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Journal Articles
J. Vac. Sci. Technol. A 41, 063207 (2023)
Published: October 2023
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 41, 062201 (2023)
Published: September 2023
Includes: Supplementary data
Journal Articles
Nickolas Ashburn, Xiuyao Lang, Sumeet Pandey, Steven Wolf, Steve Kramer, John Smythe, Gurtej Sandhu, Charles Winter, Andrew C. Kummel, Kyeongjae Cho
J. Vac. Sci. Technol. A 41, 052403 (2023)
Published: August 2023
Includes: Supplementary data
Journal Articles
Juan P. Cuenca-Vargas, Juan D. Lopez-Vargas, Andre A. Drummond, Marcelo M. Werneck, Dante F. Franceschini, Sergio S. Camargo
J. Vac. Sci. Technol. A 41, 053111 (2023)
Published: August 2023
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 41, 030801 (2023)
Published: March 2023
Journal Articles
J. Vac. Sci. Technol. A 40, 062404 (2022)
Published: September 2022
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 40, 063202 (2022)
Published: September 2022
Journal Articles
J. Vac. Sci. Technol. A 40, 053005 (2022)
Published: August 2022
Includes: Supplementary data
Journal Articles
Elizabeth A. Jamka, Maxwell Z. Gillum, Christina N. Grytsyshyn-Giger, Faith J. Lewis, Daniel R. Killelea
J. Vac. Sci. Technol. A 40, 043209 (2022)
Published: June 2022
Journal Articles
Zheng Lu, Angel Yanguas-Gil, Donghyeon Kang, Pragathi Darapaneni, Anil U. Mane, Christopher L. Marshall, Jeffrey W. Elam
J. Vac. Sci. Technol. A 40, 042404 (2022)
Published: June 2022
Journal Articles
J. Vac. Sci. Technol. A 40, 041602 (2022)
Published: June 2022
Journal Articles
J. Vac. Sci. Technol. A 40, 033415 (2022)
Published: April 2022
Journal Articles
Erik W. Peterson, Huanru Wang, Zongyuan Liu, Tasnim Ara, Sanjaya D. Senanayake, Jose A. Rodriguez, Jing Zhou
J. Vac. Sci. Technol. A 40, 013209 (2022)
Published: December 2021
Journal Articles
Osman Karslıoğlu, Lena Trotochaud, Farhad Salmassi, Eric M. Gullikson, Andrey Shavorskiy, Slavomir Nemšák, Hendrik Bluhm
J. Vac. Sci. Technol. A 40, 013207 (2022)
Published: December 2021
Journal Articles
J. Vac. Sci. Technol. A 40, 013204 (2022)
Published: December 2021
Journal Articles
J. Vac. Sci. Technol. A 40, 013203 (2022)
Published: December 2021
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 40, 010801 (2022)
Published: November 2021
Journal Articles
J. Vac. Sci. Technol. A 39, 063219 (2021)
Published: October 2021
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 39, 063214 (2021)
Published: October 2021
Journal Articles
Tedros A. Balema, Amanda M. Larson, Yicheng Wang, Dipna A. Patel, Krishna Kumar, E. Charles H. Sykes
J. Vac. Sci. Technol. A 39, 063211 (2021)
Published: October 2021
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