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Journal Articles

Stochastic lattice model for atomic layer deposition and area-selective deposition of metal oxides: Visualization and analysis of lateral overgrowth during area-selective deposition

Nicholas M. Carroll, Gregory N. Parsons

J. Vac. Sci. Technol. A 42, 062411 (2024)

https://doi.org/10.1116/6.0003838

Published: November 2024

View article titled, Stochastic lattice model for atomic layer deposition and area-selective deposition of metal oxides: Visualization and analysis of lateral overgrowth during area-selective deposition

Journal Articles

Practical guides for x-ray photoelectron spectroscopy: Use of argon ion beams for sputter depth profiling and cleaning

Alexander G. Shard, Mark A. Baker

J. Vac. Sci. Technol. A 42, 050801 (2024)

https://doi.org/10.1116/6.0003681

Published: July 2024

View article titled, Practical guides for x-ray photoelectron spectroscopy: Use of argon ion beams for sputter depth profiling and cleaning

Journal Articles

Microstructural evolution and strengthening behavior induced by N addition in TiVCrAl medium entropy alloy films

Z. Y. Zhang, L. Wang, Y. J. Ma, Y. W. Zhang, X. C. Shen, X. Hua, G. J. Li, Z. H. Cao

J. Vac. Sci. Technol. A 42, 043410 (2024)

https://doi.org/10.1116/6.0003625

Published: June 2024

View article titled, Microstructural evolution and strengthening behavior induced by N addition in TiVCrAl medium entropy alloy films

Journal Articles

Continuous wave laser-assisted evaporation of halide perovskite thin films from a single stoichiometric source

Naga Prathibha Jasti, Shay Tirosh, Ansuman Halder, Eti Teblum, David Cahen

J. Vac. Sci. Technol. A 42, 043406 (2024)

https://doi.org/10.1116/6.0003607

Published: May 2024

View article titled, Continuous wave laser-assisted evaporation of halide perovskite thin films from a single stoichiometric source

Includes: Supplementary data

Journal Articles

Molecular beam epitaxy synthesis of In₂Se₃ films

Cooper A. Voigt, Matthew Reingold, Alex Dube, Lawrence S. Early, Brent K. Wagner, Eric M. Vogel

J. Vac. Sci. Technol. A 42, 032707 (2024)

https://doi.org/10.1116/6.0003508

Published: April 2024

View article titled, Molecular beam epitaxy synthesis of In2Se3 films

Includes: Supplementary data

Journal Articles

Effect of background gas composition on the stoichiometry and lithium ion conductivity of pulse laser deposited epitaxial lithium lanthanum tantalate (Li_3xLa_1/3−xTaO₃)

Ian A. Brummel, Chuanzhen Zhou, Jon F. Ihlefeld

J. Vac. Sci. Technol. A 42, 032705 (2024)

https://doi.org/10.1116/6.0003457

Published: April 2024

View article titled, Effect of background gas composition on the stoichiometry and lithium ion conductivity of pulse laser deposited epitaxial lithium lanthanum tantalate (Li3xLa1/3−xTaO3)

Includes: Supplementary data

Journal Articles

Deposition rate and optical emissions in niobium oxide processes by reactive sputtering

João Saccoman, Nilton Francelosi A. Neto, José H. D. da Silva

J. Vac. Sci. Technol. A 42, 033402 (2024)

https://doi.org/10.1116/6.0003255

Published: March 2024

View article titled, Deposition rate and optical emissions in niobium oxide processes by reactive sputtering

Journal Articles

Exploring the thermal behavior and diffusive functionality of structural defects and phase boundaries in near-stoichiometric chromium diborides by in situ scanning transmission electron microscopy

Per O. Å. Persson, Johanna Rosen, Ivan Petrov, Justinas Palisaitis

J. Vac. Sci. Technol. A 42, 020401 (2024)

https://doi.org/10.1116/6.0003389

Published: January 2024

View article titled, Exploring the thermal behavior and diffusive functionality of structural defects and phase boundaries in near-stoichiometric chromium diborides by in situ scanning transmission electron microscopy

