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Journal Articles
Ziyi Hu, Hua Shao, Junjie Li, Panpan Lai, Wenrui Wang, Chen Li, Qi Yan, Xiaobin He, Junfeng Li, Tao Yang, Rui Chen, Yayi Wei
J. Vac. Sci. Technol. A 41, 063113 (2023)
Published: November 2023
Journal Articles
J. Vac. Sci. Technol. A 41, 063409 (2023)
Published: October 2023
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 41, 063007 (2023)
Published: October 2023
Includes: Supplementary data
Journal Articles
Hsiao-Hsuan Wan, Jian-Sian Li, Chao-Ching Chiang, Xinyi Xia, David C. Hays, Fan Ren, Stephen J. Pearton
J. Vac. Sci. Technol. A 41, 063205 (2023)
Published: September 2023
Journal Articles
Nickolas Ashburn, Xiuyao Lang, Sumeet Pandey, Steven Wolf, Steve Kramer, John Smythe, Gurtej Sandhu, Charles Winter, Andrew C. Kummel, Kyeongjae Cho
J. Vac. Sci. Technol. A 41, 052403 (2023)
Published: August 2023
Includes: Supplementary data
Journal Articles
Yinghe Ma, Jinhui Mei, Junxin Ouyang, Peng Wu, Sai Wang, Jianguo Yang, Yanming He, Wenjian Zheng, Huaxin Li, Chuanyang Lu, Sendong Ren, Jianping Xu, Paul K. Chu
J. Vac. Sci. Technol. A 41, 053101 (2023)
Published: July 2023
Journal Articles
J. Vac. Sci. Technol. A 41, 043207 (2023)
Published: June 2023
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 41, 032410 (2023)
Published: May 2023
Journal Articles
J. Vac. Sci. Technol. A 41, 033207 (2023)
Published: April 2023
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 41, 032406 (2023)
Published: March 2023
Journal Articles
J. Vac. Sci. Technol. A 41, 033204 (2023)
Published: March 2023
Journal Articles
Kaat Van Dongen, Rachel A. Nye, Jan-Willem J. Clerix, Claudia Sixt, Danilo De Simone, Annelies Delabie
J. Vac. Sci. Technol. A 41, 032404 (2023)
Published: March 2023
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 41, 023002 (2023)
Published: February 2023
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 41, 012601 (2023)
Published: December 2022
Journal Articles
J. Vac. Sci. Technol. A 41, 012402 (2023)
Published: December 2022
Includes: Supplementary data
Journal Articles
Jake Soares, Steven Letourneau, Matthew Lawson, Anil U. Mane, Yu Lu, Yaqiao Wu, Steven M. Hues, Lan Li, Jeffrey W. Elam, Elton Graugnard
J. Vac. Sci. Technol. A 40, 062202 (2022)
Published: November 2022
Includes: Supplementary data
Journal Articles
Takezo Mawaki, Akinobu Teramoto, Katsutoshi Ishii, Yoshinobu Shiba, Rihito Kuroda, Tomoyuki Suwa, Shuji Azumo, Akira Shimizu, Kota Umezawa, Yasuyuki Shirai, Shigetoshi Sugawa
J. Vac. Sci. Technol. A 40, 053201 (2022)
Published: July 2022
Journal Articles
J. Vac. Sci. Technol. A 40, 040401 (2022)
Published: May 2022
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 40, 043001 (2022)
Published: May 2022
Journal Articles
J. Vac. Sci. Technol. A 40, 042401 (2022)
Published: May 2022
Includes: Supplementary data
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