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Journal Articles
J. Vac. Sci. Technol. A 41, 033204 (2023)
Published: March 2023
Journal Articles
Kyo Shibata, Yusuke Suetsugu, Takuya Ishibashi, Mitsuru Shirai, Shinji Terui, Ken-ichi Kanazawa, Hiromi Hisamatsu
J. Vac. Sci. Technol. A 37, 041601 (2019)
Published: June 2019
Journal Articles
Yusuke Suetsugu, Kyo Shibata, Takuya Ishibashi, Hitoshi Fukuma, Makoto Tobiyama, John Flanagan, Emy Mulyani, Mitsuru Shirai, Shinji Terui, Ken-ichi Kanazawa, Hiromi Hisamatsu
J. Vac. Sci. Technol. A 35, 03E103 (2017)
Published: March 2017
Journal Articles
J. Vac. Sci. Technol. A 34, 061602 (2016)
Published: October 2016
Journal Articles
J. Vac. Sci. Technol. A 32, 051601 (2014)
Published: July 2014
Journal Articles
J. Vac. Sci. Technol. A 30, 060601 (2012)
Published: September 2012
Journal Articles
J. Vac. Sci. Technol. A 28, 1215–1225 (2010)
Published: September 2010
Journal Articles
J. