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Journal Articles
Zaoyang Lin, Sven Dekelver, Daire Cott, Benjamin Groven, Stefanie Sergeant, Thierry Conard, Xiangyu Wu, Pierre Morin, Dennis Lin, Cesar Javier Lockhart de la Rosa, Gouri Sankar Kar, Annelies Delabie
J. Vac. Sci. Technol. A 42, 062202 (2024)
Published: October 2024
Journal Articles
J. Vac. Sci. Technol. A 42, 062403 (2024)
Published: September 2024
Journal Articles
Romel Hidayat, Khabib Khumaini, Hye-Lee Kim, Tanzia Chowdhury, Tirta Rona Mayangsari, Seongjae Cho, Byungchul Cho, Sangjoon Park, Jongwan Jung, Won-Jun Lee
J. Vac. Sci. Technol. A 41, 032604 (2023)
Published: April 2023
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 41, 033006 (2023)
Published: April 2023
Journal Articles
J. Vac. Sci. Technol. A 41, 032406 (2023)
Published: March 2023
Journal Articles
J. Vac. Sci. Technol. A 40, 063009 (2022)
Published: November 2022
Includes: Supplementary data
Journal Articles
Airah P. Osonio, Takayoshi Tsutsumi, Yoshinari Oda, Bablu Mukherjee, Ranjit Borude, Nobuyoshi Kobayashi, Masaru Hori
J. Vac. Sci. Technol. A 40, 062601 (2022)
Published: October 2022
Journal Articles
G. Antoun, T. Tillocher, A. Girard, P. Lefaucheux, J. Faguet, H. Kim, D. Zhang, M. Wang, K. Maekawa, C. Cardinaud, R. Dussart
J. Vac. Sci. Technol. A 40, 052601 (2022)
Published: August 2022
Journal Articles
J. Vac. Sci. Technol. A 39, 030801 (2021)
Published: March 2021
Journal Articles
J. Vac. Sci. Technol. A 39, 032402 (2021)
Published: March 2021
Journal Articles
J. Vac. Sci. Technol. A 39, 022402 (2021)
Published: January 2021
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 38, 062412 (2020)
Published: November 2020
Includes: Supplementary data
Journal Articles
Zhen Peng, Gen Chen, Yan-Ping Zhao, Xin Zhang, Yun-Tao Song, Grigori Shirkov, Galina Karamysheva, Oleg Karamyshev, Luciano Calabretta, Antonio Caruso
J. Vac. Sci. Technol. A 38, 052401 (2020)
Published: July 2020
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 38, 043007 (2020)
Published: June 2020
Journal Articles
J. Vac. Sci. Technol. A 38, 030803 (2020)
Published: April 2020
Journal Articles
J. Vac. Sci. Technol. A 38, 020804 (2020)
Published: February 2020
Journal Articles
J. Vac. Sci. Technol. A 37, 031601 (2019)
Published: March 2019
Journal Articles
Tanzia Chowdhury, Romel Hidayat, Tirta Rona Mayangsari, Jiyeon Gu, Hye-Lee Kim, Jongwan Jung, Won-Jun Lee
J. Vac. Sci. Technol. A 37, 021001 (2019)
Published: January 2019
Journal Articles
J. Vac. Sci. Technol. A 36, 06A101 (2018)
Published: October 2018
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 36, 041402 (2018)
Published: June 2018
Includes: Supplementary data
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