Page 1 | Search Results | Journal of Vacuum Science & Technology A

1-20 of 50

Sort by

Sort Order Select

Journal Articles

Atomic layer deposited aluminum nitride for interface protection of lithium germanium thiophosphate solid electrolytes

Sam Klueter, Yang Wang, Elias Kallon, Aidan Knab, Daniela Fontecha, Cholho Lee, Gary W. Rubloff, Sang Bok Lee, Alexander C. Kozen

J. Vac. Sci. Technol. A 43, 032404 (2025)

https://doi.org/10.1116/6.0004419

Published: March 2025

View articletitled, Atomic layer deposited aluminum nitride for interface protection of lithium germanium thiophosphate solid electrolytes

Journal Articles

Atomic layer deposition of aluminum phosphate layers using tris(dimethylamino)phosphine as P-precursor

Ruben Blomme, Aditya Chalishazar, Lowie Henderick, Frans Munnik, Johan Meersschaut, Matthias M. Minjauw, Christophe Detavernier, Jolien Dendooven

J. Vac. Sci. Technol. A 43, 022409 (2025)

https://doi.org/10.1116/6.0004267

Published: February 2025

View articletitled, Atomic layer deposition of aluminum phosphate layers using tris(dimethylamino)phosphine as P-precursor

Journal Articles

Novel amide-based deep eutectic solvent electrolytes for high-performance lithium-ion batteries

Jia Qi He, Dian Chun Ju, Wen Kai Zou, Tian Yi Lv, Chun Yu Chen, Hui Li, Yi Zhuang, Bo Wen Li

J. Vac. Sci. Technol. A 42, 042801 (2024)

https://doi.org/10.1116/6.0003452

Published: May 2024

View articletitled, Novel amide-based deep eutectic solvent electrolytes for high-performance lithium-ion batteries

Journal Articles

Li_xCo_yO_z thin-films deposition through thermal atomic layer deposition

Antoine Peisert, Noureddine Adjeroud, Damien Lenoble, Guillaume Lamblin

J. Vac. Sci. Technol. A 41, 062403 (2023)

https://doi.org/10.1116/6.0002863

Published: October 2023

View articletitled, LixCoyOz thin-films deposition through thermal atomic layer deposition

Journal Articles

ToF-SIMS in battery research: Advantages, limitations, and best practices

Teo Lombardo, Felix Walther, Christine Kern, Yannik Moryson, Timo Weintraut, Anja Henss, Marcus Rohnke

J. Vac. Sci. Technol. A 41, 053207 (2023)

https://doi.org/10.1116/6.0002850

Published: August 2023

View articletitled, ToF-SIMS in battery research: Advantages, limitations, and best practices

Includes: Supplementary data

Journal Articles

Effect of electrochemical cycling on microstructures of nanocomposite silicon electrodes using hyperpolarized ¹²⁹Xe and ⁷Li NMR spectroscopy

Yougang Mao, Naba K. Karan, Ravi Kumar, Russell Hopson, Pradeep R. Guduru, Brian W. Sheldon, Li-Qiong Wang

J. Vac. Sci. Technol. A 40, 043203 (2022)

https://doi.org/10.1116/6.0001768

Published: May 2022

View articletitled, Effect of electrochemical cycling on microstructures of nanocomposite silicon electrodes using hyperpolarized 129Xe and 7Li NMR spectroscopy

Journal Articles

Low temperature plasma-enhanced atomic layer deposition of sodium phosphorus oxynitride with tunable nitrogen content

Daniela Fontecha, R. Blake Nuwayhid, Alexander C. Kozen, David M. Stewart, Gary W. Rubloff, Keith E. Gregorczyk

J. Vac. Sci. Technol. A 40, 032403 (2022)

https://doi.org/10.1116/6.0001752

Published: April 2022

View articletitled, Low temperature plasma-enhanced atomic layer deposition of sodium phosphorus oxynitride with tunable nitrogen content

Includes: Supplementary data

Journal Articles

Interaction of Mg with the ionic liquid 1-butyl-1-methylpyrrolidinium bis(trifluoromethylsulfonyl)imide—An experimental and computational model study of the electrode–electrolyte interface in post-lithium batteries

Florian Buchner, Katrin Forster-Tonigold, Tim Bolter, Alexander Rampf, Jens Klein, Axel Groß, R. Jürgen Behm

