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Journal Articles

Design method for generating multiple colors with thickness-modulated thin-film optical filters for silicon solar cells

Paramita Bhattacharyya, Brahim Ahammou, Clarissa White, Fahmida Azmi, Graham Carlow, Rafael Kleiman, Peter Mascher
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 013101 (2025)
https://doi.org/10.1116/6.0003977
Published: December 2024
View article titled, Design method for generating multiple colors with thickness-modulated thin-film optical filters for silicon solar cells
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Journal Articles

Effect of template on the photoresponsivity of BaSi2 films grown on Ge(111) substrates by molecular beam epitaxy

Sho Aonuki, Kaori Takayanagi, Ai Iwai, Kaoru Toko, Takashi Suemasu
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 032702 (2024)
https://doi.org/10.1116/6.0003503
Published: March 2024
View article titled, Effect of template on the photoresponsivity of BaSi<sub>2</sub> films grown on Ge(111) substrates by molecular beam epitaxy
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Journal Articles

Deposition rate and optical emissions in niobium oxide processes by reactive sputtering

Featured
João Saccoman, Nilton Francelosi A. Neto, José H. D. da Silva
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 033402 (2024)
https://doi.org/10.1116/6.0003255
Published: March 2024
View article titled, Deposition rate and optical emissions in niobium oxide processes by reactive sputtering
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Journal Articles

Orientation-dependent etching of silicon by fluorine molecules: A quantum chemistry computational study

Editor’s Pick
Omesh Dhar Dwivedi, Yuri Barsukov, Sierra Jubin, Joseph R. Vella, Igor Kaganovich
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 052602 (2023)
https://doi.org/10.1116/6.0002841
Published: August 2023
View article titled, Orientation-dependent etching of silicon by fluorine molecules: A quantum chemistry computational study
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Journal Articles

Recombination mechanism of heavily Be-doped GaAsN by time-resolved photoluminescence

Takashi Tsukasaki, Hisashi Sumikura, Takuma Fujimoto, Miki Fujita, Toshiki Makimoto
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 052702 (2023)
https://doi.org/10.1116/6.0002522
Published: July 2023
View article titled, Recombination mechanism of heavily Be-doped GaAsN by time-resolved photoluminescence
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Journal Articles

Influence of local chemical environment and external perturbations of porphyrins on surfaces

José J. Ortiz-Garcia, Rebecca C. Quardokus
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 030801 (2023)
https://doi.org/10.1116/6.0002401
Published: March 2023
View article titled, Influence of local chemical environment and external perturbations of porphyrins on surfaces
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Journal Articles

Role of ZnO and MgO interfaces on the growth and optoelectronic properties of atomic layer deposited Zn1−xMgxO films

Poorani Gnanasambandan, Noureddine Adjeroud, Renaud Leturcq
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 062413 (2022)
https://doi.org/10.1116/6.0001925
Published: November 2022
View article titled, Role of ZnO and MgO interfaces on the growth and optoelectronic properties of atomic layer deposited Zn<sub>1−<em>x</em></sub>Mg<sub>x</sub>O films
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Journal Articles

Simple thermal vapor deposition process for and characterization of n-type indium oxysulfide thin films

Editor’s Pick
Ashwin Jayaraman, Sang Bok Kim, Luke M. Davis, Xiabing Lou, Xizhu Zhao, Roy G. Gordon
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 062402 (2022)
https://doi.org/10.1116/6.0001997
Published: September 2022
View article titled, Simple thermal vapor deposition process for and characterization of n-type indium oxysulfide thin films
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Includes: Supplementary data
Journal Articles

Phase evolution and morphology in Cu-In-Ga sputtered precursors

Isaac K. Lam, Kyeongchan Moon, Sina Soltanmohammad, Gregory M. Hanket, Woo Kyoung Kim, William N. Shafarman
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 033402 (2022)
https://doi.org/10.1116/6.0001712
Published: March 2022
View article titled, Phase evolution and morphology in Cu-In-Ga sputtered precursors
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Journal Articles

Hole selective nickel oxide as transparent conductive oxide

David Tröger, Johanna Reif, Thomas Mikolajick, Matthias Grube
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 013409 (2022)
https://doi.org/10.1116/6.0001391
Published: December 2021
View article titled, Hole selective nickel oxide as transparent conductive oxide
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Includes: Supplementary data
Journal Articles

Influence of annealing temperature of nickel oxide as hole transport layer applied for inverted perovskite solar cells

Ka-Te Chen, Chia-Hsun Hsu, Fang-Bin Ren, Can Wang, Peng Gao, Wan-Yu Wu, Shui-Yang Lien, Wen-Zhang Zhu
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 39, 062401 (2021)
https://doi.org/10.1116/6.0001191
Published: September 2021
View article titled, Influence of annealing temperature of nickel oxide as hole transport layer applied for inverted perovskite solar cells
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Journal Articles

ERRATUM: “Chemical passivation of the perovskite layer and its real-time effect on the device performance in back-contact perovskite solar cells” [J. Vac. Sci. Technol. A 38, 060401 (2020)]