Includes: Supplementary data

Journal Articles

Photoemission study of plutonium oxycarbide

Paul Roussel

J. Vac. Sci. Technol. A 42, 013204 (2024)

https://doi.org/10.1116/6.0003238

Published: January 2024

View article titled, Photoemission study of plutonium oxycarbide

Includes: Supplementary data

Journal Articles

Germanium surface cleaning and ALD of a protective boron nitride overlayer

Olatomide B. Omolere, Qasim Adesope, Samar Alhowity, Tochi L. Agbara, Jeffry A. Kelber

J. Vac. Sci. Technol. A 41, 062411 (2023)

https://doi.org/10.1116/6.0002928

Published: November 2023

View article titled, Germanium surface cleaning and ALD of a protective boron nitride overlayer

Includes: Supplementary data

Journal Articles

Influence of nitrogen vacancies on the decomposition route and age hardening of wurtzite Ti_1−xAl_xN_y thin films

J. Salamania, A. F. Farhadizadeh, K. M. Calamba Kwick, I. C. Schramm, T. W. Hsu, L. J. S. Johnson, L. Rogström, M. Odén

J. Vac. Sci. Technol. A 41, 063413 (2023)

https://doi.org/10.1116/6.0003074

Published: November 2023

View article titled, Influence of nitrogen vacancies on the decomposition route and age hardening of wurtzite Ti1−xAlxNy thin films

Includes: Supplementary data

Journal Articles

Angle resolved x-ray photoelectron spectroscopy assessment of the structure and composition of nanofilms—including uncertainties—through the multilayer model

Alberto Herrera-Gomez, Dulce Maria Guzman-Bucio, Marisol Mayorga-Garay, Orlando Cortazar-Martinez

J. Vac. Sci. Technol. A 41, 063206 (2023)

https://doi.org/10.1116/6.0002981

Published: October 2023

View article titled, Angle resolved x-ray photoelectron spectroscopy assessment of the structure and composition of nanofilms—including uncertainties—through the multilayer model

Journal Articles

Growth and optical properties of NiO thin films deposited by pulsed dc reactive magnetron sputtering

Faezeh A. F. Lahiji, Samiran Bairagi, Roger Magnusson, Mauricio A. Sortica, Daniel Primetzhofer, Erik Ekström, Biplab Paul, Arnaud le Febvrier, Per Eklund

J. Vac. Sci. Technol. A 41, 063402 (2023)

https://doi.org/10.1116/6.0002914

Published: September 2023

View article titled, Growth and optical properties of NiO thin films deposited by pulsed dc reactive magnetron sputtering

Includes: Supplementary data

Journal Articles

Effect of the growth orientation on the physical properties of Sr₂CoNbO₆ thin films

Ajay Kumar, Ramcharan Meena, M. Miryala, K. Ueno, Rajendra S. Dhaka

J. Vac. Sci. Technol. A 41, 053409 (2023)

https://doi.org/10.1116/6.0002728

Published: July 2023

View article titled, Effect of the growth orientation on the physical properties of Sr2CoNbO6 thin films

Journal Articles

Effect of atomic layer annealing in plasma-enhanced atomic layer deposition of aluminum nitride on silicon

Heli Seppänen, Igor Prozheev, Christoffer Kauppinen, Sami Suihkonen, Kenichiro Mizohata, Harri Lipsanen

J. Vac. Sci. Technol. A 41, 052401 (2023)

https://doi.org/10.1116/6.0002705

Published: July 2023

View article titled, Effect of atomic layer annealing in plasma-enhanced atomic layer deposition of aluminum nitride on silicon

Journal Articles

Jahn–Teller-driven phase segregation in Mn_xCo_3−xO₄ spinel thin films

Miles D. Blanchet, Bethany E. Matthews, Steven R. Spurgeon, Steve M. Heald, Tamara Isaacs-Smith, Ryan B. Comes

J. Vac. Sci. Technol. A 41, 052703 (2023)

https://doi.org/10.1116/6.0002329

Published: July 2023

View article titled, Jahn–Teller-driven phase segregation in MnxCo3−xO4 spinel thin films

Includes: Supplementary data

Journal Articles

Ultrathin stable Ohmic contacts for high-temperature operation of β-Ga₂O₃ devices

William A. Callahan, Edwin Supple, David Ginley, Michael Sanders, Brian P. Gorman, Ryan O’Hayre, Andriy Zakutayev