J. Vac. Sci. Technol. A 40, 023204 (2022)

https://doi.org/10.1116/6.0001658

Published: February 2022

View articletitled, Interaction of Mg with the ionic liquid 1-butyl-1-methylpyrrolidinium bis(trifluoromethylsulfonyl)imide—An experimental and computational model study of the electrode–electrolyte interface in post-lithium batteries

Includes: Supplementary data

Journal Articles

In situ x-ray photoelectron spectroscopy analysis of electrochemical interfaces in battery: Recent advances and remaining challenges

Sungun Wi, Vaithiyalingam Shutthanandan, Bhuvaneswari M. Sivakumar, Suntharampillai Thevuthasan, Venkateshkumar Prabhakaran, Swadipta Roy, Ajay Karakoti, Vijayakumar Murugesan

J. Vac. Sci. Technol. A 40, 010808 (2022)

https://doi.org/10.1116/6.0001460

Published: January 2022

View articletitled, In situ x-ray photoelectron spectroscopy analysis of electrochemical interfaces in battery: Recent advances and remaining challenges

Journal Articles

Plasma enhanced atomic layer deposition of thin film Li_1+xMn_2−xO₄ for realization of all solid-state 3D lithium-ion microbatteries

Ryan Sheil, Danielle Butts, Katherine Jungjohann, Jinkyoung Yoo, Bruce Dunn, Jane P. Chang

J. Vac. Sci. Technol. A 39, 012408 (2021)

https://doi.org/10.1116/6.0000644

Published: December 2020

View articletitled, Plasma enhanced atomic layer deposition of thin film Li1+xMn2−xO4 for realization of all solid-state 3D lithium-ion microbatteries

Includes: Supplementary data

Journal Articles

Enhancing nanostructured nickel-rich lithium-ion battery cathodes via surface stabilization

Jin-Myoung Lim, Norman S. Luu, Kyu-Young Park, Mark T. Z. Tan, Sungkyu Kim, Julia R. Downing, Kai He, Vinayak P. Dravid, Mark C. Hersam

J. Vac. Sci. Technol. A 38, 063210 (2020)

https://doi.org/10.1116/6.0000580

Published: November 2020

View articletitled, Enhancing nanostructured nickel-rich lithium-ion battery cathodes via surface stabilization

Includes: Supplementary data

Journal Articles

tert-butoxides as precursors for atomic layer deposition of alkali metal containing thin films

Henrik H. Sønsteby, Jon E. Bratvold, Veronica A.-L. K. Killi, Devika Choudhury, Jeffrey W. Elam, Helmer Fjellvåg, Ola Nilsen

J. Vac. Sci. Technol. A 38, 060804 (2020)

https://doi.org/10.1116/6.0000589

Published: October 2020

View articletitled, tert-butoxides as precursors for atomic layer deposition of alkali metal containing thin films

Includes: Supplementary data

Journal Articles

Energy-dense Li metal anodes enabled by thin film electrolytes

Marina Maria Ioanniti, Fei Hu, Wyatt E. Tenhaeff

J. Vac. Sci. Technol. A 38, 060801 (2020)

https://doi.org/10.1116/6.0000430

Published: September 2020

View articletitled, Energy-dense Li metal anodes enabled by thin film electrolytes

Journal Articles

LiF by atomic layer deposition—Made easy

Julie N. Kvalvik, Kristian B. Kvamme, Kjetil Almaas, Amund Ruud, Henrik H. Sønsteby, Ola Nilsen

J. Vac. Sci. Technol. A 38, 050401 (2020)

https://doi.org/10.1116/6.0000314

Published: August 2020

View articletitled, LiF by atomic layer deposition—Made easy

Includes: Supplementary data

Journal Articles

Fundamentals, impedance, and performance of solid-state Li-metal microbatteries

John Collins, Joel P. de Souza, Yun Seog Lee, Adele Pacquette, John M. Papalia, Douglas M. Bishop, Teodor Todorov, Mahadevaiyer Krishnan, Eric Joseph, John Rozen, Devendra Sadana

J. Vac. Sci. Technol. A 38, 033212 (2020)

https://doi.org/10.1116/6.0000097

Published: April 2020

View articletitled, Fundamentals, impedance, and performance of solid-state Li-metal microbatteries

Journal Articles

Synthesis and integration of thin film solid state electrolytes for 3D Li-ion microbatteries

Ryan Sheil, Jane P. Chang

J. Vac. Sci. Technol. A 38, 032411 (2020)

https://doi.org/10.1116/1.5142859

Published: April 2020

View articletitled, Synthesis and integration of thin film solid state electrolytes for 3D Li-ion microbatteries

