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Journal Articles
J. Vac. Sci. Technol. A 42, 063208 (2024)
Published: October 2024
Journal Articles
Xiaoyang Yi, Wei Liu, Gaofeng Liu, Yunfei Wang, Weijian Li, Guohao Zhang, Yanqing Wu, Shangzhou Zhang, Haizhen Wang, Bin Sun, Weihong Gao, Xianglong Meng, Zhiyong Gao
J. Vac. Sci. Technol. A 42, 033105 (2024)
Published: April 2024
Journal Articles
J. Vac. Sci. Technol. A 42, 012201 (2024)
Published: December 2023
Includes: Supplementary data
Journal Articles
Benjamin L. Dutton, Joel B. Varley, Cassandra Remple, Jani Jesenovec, Brooke K. Downing, Jimmy-Xuan Shen, Soroush Ghandiparsi, Adam T. Neal, Yunjo Kim, Andrew J. Green, Lars F. Voss, Matthew D. McCluskey, John S. McCloy
J. Vac. Sci. Technol. A 42, 012801 (2024)
Published: December 2023
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 40, 033206 (2022)
Published: April 2022
Journal Articles
J. Vac. Sci. Technol. A 40, 013203 (2022)
Published: December 2021
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 39, 062201 (2021)
Published: November 2021
Journal Articles
J. Vac. Sci. Technol. A 39, 053205 (2021)
Published: August 2021
Journal Articles
J. Vac. Sci. Technol. A 38, 032201 (2020)
Published: May 2020
Journal Articles
J. Vac. Sci. Technol. A 36, 05G401 (2018)
Published: July 2018
Journal Articles
J. Vac. Sci. Technol. A 36, 031402 (2018)
Published: April 2018
Journal Articles
Joshua S. Wallace, Austin Quinn, Joseph A. Gardella, Jr., Da Huang, Jing Hu, Eric Siu-Wai Kong, Han-Ik Joh
J. Vac. Sci. Technol. A 34, 061502 (2016)
Published: September 2016
Journal Articles
J. Vac. Sci. Technol. A 33, 061514 (2015)
Published: September 2015
Journal Articles
J. Vac. Sci. Technol. A 34, 01A101 (2016)
Published: August 2015
Journal Articles
J. Vac. Sci. Technol. A 32, 051511 (2014)
Published: August 2014
Journal Articles
Li-Wei Huang, Cheng-Kai Chang, Fan-Ching Chien, Kuei-Hsien Chen, Peilin Chen, Fu-Rong Chen, Chia-Seng Chang
J. Vac. Sci. Technol. A 32, 050601 (2014)
Published: July 2014
Journal Articles
J. Vac. Sci. Technol. A 31, 01A112 (2013)
Published: October 2012
Journal Articles
J. Vac. Sci. Technol. A 30, 01A114 (2012)
Published: November 2011
Journal Articles
J. Vac. Sci. Technol. A 26, 1542–1545 (2008)
Published: November 2008
Journal Articles
J. Vac. Sci. Technol. A 25, 1512–1518 (2007)
Published: September 2007
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