J. Vac. Sci. Technol. A 41, 043211 (2023)

https://doi.org/10.1116/6.0002645

Published: June 2023

View article titled, Ultrathin stable Ohmic contacts for high-temperature operation of β-Ga2O3 devices

Includes: Supplementary data

Journal Articles

Erratum: “Secondary ion mass spectrometry quantification: Do you remember when a factor of 2 was good enough?” [J. Vac. Sci. Technol. B 41, 030803 (2023)]

Charles W. Magee, Temel H. Buyuklimanli

J. Vac. Sci. Technol. A 41, 043413 (2023)

https://doi.org/10.1116/6.0002844

Published: June 2023

View article titled, Erratum: “Secondary ion mass spectrometry quantification: Do you remember when a factor of 2 was good enough?” [J. Vac. Sci. Technol. B 41, 030803 (2023)]

Journal Articles

Investigation of the transition of amorphous Ti-thiolate prepared by hybrid atomic layer deposition/molecular layer deposition into titanium disulfide ultrathin film

Petros Abi Younes, Ashok-Kumar Yadav, Medet Zhukush, Van-Hoan Le, Hervé Roussel, Marie-Ingrid Richard, Clément Camp, Kai Szeto, Gianluca Ciatto, Nathanaelle Schneider, Elsje Alessandra Quadrelli, Hubert Renevier, Nicolas Gauthier

J. Vac. Sci. Technol. A 41, 042403 (2023)

https://doi.org/10.1116/6.0002448

Published: June 2023

View article titled, Investigation of the transition of amorphous Ti-thiolate prepared by hybrid atomic layer deposition/molecular layer deposition into titanium disulfide ultrathin film

Includes: Supplementary data

Journal Articles

Physical properties of Zn-Sn-N films governed by the Zn/(Zn + Sn) ratio

JunYan Ren, LingYan Liang, Xiaohan Liu, Hongtao Cao

J. Vac. Sci. Technol. A 41, 033406 (2023)

https://doi.org/10.1116/6.0002454

Published: April 2023

View article titled, Physical properties of Zn-Sn-N films governed by the Zn/(Zn + Sn) ratio

Includes: Supplementary data

NARROW

Topics

Stochastic lattice model for atomic layer deposition and area-selective deposition of metal oxides: Visualization and analysis of lateral overgrowth during area-selective deposition

Practical guides for x-ray photoelectron spectroscopy: Use of argon ion beams for sputter depth profiling and cleaning

Microstructural evolution and strengthening behavior induced by N addition in TiVCrAl medium entropy alloy films

Continuous wave laser-assisted evaporation of halide perovskite thin films from a single stoichiometric source

Molecular beam epitaxy synthesis of In₂Se₃ films

Effect of background gas composition on the stoichiometry and lithium ion conductivity of pulse laser deposited epitaxial lithium lanthanum tantalate (Li_3xLa_1/3−xTaO₃)

Deposition rate and optical emissions in niobium oxide processes by reactive sputtering

Exploring the thermal behavior and diffusive functionality of structural defects and phase boundaries in near-stoichiometric chromium diborides by in situ scanning transmission electron microscopy

Photoemission study of plutonium oxycarbide

Germanium surface cleaning and ALD of a protective boron nitride overlayer

Influence of nitrogen vacancies on the decomposition route and age hardening of wurtzite Ti_1−xAl_xN_y thin films

Angle resolved x-ray photoelectron spectroscopy assessment of the structure and composition of nanofilms—including uncertainties—through the multilayer model

Growth and optical properties of NiO thin films deposited by pulsed dc reactive magnetron sputtering

Effect of the growth orientation on the physical properties of Sr₂CoNbO₆ thin films

Effect of atomic layer annealing in plasma-enhanced atomic layer deposition of aluminum nitride on silicon

Jahn–Teller-driven phase segregation in Mn_xCo_3−xO₄ spinel thin films

Ultrathin stable Ohmic contacts for high-temperature operation of β-Ga₂O₃ devices

Erratum: “Secondary ion mass spectrometry quantification: Do you remember when a factor of 2 was good enough?” [J. Vac. Sci. Technol. B 41, 030803 (2023)]

Investigation of the transition of amorphous Ti-thiolate prepared by hybrid atomic layer deposition/molecular layer deposition into titanium disulfide ultrathin film

Physical properties of Zn-Sn-N films governed by the Zn/(Zn + Sn) ratio

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