with submicron features
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Journal Articles

Controlled gold nanoparticle assembly on DNA molecule as template for nanowire formation

Hyung Jin Kim, Yonghan Roh, Byungyou Hong
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 24, 1327–1331 (2006)
https://doi.org/10.1116/1.2191859
Published: June 2006
View article titled, Controlled gold nanoparticle assembly on DNA molecule as template for nanowire formation
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Journal Articles

Thin oxide-free phosphate films of composition formed on the surface of vanadium metal and characterized by x-ray photoelectron spectroscopy

D. J. Asunskis, P. M. A. Sherwood
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 24, 1179–1184 (2006)
https://doi.org/10.1116/1.2204924
Published: June 2006
View article titled, Thin oxide-free phosphate films of composition formed on the surface of vanadium metal and characterized by x-ray photoelectron spectroscopy
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Journal Articles

Valence band x-ray photoelectron spectroscopic studies of phosphorus oxides and phosphates

K. J. Gaskell, M. M. Smith, P. M. A. Sherwood
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 22, 1331–1336 (2004)
https://doi.org/10.1116/1.1763904
Published: July 2004
View article titled, Valence band x-ray photoelectron spectroscopic studies of phosphorus oxides and phosphates
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Journal Articles

Valence-band x-ray photoelectron spectroscopic studies of vanadium phosphates and the formation of oxide-free phosphate films on metallic vanadium

Daniel J. Asunskis, Peter M. A. Sherwood
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 21, 1133–1138 (2003)
https://doi.org/10.1116/1.1575223
Published: June 2003
View article titled, Valence-band x-ray photoelectron spectroscopic studies of vanadium phosphates and the formation of oxide-free phosphate films on metallic vanadium
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Journal Articles

Interfacial interactions of polymer coatings with oxide-free phosphate films on metal surfaces

Yuqing Wang, Peter M. A. Sherwood
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 21, 1120–1125 (2003)
https://doi.org/10.1116/1.1563621
Published: June 2003
View article titled, Interfacial interactions of polymer coatings with oxide-free phosphate films on metal surfaces
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Journal Articles

Valence-band x-ray photoelectron spectroscopic studies of different forms of sodium phosphate

Amy L. Asunskis, Karen J. Gaskell, Daniel J. Asunskis, Peter M. A. Sherwood
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 21, 1126–1132 (2003)
https://doi.org/10.1116/1.1575221
Published: June 2003
View article titled, Valence-band x-ray photoelectron spectroscopic studies of different forms of sodium phosphate
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Journal Articles

Influence of annealing temperature on simultaneous vapor deposited calcium phosphate thin films

M. Hamdi, A. M. Ektessabi
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 19, 1566–1570 (2001)
https://doi.org/10.1116/1.1380228
Published: July 2001
View article titled, Influence of annealing temperature on simultaneous vapor deposited calcium phosphate thin films
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Journal Articles

Formation of potentially protective oxide-free phosphate films on titanium characterized by valence band x-ray photoelectron spectroscopy

John A. Rotole, Karen Gaskell, Alex Comte, Peter M. A. Sherwood
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 19, 1176–1181 (2001)
https://doi.org/10.1116/1.1353540
Published: July 2001
View article titled, Formation of potentially protective oxide-free phosphate films on titanium characterized by valence band x-ray photoelectron spectroscopy
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