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Journal Articles

Multiple layers of aluminum silicate and silicon dioxide deposited by room-temperature atomic layer deposition for enhanced cation sorption

Takeru Saito, Kazuki Yoshida, Kentaro Saito, Masanori Miura, Kensaku Kanomata, Bashir Ahmmad, Shigeru Kubota, Fumihiko Hirose
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 042406 (2022)
https://doi.org/10.1116/6.0001908
Published: June 2022
View article titled, Multiple layers of aluminum silicate and silicon dioxide deposited by room-temperature atomic layer deposition for enhanced cation sorption
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Journal Articles

Generation of a direct-current, atmospheric-pressure microplasma at the surface of a liquid water microjet for continuous plasma-liquid processing

Souvik Ghosh, Brittany Bishop, Ian Morrison, Rohan Akolkar, Daniel Scherson, R. Mohan Sankaran
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 33, 021312 (2015)
https://doi.org/10.1116/1.4907407
Published: February 2015
View article titled, Generation of a direct-current, atmospheric-pressure microplasma at the surface of a liquid water microjet for continuous plasma-liquid processing
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Includes: Supplementary data
Journal Articles

Improvement of the surface quality of semi-insulating InP substrates through a novel etching and cleaning method

Jingming Liu, Youwen Zhao, Zhiyuan Dong, Fengyun Yang, Fenghua Wang, Kewei Cao, Tong Liu, Hui Xie, Teng Chen
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 31, 031404 (2013)
https://doi.org/10.1116/1.4798309
Published: March 2013
View article titled, Improvement of the surface quality of semi-insulating InP substrates through a novel etching and cleaning method
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Journal Articles

Comparative studies on the thermal stability and corrosion resistance of CrN, CrSiN, and Cr Si N ∕ Al N coatings

Gwang Seok Kim, Sung Min Kim, Sang Yul Lee, Bo Young Lee
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 27, 873–879 (2009)
https://doi.org/10.1116/1.3155396
Published: June 2009
View article titled, Comparative studies on the thermal stability and corrosion resistance of CrN, CrSiN, and Cr Si N ∕ Al N coatings
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Journal Articles

Role of surface tension in copper electroplating

Shih-Chieh Chang, Ying-Lang Wang, Chi-Cheng Hung, Wen-His Lee, Gwo-Jen Hwang
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 25, 566–569 (2007)
https://doi.org/10.1116/1.2731354
Published: April 2007
View article titled, Role of surface tension in copper electroplating
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Journal Articles

Module to guide the expert use of x-ray photoelectron spectroscopy by corrosion scientists

J. E. Castle
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 25, 1–27 (2007)
https://doi.org/10.1116/1.2406058
Published: December 2006
View article titled, Module to guide the expert use of x-ray photoelectron spectroscopy by corrosion scientists
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Journal Articles

Organic polymer thin films deposited on silicon and copper by plasma-enhanced chemical vapor deposition method and characterization of their electrochemical and optical properties

I.-S. Bae, S.-H. Cho, Z. T. Park, J.-G. Kim, J. H. Boo
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 23, 875–879 (2005)
https://doi.org/10.1116/1.1946714
Published: June 2005
View article titled, Organic polymer thin films deposited on silicon and copper by plasma-enhanced chemical vapor deposition method and characterization of their electrochemical and optical properties
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Journal Articles

Corrosion behavior of sputter-deposited TiN thin films

R. J. Martı́n-Palma, M. Manso, J. M. Martı́nez-Duart, A. Conde, J. J. Damborenea
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 21, 1635–1638 (2003)
https://doi.org/10.1116/1.1593053
Published: July 2003
View article titled, Corrosion behavior of sputter-deposited TiN thin films
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Journal Articles

Structure and corrosion properties of PVD Cr–N coatings

C. Liu, Q. Bi, H. Ziegele, A. Leyland, A. Matthews
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 20, 772–780 (2002)
https://doi.org/10.1116/1.1468651
Published: May 2002
View article titled, Structure and corrosion properties of PVD Cr–N coatings
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Journal Articles

