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Journal Articles
J. Vac. Sci. Technol. A 41, 063001 (2023)
Published: September 2023
Journal Articles
J. Vac. Sci. Technol. A 41, 043210 (2023)
Published: June 2023
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 34, 061604 (2016)
Published: November 2016
Journal Articles
J. Vac. Sci. Technol. A 10, 3001–3006 (1992)
Published: September 1992