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Journal Articles

Germanium surface cleaning and ALD of a protective boron nitride overlayer

Olatomide B. Omolere, Qasim Adesope, Samar Alhowity, Tochi L. Agbara, Jeffry A. Kelber

J. Vac. Sci. Technol. A 41, 062411 (2023)

https://doi.org/10.1116/6.0002928

Published: November 2023

View article titled, Germanium surface cleaning and ALD of a protective boron nitride overlayer

Includes: Supplementary data

Journal Articles

Influence of nitrogen vacancies on the decomposition route and age hardening of wurtzite Ti_1−xAl_xN_y thin films

J. Salamania, A. F. Farhadizadeh, K. M. Calamba Kwick, I. C. Schramm, T. W. Hsu, L. J. S. Johnson, L. Rogström, M. Odén

J. Vac. Sci. Technol. A 41, 063413 (2023)

https://doi.org/10.1116/6.0003074

Published: November 2023

View article titled, Influence of nitrogen vacancies on the decomposition route and age hardening of wurtzite Ti1−xAlxNy thin films

Includes: Supplementary data

Journal Articles

Angle resolved x-ray photoelectron spectroscopy assessment of the structure and composition of nanofilms—including uncertainties—through the multilayer model

Alberto Herrera-Gomez, Dulce Maria Guzman-Bucio, Marisol Mayorga-Garay, Orlando Cortazar-Martinez

J. Vac. Sci. Technol. A 41, 063206 (2023)

https://doi.org/10.1116/6.0002981

Published: October 2023

View article titled, Angle resolved x-ray photoelectron spectroscopy assessment of the structure and composition of nanofilms—including uncertainties—through the multilayer model

Journal Articles

Growth and optical properties of NiO thin films deposited by pulsed dc reactive magnetron sputtering

Faezeh A. F. Lahiji, Samiran Bairagi, Roger Magnusson, Mauricio A. Sortica, Daniel Primetzhofer, Erik Ekström, Biplab Paul, Arnaud le Febvrier, Per Eklund

J. Vac. Sci. Technol. A 41, 063402 (2023)

https://doi.org/10.1116/6.0002914

Published: September 2023

View article titled, Growth and optical properties of NiO thin films deposited by pulsed dc reactive magnetron sputtering

Includes: Supplementary data

Journal Articles

Effect of the growth orientation on the physical properties of Sr₂CoNbO₆ thin films

Ajay Kumar, Ramcharan Meena, M. Miryala, K. Ueno, Rajendra S. Dhaka

J. Vac. Sci. Technol. A 41, 053409 (2023)

https://doi.org/10.1116/6.0002728

Published: July 2023

View article titled, Effect of the growth orientation on the physical properties of Sr2CoNbO6 thin films

Journal Articles

Effect of atomic layer annealing in plasma-enhanced atomic layer deposition of aluminum nitride on silicon

Heli Seppänen, Igor Prozheev, Christoffer Kauppinen, Sami Suihkonen, Kenichiro Mizohata, Harri Lipsanen

J. Vac. Sci. Technol. A 41, 052401 (2023)

https://doi.org/10.1116/6.0002705

Published: July 2023

View article titled, Effect of atomic layer annealing in plasma-enhanced atomic layer deposition of aluminum nitride on silicon

Journal Articles

Jahn–Teller-driven phase segregation in Mn_xCo_3−xO₄ spinel thin films

Miles D. Blanchet, Bethany E. Matthews, Steven R. Spurgeon, Steve M. Heald, Tamara Isaacs-Smith, Ryan B. Comes

J. Vac. Sci. Technol. A 41, 052703 (2023)

https://doi.org/10.1116/6.0002329

Published: July 2023

View article titled, Jahn–Teller-driven phase segregation in MnxCo3−xO4 spinel thin films

Includes: Supplementary data

Journal Articles

Ultrathin stable Ohmic contacts for high-temperature operation of β-Ga₂O₃ devices

William A. Callahan, Edwin Supple, David Ginley, Michael Sanders, Brian P. Gorman, Ryan O’Hayre, Andriy Zakutayev

J. Vac. Sci. Technol. A 41, 043211 (2023)

https://doi.org/10.1116/6.0002645

Published: June 2023

View article titled, Ultrathin stable Ohmic contacts for high-temperature operation of β-Ga2O3 devices