Corrosion behaviors of CrN x and ( Ti 1−x Cr x ) N coatings produced by ion plating

Kwang Hee Lee, Changhong Park, Yeosang Yoon, Jung Joong Lee, Hermann A. Jehn
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 19, 2504–2513 (2001)
https://doi.org/10.1116/1.1388623
Published: September 2001
View article titled, Corrosion behaviors of CrN x and ( Ti 1−x Cr x ) N coatings produced by ion plating
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Journal Articles

Corrosion resistance of chromium nitride on low alloy steels by cathodic arc deposition

S. Han, J. H. Lin, D. Y. Wang, F.-H. Lu, H. C. Shih
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 19, 1442–1446 (2001)
https://doi.org/10.1116/1.1361038
Published: July 2001
View article titled, Corrosion resistance of chromium nitride on low alloy steels by cathodic arc deposition
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Journal Articles

In situ atomic force microscope observation of initial stages of corrosion at 18Cr–8Ni stainless steel

F. Katsuki, M. Matsuda, M. Matsumoto, T. Tomida
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 17, 3481–3485 (1999)
https://doi.org/10.1116/1.582087
Published: November 1999
View article titled, <em>In situ</em> atomic force microscope observation of initial stages of corrosion at 18Cr–8Ni stainless steel
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Journal Articles

Hydrazine cyanurate as a nitrogen source for thin nitride film growth

Thomas J. Kropewnicki, Paul A. Kohl
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 16, 139–144 (1998)
https://doi.org/10.1116/1.580960
Published: January 1998
View article titled, Hydrazine cyanurate as a nitrogen source for thin nitride film growth
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Journal Articles

Microstructure and corrosion resistance of plasma source ion nitrided austenitic stainless steel

M. K. Lei, Z. L. Zhang
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 15, 421–427 (1997)
https://doi.org/10.1116/1.580501
Published: March 1997
View article titled, Microstructure and corrosion resistance of plasma source ion nitrided austenitic stainless steel
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Journal Articles

Dry and wet etching characteristics of InN, AlN, and GaN deposited by electron cyclotron resonance metalorganic molecular beam epitaxy

S. J. Pearton, C. R. Abernathy, F. Ren, J. R. Lothian, P. W. Wisk, A. Katz
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 11, 1772–1775 (1993)
https://doi.org/10.1116/1.578423
Published: July 1993
View article titled, Dry and wet etching characteristics of InN, AlN, and GaN deposited by electron cyclotron resonance metalorganic molecular beam epitaxy
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Journal Articles

Corrosion‐resistant ion‐plated Al–Zn films

W. B. Nowak, L. E. Burns, V. G. Harris
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 7, 2350–2354 (1989)
https://doi.org/10.1116/1.575941
Published: May 1989
View article titled, Corrosion‐resistant ion‐plated Al–Zn films
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Journal Articles

Al, Al–N alloy, and AlN‐coated steel corrosion behavior in O2‐free KCl solutions

W. S. Tait, C. O. Huber, B. C. Begnoche, J. R. Siettmann, C. R. Aita
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 6, 924–927 (1988)
https://doi.org/10.1116/1.575031
Published: May 1988
View article titled, Al, Al–N alloy, and AlN‐coated steel corrosion behavior in O<sub>2</sub>‐free KCl solutions
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Journal Articles

Corrosion behavior of amorphous Ni based alloy coatings fabricated by ion beam mixing

R. S. Bhattacharya, A. K. Rai, C. N. Raffoul, P. P. Pronko, M. Khobaib
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 3, 2680–2683 (1985)
https://doi.org/10.1116/1.572814
Published: November 1985
View article titled, Corrosion behavior of amorphous Ni based alloy coatings fabricated by ion beam mixing
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Journal Articles

Fabrication of electrically conductive metal oxide coatings by reactive ion plating

V. F. Hock, L. D. Stephenson, J. H. Givens, J. M. Rigsbee
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 3, 2661–2664 (1985)
https://doi.org/10.1116/1.572809
Published: November 1985
View article titled, Fabrication of electrically conductive metal oxide coatings by reactive ion plating
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