Anthony S. R. Chesman, Udo Bach, Askhat N. Jumabekov
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 39, 027002 (2021)
https://doi.org/10.1116/6.0000931
Published: February 2021
View article titled, ERRATUM: “Chemical passivation of the perovskite layer and its real-time effect on the device performance in back-contact perovskite solar cells” [J. Vac. Sci. Technol. A 38, 060401 (2020)]
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Journal Articles

Highly crystalline methylammonium lead iodide films: Phase transition from tetragonal to cubic structure by thermal annealing

Shyju Thankaraj salammal, Vengatesh Panneerselvam, Karthik Kumar Chinnakutti, Paulraj Manidurai, Kuppusami Parasuraman
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 39, 022801 (2021)
https://doi.org/10.1116/6.0000635
Published: February 2021
View article titled, Highly crystalline methylammonium lead iodide films: Phase transition from tetragonal to cubic structure by thermal annealing
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Journal Articles

Ultra-thin Al2O3 capped with SiNx enabling implied open-circuit voltage reaching 720 mV on industrial p-type Cz c-Si wafers for passivated emitter and rear solar cells

Gamze Kökbudak, Ahmet E. Keçeci, Hisham Nasser, Raşit Turan
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 39, 012409 (2021)
https://doi.org/10.1116/6.0000692
Published: December 2020
View article titled, Ultra-thin Al<sub>2</sub>O<sub>3</sub> capped with SiN<sub>x</sub> enabling implied open-circuit voltage reaching 720 mV on industrial p-type Cz c-Si wafers for passivated emitter and rear solar cells
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Journal Articles

tert-butoxides as precursors for atomic layer deposition of alkali metal containing thin films

Henrik H. Sønsteby, Jon E. Bratvold, Veronica A.-L. K. Killi, Devika Choudhury, Jeffrey W. Elam, Helmer Fjellvåg, Ola Nilsen
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 38, 060804 (2020)
https://doi.org/10.1116/6.0000589
Published: October 2020
View article titled, <em>tert</em>-butoxides as precursors for atomic layer deposition of alkali metal containing thin films
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Includes: Supplementary data
Journal Articles

Physical and chemical vapor deposition methods applied to all-inorganic metal halide perovskites

Sara Bonomi, Lorenzo Malavasi
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 38, 060803 (2020)
https://doi.org/10.1116/6.0000568
Published: October 2020
View article titled, Physical and chemical vapor deposition methods applied to all-inorganic metal halide perovskites
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Journal Articles

Heteroepitaxial growth of β-Ga2O3 films on SiC via molecular beam epitaxy

Neeraj Nepal, D. Scott Katzer, Brian P. Downey, Virginia D. Wheeler, Luke O. Nyakiti, David F. Storm, Matthew T. Hardy, Jaime A. Freitas, Eric N. Jin, Diego Vaca, Luke Yates, Samuel Graham, Satish Kumar, David J. Meyer
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 38, 063406 (2020)
https://doi.org/10.1116/6.0000452
Published: October 2020
View article titled, Heteroepitaxial growth of β-Ga<sub>2</sub>O<sub>3</sub> films on SiC via molecular beam epitaxy
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Journal Articles

The chemistry and energetics of the interface between metal halide perovskite and atomic layer deposited metal oxides

Andrea E. A. Bracesco, Claire H. Burgess, Anna Todinova, Valerio Zardetto, Dibyashree Koushik, Wilhelmus M. M (Erwin) Kessels, Ilker Dogan, Christ H. L. Weijtens, Sjoerd Veenstra, Ronn Andriessen, Mariadriana Creatore
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 38, 063206 (2020)
https://doi.org/10.1116/6.0000447
Published: October 2020
View article titled, The chemistry and energetics of the interface between metal halide perovskite and atomic layer deposited metal oxides
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Includes: Supplementary data
Journal Articles

Chemical passivation of the perovskite layer and its real-time effect on the device performance in back-contact perovskite solar cells

Askhat N. Jumabekov
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 38, 060401 (2020)
https://doi.org/10.1116/6.0000481
Published: September 2020
View article titled, Chemical passivation of the perovskite layer and its real-time effect on the device performance in back-contact perovskite solar cells
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Journal Articles

Atomic layer deposition of amorphous antimony sulfide (a-Sb2S3) as semiconductor sensitizer in extremely thin absorber solar cell

Neha Mahuli, Debabrata Halder, Ankan Paul, Shaibal K. Sarkar
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 38, 032407 (2020)
https://doi.org/10.1116/6.0000031
Published: March 2020
View article titled, Atomic layer deposition of amorphous antimony sulfide (a-Sb<sub>2</sub>S<sub>3</sub>) as semiconductor sensitizer in extremely thin absorber solar cell
Open the PDF for Atomic layer deposition of amorphous antimony sulfide (a-Sb<sub>2</sub>S<sub>3</sub>) as semiconductor sensitizer in extremely thin absorber solar cell in another window
Includes: Supplementary data