Includes: Supplementary data

Journal Articles

Erratum: “Secondary ion mass spectrometry quantification: Do you remember when a factor of 2 was good enough?” [J. Vac. Sci. Technol. B 41, 030803 (2023)]

Charles W. Magee, Temel H. Buyuklimanli

J. Vac. Sci. Technol. A 41, 043413 (2023)

https://doi.org/10.1116/6.0002844

Published: June 2023

View article titled, Erratum: “Secondary ion mass spectrometry quantification: Do you remember when a factor of 2 was good enough?” [J. Vac. Sci. Technol. B 41, 030803 (2023)]

Journal Articles

Investigation of the transition of amorphous Ti-thiolate prepared by hybrid atomic layer deposition/molecular layer deposition into titanium disulfide ultrathin film

Petros Abi Younes, Ashok-Kumar Yadav, Medet Zhukush, Van-Hoan Le, Hervé Roussel, Marie-Ingrid Richard, Clément Camp, Kai Szeto, Gianluca Ciatto, Nathanaelle Schneider, Elsje Alessandra Quadrelli, Hubert Renevier, Nicolas Gauthier

J. Vac. Sci. Technol. A 41, 042403 (2023)

https://doi.org/10.1116/6.0002448

Published: June 2023

View article titled, Investigation of the transition of amorphous Ti-thiolate prepared by hybrid atomic layer deposition/molecular layer deposition into titanium disulfide ultrathin film

Includes: Supplementary data

Journal Articles

Physical properties of Zn-Sn-N films governed by the Zn/(Zn + Sn) ratio

JunYan Ren, LingYan Liang, Xiaohan Liu, Hongtao Cao

J. Vac. Sci. Technol. A 41, 033406 (2023)

https://doi.org/10.1116/6.0002454

Published: April 2023

View article titled, Physical properties of Zn-Sn-N films governed by the Zn/(Zn + Sn) ratio

Includes: Supplementary data

Journal Articles

XPS characterization of a PuGa-7 at. % alloy

P. Roussel, S. C. Hernandez, J. J. Joyce, K. S. Graham, T. Venhaus

J. Vac. Sci. Technol. A 41, 023204 (2023)

https://doi.org/10.1116/6.0002365

Published: February 2023

View article titled, XPS characterization of a PuGa-7 at. % alloy

Includes: Supplementary data

Journal Articles

Epitaxial growth of the first two members of the Ba_n+1In_nO_2.5n+1 Ruddlesden–Popper homologous series

Felix V. E. Hensling, Michelle A. Smeaton, Veronica Show, Kathy Azizie, Matthew R. Barone, Lena F. Kourkoutis, Darrell G. Schlom

J. Vac. Sci. Technol. A 40, 062707 (2022)

https://doi.org/10.1116/6.0002205

Published: November 2022

View article titled, Epitaxial growth of the first two members of the Ban+1InnO2.5n+1 Ruddlesden–Popper homologous series

Includes: Supplementary data

Journal Articles

MOCVD growth and band offsets of κ-phase Ga₂O₃ on c-plane sapphire, GaN- and AlN-on-sapphire, and (100) YSZ substrates

A F M Anhar Uddin Bhuiyan, Zixuan Feng, Hsien-Lien Huang, Lingyu Meng, Jinwoo Hwang, Hongping Zhao

J. Vac. Sci. Technol. A 40, 062704 (2022)

https://doi.org/10.1116/6.0002106

Published: November 2022

View article titled, MOCVD growth and band offsets of κ-phase Ga2O3 on c-plane sapphire, GaN- and AlN-on-sapphire, and (100) YSZ substrates

Includes: Supplementary data

Journal Articles

Diffusion-assisted molecular beam epitaxy of CuCrO₂ thin films

Gaurab Rimal, Alessandro R. Mazza, Matthew Brahlek, Seongshik Oh

J. Vac. Sci. Technol. A 40, 060401 (2022)

https://doi.org/10.1116/6.0002151

Published: November 2022

View article titled, Diffusion-assisted molecular beam epitaxy of CuCrO2 thin films

Includes: Supplementary data

Journal Articles

Growth of (Sm_xGa_1−x)₂O₃ by molecular beam epitaxy

Anthony D. Stewart, Brent P. Gila, Cammy R. Abernathy, S. J. Pearton

J. Vac. Sci. Technol. A 40, 062701 (2022)

https://doi.org/10.1116/6.0002135

Published: October 2022

View article titled, Growth of (SmxGa1−x)2O3 by molecular beam epitaxy

Includes: Supplementary data

Journal Articles

Preface for the special topic collection honoring Dr. Scott Chambers’ 70th birthday and his leadership in the science and technology of oxide thin films

