1-20 of 383
Surface reactions
Close
Save search
Follow your search
Access your saved searches in your account
Close Modal
Sort by
Journal Articles

Modeling of microtrenching and bowing effects in nanoscale Si inductively coupled plasma etching process

Ziyi Hu, Hua Shao, Junjie Li, Panpan Lai, Wenrui Wang, Chen Li, Qi Yan, Xiaobin He, Junfeng Li, Tao Yang, Rui Chen, Yayi Wei
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 063113 (2023)
https://doi.org/10.1116/6.0003032
Published: November 2023
View article titled, Modeling of microtrenching and bowing effects in nanoscale Si inductively coupled plasma etching process
Open the PDF for Modeling of microtrenching and bowing effects in nanoscale Si inductively coupled plasma etching process in another window
Journal Articles

Adsorption mechanism of dimeric Ga precursors in metalorganic chemical vapor deposition of gallium nitride

Hankyu Kim, Miso Kim, Bumsang Kim, Bonggeun Shong
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 063409 (2023)
https://doi.org/10.1116/6.0002966
Published: October 2023
View article titled, Adsorption mechanism of dimeric Ga precursors in metalorganic chemical vapor deposition of gallium nitride
Open the PDF for Adsorption mechanism of dimeric Ga precursors in metalorganic chemical vapor deposition of gallium nitride in another window
Includes: Supplementary data
Journal Articles

Molecular dynamics simulation of amine formation in plasma-enhanced chemical vapor deposition with hydrocarbon and amino radicals

Anjar Anggraini Harumningtyas, Tomoko Ito, Michiro Isobe, Lenka Zajíčková, Satoshi Hamaguchi
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 063007 (2023)
https://doi.org/10.1116/6.0002978
Published: October 2023
View article titled, Molecular dynamics simulation of amine formation in plasma-enhanced chemical vapor deposition with hydrocarbon and amino radicals
Open the PDF for Molecular dynamics simulation of amine formation in plasma-enhanced chemical vapor deposition with hydrocarbon and amino radicals in another window
Includes: Supplementary data
Journal Articles

β-Ga2O3 orientation dependence of band offsets with SiO2 and Al2O3

Hsiao-Hsuan Wan, Jian-Sian Li, Chao-Ching Chiang, Xinyi Xia, David C. Hays, Fan Ren, Stephen J. Pearton
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 063205 (2023)
https://doi.org/10.1116/6.0003039
Published: September 2023
View article titled, β-Ga<sub>2</sub>O<sub>3</sub> orientation dependence of band offsets with SiO<sub>2</sub> and Al<sub>2</sub>O<sub>3</sub>
Open the PDF for β-Ga<sub>2</sub>O<sub>3</sub> orientation dependence of band offsets with SiO<sub>2</sub> and Al<sub>2</sub>O<sub>3</sub> in another window
Journal Articles

Density functional theory study on reaction mechanisms of Co(tbu2DAD)2 for area selective-atomic layer deposition of Co films on metal surfaces

Nickolas Ashburn, Xiuyao Lang, Sumeet Pandey, Steven Wolf, Steve Kramer, John Smythe, Gurtej Sandhu, Charles Winter, Andrew C. Kummel, Kyeongjae Cho
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 052403 (2023)
https://doi.org/10.1116/6.0002840
Published: August 2023
View article titled, Density functional theory study on reaction mechanisms of Co(<sup>tbu2</sup>DAD)<sub>2</sub> for area selective-atomic layer deposition of Co films on metal surfaces
Open the PDF for Density functional theory study on reaction mechanisms of Co(<sup>tbu2</sup>DAD)<sub>2</sub> for area selective-atomic layer deposition of Co films on metal surfaces in another window
Includes: Supplementary data
Journal Articles

Structure and corrosion resistance of electron-beam-strengthened and micro-arc oxidized coatings on magnesium alloy AZ31

Yinghe Ma, Jinhui Mei, Junxin Ouyang, Peng Wu, Sai Wang, Jianguo Yang, Yanming He, Wenjian Zheng, Huaxin Li, Chuanyang Lu, Sendong Ren, Jianping Xu, Paul K. Chu
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 053101 (2023)
https://doi.org/10.1116/6.0002687
Published: July 2023
View article titled, Structure and corrosion resistance of electron-beam-strengthened and micro-arc oxidized coatings on magnesium alloy AZ31
Open the PDF for Structure and corrosion resistance of electron-beam-strengthened and micro-arc oxidized coatings on magnesium alloy AZ31 in another window
Journal Articles

