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Journal Articles
Sam Klueter, Yang Wang, Elias Kallon, Aidan Knab, Daniela Fontecha, Cholho Lee, Gary W. Rubloff, Sang Bok Lee, Alexander C. Kozen
J. Vac. Sci. Technol. A 43, 032404 (2025)
Published: March 2025
Journal Articles
Ruben Blomme, Aditya Chalishazar, Lowie Henderick, Frans Munnik, Johan Meersschaut, Matthias M. Minjauw, Christophe Detavernier, Jolien Dendooven
J. Vac. Sci. Technol. A 43, 022409 (2025)
Published: February 2025
Journal Articles
J. Vac. Sci. Technol. A 42, 042801 (2024)
Published: May 2024
Journal Articles
J. Vac. Sci. Technol. A 41, 062403 (2023)
Published: October 2023
Journal Articles
Teo Lombardo, Felix Walther, Christine Kern, Yannik Moryson, Timo Weintraut, Anja Henss, Marcus Rohnke
J. Vac. Sci. Technol. A 41, 053207 (2023)
Published: August 2023
Includes: Supplementary data
Journal Articles
Yougang Mao, Naba K. Karan, Ravi Kumar, Russell Hopson, Pradeep R. Guduru, Brian W. Sheldon, Li-Qiong Wang
J. Vac. Sci. Technol. A 40, 043203 (2022)
Published: May 2022
Journal Articles
Daniela Fontecha, R. Blake Nuwayhid, Alexander C. Kozen, David M. Stewart, Gary W. Rubloff, Keith E. Gregorczyk
J. Vac. Sci. Technol. A 40, 032403 (2022)
Published: April 2022
Includes: Supplementary data
Journal Articles
Florian Buchner, Katrin Forster-Tonigold, Tim Bolter, Alexander Rampf, Jens Klein, Axel Groß, R. Jürgen Behm
J. Vac. Sci. Technol. A 40, 023204 (2022)
Published: February 2022
Includes: Supplementary data
Journal Articles
Sungun Wi, Vaithiyalingam Shutthanandan, Bhuvaneswari M. Sivakumar, Suntharampillai Thevuthasan, Venkateshkumar Prabhakaran, Swadipta Roy, Ajay Karakoti, Vijayakumar Murugesan
J. Vac. Sci. Technol. A 40, 010808 (2022)
Published: January 2022
Journal Articles
J. Vac. Sci. Technol. A 39, 012408 (2021)
Published: December 2020
Includes: Supplementary data
Journal Articles
Jin-Myoung Lim, Norman S. Luu, Kyu-Young Park, Mark T. Z. Tan, Sungkyu Kim, Julia R. Downing, Kai He, Vinayak P. Dravid, Mark C. Hersam
J. Vac. Sci. Technol. A 38, 063210 (2020)
Published: November 2020
Includes: Supplementary data
Journal Articles
Henrik H. Sønsteby, Jon E. Bratvold, Veronica A.-L. K. Killi, Devika Choudhury, Jeffrey W. Elam, Helmer Fjellvåg, Ola Nilsen
J. Vac. Sci. Technol. A 38, 060804 (2020)
Published: October 2020
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 38, 060801 (2020)
Published: September 2020
Journal Articles
J. Vac. Sci. Technol. A 38, 050401 (2020)
Published: August 2020
Includes: Supplementary data
Journal Articles
John Collins, Joel P. de Souza, Yun Seog Lee, Adele Pacquette, John M. Papalia, Douglas M. Bishop, Teodor Todorov, Mahadevaiyer Krishnan, Eric Joseph, John Rozen, Devendra Sadana
J. Vac. Sci. Technol. A 38, 033212 (2020)
Published: April 2020
Journal Articles
J. Vac. Sci. Technol. A 38, 032411 (2020)
Published: April 2020
Journal Articles
J. Vac. Sci. Technol. A 38, 022409 (2020)
Published: January 2020
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 37, 061515 (2019)
Published: November 2019
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 37, 050904 (2019)
Published: August 2019
Journal Articles
J. Vac. Sci. Technol. A 37, 040803 (2019)
Published: July 2019
Includes: Supplementary data
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