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Journal Articles
J. Vac. Sci. Technol. A 40, 033206 (2022)
Published: April 2022
Journal Articles
J. Vac. Sci. Technol. A 40, 013203 (2022)
Published: December 2021
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 39, 062201 (2021)
Published: November 2021
Journal Articles
J. Vac. Sci. Technol. A 39, 053205 (2021)
Published: August 2021
Journal Articles
J. Vac. Sci. Technol. A 38, 032201 (2020)
Published: May 2020
Journal Articles
J. Vac. Sci. Technol. A 38, 031002 (2020)
Published: March 2020
Journal Articles
J. Vac. Sci. Technol. A 36, 05G401 (2018)
Published: July 2018
Journal Articles
J. Vac. Sci. Technol. A 36, 031402 (2018)
Published: April 2018
Journal Articles
Joshua S. Wallace, Austin Quinn, Joseph A. Gardella, Jr., Da Huang, Jing Hu, Eric Siu-Wai Kong, Han-Ik Joh
J. Vac. Sci. Technol. A 34, 061502 (2016)
Published: September 2016
Journal Articles
J. Vac. Sci. Technol. A 33, 061514 (2015)
Published: September 2015
Journal Articles
J. Vac. Sci. Technol. A 34, 01A101 (2016)
Published: August 2015
Journal Articles
J. Vac. Sci. Technol. A 32, 051511 (2014)
Published: August 2014
Journal Articles
Li-Wei Huang, Cheng-Kai Chang, Fan-Ching Chien, Kuei-Hsien Chen, Peilin Chen, Fu-Rong Chen, Chia-Seng Chang
J. Vac. Sci. Technol. A 32, 050601 (2014)
Published: July 2014
Journal Articles
J. Vac. Sci. Technol. A 31, 01A112 (2013)
Published: October 2012
Journal Articles
J. Vac. Sci. Technol. A 30, 01A114 (2012)
Published: November 2011
Journal Articles
J. Vac. Sci. Technol. A 26, 1542–1545 (2008)
Published: November 2008
Journal Articles
J. Vac. Sci. Technol. A 25, 1512–1518 (2007)
Published: September 2007
Journal Articles
J. Vac. Sci. Technol. A 25, 721–725 (2007)
Published: May 2007
Journal Articles
J. Vac. Sci. Technol. A 24, 190–194 (2006)
Published: February 2006
Journal Articles
J. Vac. Sci. Technol. A 21, 1302–1306 (2003)
Published: July 2003
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