Theoretical analysis of thermal spikes during ion bombardment of amorphous silicon nitride surfaces

Erik S. Cheng, Peter L. G. Ventzek, Gyeong S. Hwang
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 043207 (2023)
https://doi.org/10.1116/6.0002656
Published: June 2023
View article titled, Theoretical analysis of thermal spikes during ion bombardment of amorphous silicon nitride surfaces
Open the PDF for Theoretical analysis of thermal spikes during ion bombardment of amorphous silicon nitride surfaces in another window
Includes: Supplementary data
Journal Articles

Microkinetic based growth and property modeling of plasma enhanced atomic layer deposition silicon nitride thin film

Toshihiko Iwao, Tsung-Hsuan Yang, Gyeong S. Hwang, Peter L. G. Ventzek
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 032410 (2023)
https://doi.org/10.1116/6.0002499
Published: May 2023
View article titled, Microkinetic based growth and property modeling of plasma enhanced atomic layer deposition silicon nitride thin film
Open the PDF for Microkinetic based growth and property modeling of plasma enhanced atomic layer deposition silicon nitride thin film in another window
Journal Articles

Controlling electron beam induced deposition of iron from Fe(CO)5: Inhibition of autocatalytic growth by NH3 and reactivation by electron irradiation

Petra Martinović, Lars Barnewitz, Markus Rohdenburg, Petra Swiderek
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 033207 (2023)
https://doi.org/10.1116/6.0002306
Published: April 2023
View article titled, Controlling electron beam induced deposition of iron from Fe(CO)<sub>5</sub>: Inhibition of autocatalytic growth by NH<sub>3</sub> and reactivation by electron irradiation
Open the PDF for Controlling electron beam induced deposition of iron from Fe(CO)<sub>5</sub>: Inhibition of autocatalytic growth by NH<sub>3</sub> and reactivation by electron irradiation in another window
Includes: Supplementary data
Journal Articles

In situ analysis of nucleation reactions during TiCl4/H2O atomic layer deposition on SiO2 and H-terminated Si surfaces treated with a silane small molecule inhibitor

Jan-Willem J. Clerix, Golnaz Dianat, Annelies Delabie, Gregory N. Parsons
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 032406 (2023)
https://doi.org/10.1116/6.0002493
Published: March 2023
View article titled, <em>In situ</em> analysis of nucleation reactions during TiCl<sub>4</sub>/H<sub>2</sub>O atomic layer deposition on SiO<sub>2</sub> and H-terminated Si surfaces treated with a silane small molecule inhibitor
Open the PDF for <em>In situ</em> analysis of nucleation reactions during TiCl<sub>4</sub>/H<sub>2</sub>O atomic layer deposition on SiO<sub>2</sub> and H-terminated Si surfaces treated with a silane small molecule inhibitor in another window
Journal Articles

Measurements and model of UV-induced oxidation of aluminum

Robert F. Berg, Charles Tarrio, Thomas B. Lucatorto
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 033204 (2023)
https://doi.org/10.1116/6.0002432
Published: March 2023
View article titled, Measurements and model of UV-induced oxidation of aluminum
Open the PDF for Measurements and model of UV-induced oxidation of aluminum in another window
Journal Articles

Aminosilane small molecule inhibitors for area-selective deposition: Study of substrate-inhibitor interfacial interactions

Kaat Van Dongen, Rachel A. Nye, Jan-Willem J. Clerix, Claudia Sixt, Danilo De Simone, Annelies Delabie
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 032404 (2023)
https://doi.org/10.1116/6.0002347
Published: March 2023
View article titled, Aminosilane small molecule inhibitors for area-selective deposition: Study of substrate-inhibitor interfacial interactions
Open the PDF for Aminosilane small molecule inhibitors for area-selective deposition: Study of substrate-inhibitor interfacial interactions in another window
Includes: Supplementary data
Journal Articles

Characterization of neutral species in an NH3-Ar plasma generated by a capacitively coupled plasma source at various radio frequencies

S. M. Johnson, J. P. Zhao, C. Schlechte, J. Carroll, T. Iwao, P. L. G. Ventzek, J. G. Ekerdt
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 023002 (2023)
https://doi.org/10.1116/6.0002247
Published: February 2023
View article titled, Characterization of neutral species in an NH<sub>3</sub>-Ar plasma generated by a capacitively coupled plasma source at various radio frequencies
Open the PDF for Characterization of neutral species in an NH<sub>3</sub>-Ar plasma generated by a capacitively coupled plasma source at various radio frequencies in another window
Includes: Supplementary data
Journal Articles