Tiffany C. Kaspar, Yingge Du, Mark H. Engelhard, Don R. Baer, Bharat Jalan, Joseph H. Ngai

J. Vac. Sci. Technol. A 40, 041602 (2022)

https://doi.org/10.1116/6.0001942

Published: June 2022

View article titled, Preface for the special topic collection honoring Dr. Scott Chambers’ 70th birthday and his leadership in the science and technology of oxide thin films

Journal Articles

Nanoscale interplay of native point defects near Sr-deficient Sr_xTiO₃/SrTiO₃ interfaces

Brenton A. Noesges, Daesu Lee, Jung-Woo Lee, Chang-Beom Eom, Leonard J. Brillson

J. Vac. Sci. Technol. A 40, 043201 (2022)

https://doi.org/10.1116/6.0001782

Published: May 2022

View article titled, Nanoscale interplay of native point defects near Sr-deficient SrxTiO3/SrTiO3 interfaces

Includes: Supplementary data

Journal Articles

Magnetron sputtered NiAl/TiB_x multilayer thin films

Tomasz Wojcik, Vincent Ott, Sedat Özbilen, Harald Leiste, Sven Ulrich, Paul Heinz Mayrhofer, Helmut Riedl, Michael Stueber

J. Vac. Sci. Technol. A 40, 033410 (2022)

https://doi.org/10.1116/6.0001734

Published: April 2022

View article titled, Magnetron sputtered NiAl/TiBx multilayer thin films

Journal Articles

Properties of gallium oxide thin films grown by ion beam sputter deposition at room temperature

Dmitry Kalanov, Yeliz Unutulmazsoy, Daniel Spemann, Jens Bauer, André Anders, Carsten Bundesmann

J. Vac. Sci. Technol. A 40, 033409 (2022)

https://doi.org/10.1116/6.0001825

Published: April 2022

View article titled, Properties of gallium oxide thin films grown by ion beam sputter deposition at room temperature

NARROW

Topics

Germanium surface cleaning and ALD of a protective boron nitride overlayer

Influence of nitrogen vacancies on the decomposition route and age hardening of wurtzite Ti_1−xAl_xN_y thin films

Angle resolved x-ray photoelectron spectroscopy assessment of the structure and composition of nanofilms—including uncertainties—through the multilayer model

Growth and optical properties of NiO thin films deposited by pulsed dc reactive magnetron sputtering

Effect of the growth orientation on the physical properties of Sr₂CoNbO₆ thin films

Effect of atomic layer annealing in plasma-enhanced atomic layer deposition of aluminum nitride on silicon

Jahn–Teller-driven phase segregation in Mn_xCo_3−xO₄ spinel thin films

Ultrathin stable Ohmic contacts for high-temperature operation of β-Ga₂O₃ devices

Erratum: “Secondary ion mass spectrometry quantification: Do you remember when a factor of 2 was good enough?” [J. Vac. Sci. Technol. B 41, 030803 (2023)]

Investigation of the transition of amorphous Ti-thiolate prepared by hybrid atomic layer deposition/molecular layer deposition into titanium disulfide ultrathin film

Physical properties of Zn-Sn-N films governed by the Zn/(Zn + Sn) ratio

XPS characterization of a PuGa-7 at. % alloy

Epitaxial growth of the first two members of the Ba_n+1In_nO_2.5n+1 Ruddlesden–Popper homologous series

MOCVD growth and band offsets of κ-phase Ga₂O₃ on c-plane sapphire, GaN- and AlN-on-sapphire, and (100) YSZ substrates

Diffusion-assisted molecular beam epitaxy of CuCrO₂ thin films

Growth of (Sm_xGa_1−x)₂O₃ by molecular beam epitaxy

Preface for the special topic collection honoring Dr. Scott Chambers’ 70th birthday and his leadership in the science and technology of oxide thin films

Nanoscale interplay of native point defects near Sr-deficient Sr_xTiO₃/SrTiO₃ interfaces

Magnetron sputtered NiAl/TiB_x multilayer thin films

Properties of gallium oxide thin films grown by ion beam sputter deposition at room temperature

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