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Journal Articles

Secondary ion mass spectrometry relative sensitivity factor of ⁶⁹Ga in ZnS

Hayat Soufiani, Mikhail Klimov, Romain Gaume

J. Vac. Sci. Technol. A 43, 023201 (2025)

https://doi.org/10.1116/6.0004165

Published: January 2025

View article titled, Secondary ion mass spectrometry relative sensitivity factor of <sup>69</sup>Ga in ZnS

Journal Articles

Molecular layer deposition of alucone in high aspect ratio trenches: The effect of TMA outgassing on step-coverage

Hardik Jain, Mariadriana Creatore, Paul Poodt

J. Vac. Sci. Technol. A 41, 012401 (2023)

https://doi.org/10.1116/6.0002249

Published: December 2022

View article titled, Molecular layer deposition of alucone in high aspect ratio trenches: The effect of TMA outgassing on step-coverage

Journal Articles

Titanium infiltration into ultrathin PMMA brushes

Pierre Giovanni Mani-Gonzalez, Caitlin McFeely, Matthew Snelgrove, Kyle Shiel, Jesus Alfredo Hernandez Marquez, Robert O’Connor

J. Vac. Sci. Technol. A 39, 040403 (2021)

https://doi.org/10.1116/6.0001061

Published: June 2021

View article titled, Titanium infiltration into ultrathin PMMA brushes

Journal Articles

Reaction kinetics of CuInSe 2 thin films grown from bilayer InSe/CuSe precursors

S. Kim, W. K. Kim, R. M. Kaczynski, R. D. Acher, S. Yoon, T. J. Anderson, O. D. Crisalle, E. A. Payzant, S. S. Li

J. Vac. Sci. Technol. A 23, 310–315 (2005)

https://doi.org/10.1116/1.1861051

Published: March 2005

View article titled, Reaction kinetics of CuInSe 2 thin films grown from bilayer InSe/CuSe precursors