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Journal Articles
J. Vac. Sci. Technol. A 42, 053002 (2024)
Published: July 2024
Journal Articles
J. Vac. Sci. Technol. A 42, 033406 (2024)
Published: April 2024
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 41, 063409 (2023)
Published: October 2023
Includes: Supplementary data
Journal Articles
Raquel Garza, Nathan Bartlett, Jameson Crouse, Andrew Herschberg, R. Mohan Sankaran, Md. Amzad Hossain, David N. Ruzic
J. Vac. Sci. Technol. A 41, 063209 (2023)
Published: October 2023
Journal Articles
J. Vac. Sci. Technol. A 41, 042709 (2023)
Published: June 2023
Journal Articles
J. Vac. Sci. Technol. A 41, 040801 (2023)
Published: June 2023
Journal Articles
J. Vac. Sci. Technol. A 41, 043103 (2023)
Published: May 2023
Journal Articles
J. Vac. Sci. Technol. A 41, 023409 (2023)
Published: February 2023
Includes: Supplementary data
Journal Articles
Kang-Yi Lin, Christian Preischl, Christian Felix Hermanns, Daniel Rhinow, Hans-Michael Solowan, Michael Budach, Hubertus Marbach, Klaus Edinger, G. S. Oehrlein
J. Vac. Sci. Technol. A 41, 013004 (2023)
Published: December 2022
Journal Articles
J. Vac. Sci. Technol. A 41, 012401 (2023)
Published: December 2022
Journal Articles
J. Vac. Sci. Technol. A 41, 013401 (2023)
Published: December 2022
Journal Articles
J. Vac. Sci. Technol. A 40, 062407 (2022)
Published: November 2022
Includes: Supplementary data
Journal Articles
SiO2 etching and surface evolution using combined exposure to CF4/O2 remote plasma and electron beam
Kang-Yi Lin, Christian Preischl, Christian Felix Hermanns, Daniel Rhinow, Hans-Michael Solowan, Michael Budach, Klaus Edinger, G. S. Oehrlein
J. Vac. Sci. Technol. A 40, 063004 (2022)
Published: October 2022
Journal Articles
Radha Krishna Murthy Bulusu, Shurik Yatom, Christopher W. Patterson, Robert J. Wandell, Bruce R. Locke
J. Vac. Sci. Technol. A 40, 063001 (2022)
Published: September 2022
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 40, 043207 (2022)
Published: June 2022
Journal Articles
J. Vac. Sci. Technol. A 40, 043003 (2022)
Published: June 2022
Journal Articles
J. Vac. Sci. Technol. A 40, 043001 (2022)
Published: May 2022
Journal Articles
J. Vac. Sci. Technol. A 40, 022601 (2022)
Published: January 2022
Journal Articles
J. Vac. Sci. Technol. A 40, 022401 (2022)
Published: January 2022
Journal Articles
Nobuya Miyoshi, Hiroyuki Kobayashi, Kazunori Shinoda, Masaru Kurihara, Kohei Kawamura, Yutaka Kouzuma, Masaru Izawa
J. Vac. Sci. Technol. A 40, 012601 (2022)
Published: December 2021
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