Surface reaction modelling of thermal atomic layer etching on blanket hafnium oxide and its application on high aspect ratio structures

Andreas Fischer, David Mui, Aaron Routzahn, Ryan Gasvoda, Jim Sims, Thorsten Lill
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 012601 (2023)
https://doi.org/10.1116/6.0002244
Published: December 2022
View article titled, Surface reaction modelling of thermal atomic layer etching on blanket hafnium oxide and its application on high aspect ratio structures
Open the PDF for Surface reaction modelling of thermal atomic layer etching on blanket hafnium oxide and its application on high aspect ratio structures in another window
Journal Articles

Selectivity dependence of atomic layer deposited manganese oxide on the precursor ligands on platinum facets

Yuxiao Lan, Yanwei Wen, Yicheng Li, Jiaqiang Yang, Kun Cao, Bin Shan, Rong Chen
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 012402 (2023)
https://doi.org/10.1116/6.0002173
Published: December 2022
View article titled, Selectivity dependence of atomic layer deposited manganese oxide on the precursor ligands on platinum facets
Open the PDF for Selectivity dependence of atomic layer deposited manganese oxide on the precursor ligands on platinum facets in another window
Includes: Supplementary data
Journal Articles

Nucleation and growth of molybdenum disulfide grown by thermal atomic layer deposition on metal oxides

Jake Soares, Steven Letourneau, Matthew Lawson, Anil U. Mane, Yu Lu, Yaqiao Wu, Steven M. Hues, Lan Li, Jeffrey W. Elam, Elton Graugnard
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 062202 (2022)
https://doi.org/10.1116/6.0002024
Published: November 2022
View article titled, Nucleation and growth of molybdenum disulfide grown by thermal atomic layer deposition on metal oxides
Open the PDF for Nucleation and growth of molybdenum disulfide grown by thermal atomic layer deposition on metal oxides in another window
Includes: Supplementary data
Journal Articles

Adsorption and surface reaction of isopropyl alcohol on SiO2 surfaces

Takezo Mawaki, Akinobu Teramoto, Katsutoshi Ishii, Yoshinobu Shiba, Rihito Kuroda, Tomoyuki Suwa, Shuji Azumo, Akira Shimizu, Kota Umezawa, Yasuyuki Shirai, Shigetoshi Sugawa
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 053201 (2022)
https://doi.org/10.1116/6.0002002
Published: July 2022
View article titled, Adsorption and surface reaction of isopropyl alcohol on SiO<sub>2</sub> surfaces
Open the PDF for Adsorption and surface reaction of isopropyl alcohol on SiO<sub>2</sub> surfaces in another window
Journal Articles

Ultraviolet photo-enhanced atomic layer deposition for improving dielectric properties of low temperature deposited Al2O3

Konner E. K. Holden, Shane M. Witsell, Paul C. Lemaire, John F. Conley, Jr.
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 040401 (2022)
https://doi.org/10.1116/6.0001865
Published: May 2022
View article titled, Ultraviolet photo-enhanced atomic layer deposition for improving dielectric properties of low temperature deposited Al<sub>2</sub>O<sub>3</sub>
Open the PDF for Ultraviolet photo-enhanced atomic layer deposition for improving dielectric properties of low temperature deposited Al<sub>2</sub>O<sub>3</sub> in another window
Includes: Supplementary data
Journal Articles

Atmospheric pressure plasma functionalization of polystyrene

Jordyn Polito, Mark Denning, Richard Stewart, David Frost, Mark J. Kushner
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 043001 (2022)
https://doi.org/10.1116/6.0001850
Published: May 2022
View article titled, Atmospheric pressure plasma functionalization of polystyrene
Open the PDF for Atmospheric pressure plasma functionalization of polystyrene in another window
Journal Articles

In situ monitoring atomic layer doping processes for Al-doped ZnO layers: Competitive nature of surface reactions between metal precursors

Adnan Mohammad, Saidjafarzoda Ilhom, Deepa Shukla, Necmi Biyikli
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 042401 (2022)
https://doi.org/10.1116/6.0001772
Published: May 2022
View article titled, <em>In situ</em> monitoring atomic layer doping processes for Al-doped ZnO layers: Competitive nature of surface reactions between metal precursors
Open the PDF for <em>In situ</em> monitoring atomic layer doping processes for Al-doped ZnO layers: Competitive nature of surface reactions between metal precursors in another window
Includes: Supplementary data