Journal Articles

Atomic layer deposition of nitrogen incorporated molybdenum oxide: Unveiling carrier transport mechanism and its application in Li-ion battery

Arpan Dhara, Debabrata Saha, Sagar Mitra, Shaibal K. Sarkar

J. Vac. Sci. Technol. A 38, 022409 (2020)

https://doi.org/10.1116/1.5130606

Published: January 2020

View articletitled, Atomic layer deposition of nitrogen incorporated molybdenum oxide: Unveiling carrier transport mechanism and its application in Li-ion battery

Includes: Supplementary data

Journal Articles

Sputter deposition and thermal evaporation of Li₂O, Li₂S, and Li₂Se films

Simon Lorger, Dieter Fischer, Robert Usiskin, Joachim Maier

J. Vac. Sci. Technol. A 37, 061515 (2019)

https://doi.org/10.1116/1.5123439

Published: November 2019

View articletitled, Sputter deposition and thermal evaporation of Li2O, Li2S, and Li2Se films

Includes: Supplementary data

Journal Articles

Atomic layer deposition of thin films as model electrodes: A case study of the synergistic effect in Fe₂O₃-SnO₂

Jeroen Kint, Felix Mattelaer, Matthias Minjauw, Bo Zhao, Christophe Detavernier

J. Vac. Sci. Technol. A 37, 050904 (2019)

https://doi.org/10.1116/1.5115987

Published: August 2019

View articletitled, Atomic layer deposition of thin films as model electrodes: A case study of the synergistic effect in Fe2O3-SnO2

Journal Articles

Review Article: Layer-structured carbonaceous materials for advanced Li-ion and Na-ion batteries: Beyond graphene

Wei Ni, Lingying Shi

J. Vac. Sci. Technol. A 37, 040803 (2019)

https://doi.org/10.1116/1.5095413

Published: July 2019

View articletitled, Review Article: Layer-structured carbonaceous materials for advanced Li-ion and Na-ion batteries: Beyond graphene

Includes: Supplementary data

Update search

NARROW

Format

Collections

Topics

Subjects

Journal

Article Type

Issue Section

Date

Availability

Atomic layer deposited aluminum nitride for interface protection of lithium germanium thiophosphate solid electrolytes

Atomic layer deposition of aluminum phosphate layers using tris(dimethylamino)phosphine as P-precursor

Novel amide-based deep eutectic solvent electrolytes for high-performance lithium-ion batteries

Li_xCo_yO_z thin-films deposition through thermal atomic layer deposition

ToF-SIMS in battery research: Advantages, limitations, and best practices

Effect of electrochemical cycling on microstructures of nanocomposite silicon electrodes using hyperpolarized ¹²⁹Xe and ⁷Li NMR spectroscopy

Low temperature plasma-enhanced atomic layer deposition of sodium phosphorus oxynitride with tunable nitrogen content

Interaction of Mg with the ionic liquid 1-butyl-1-methylpyrrolidinium bis(trifluoromethylsulfonyl)imide—An experimental and computational model study of the electrode–electrolyte interface in post-lithium batteries

In situ x-ray photoelectron spectroscopy analysis of electrochemical interfaces in battery: Recent advances and remaining challenges

Plasma enhanced atomic layer deposition of thin film Li_1+xMn_2−xO₄ for realization of all solid-state 3D lithium-ion microbatteries

Enhancing nanostructured nickel-rich lithium-ion battery cathodes via surface stabilization

tert-butoxides as precursors for atomic layer deposition of alkali metal containing thin films

Energy-dense Li metal anodes enabled by thin film electrolytes

LiF by atomic layer deposition—Made easy

Fundamentals, impedance, and performance of solid-state Li-metal microbatteries

Synthesis and integration of thin film solid state electrolytes for 3D Li-ion microbatteries

Atomic layer deposition of nitrogen incorporated molybdenum oxide: Unveiling carrier transport mechanism and its application in Li-ion battery

Sputter deposition and thermal evaporation of Li₂O, Li₂S, and Li₂Se films

Atomic layer deposition of thin films as model electrodes: A case study of the synergistic effect in Fe₂O₃-SnO₂

Review Article: Layer-structured carbonaceous materials for advanced Li-ion and Na-ion batteries: Beyond graphene

Resources

Explore

pubs.aip.org

Connect with AIP Publishing

Update search

Resources

Explore

pubs.aip.org

Connect with AIP Publishing

This Feature Is Available To Subscribers Only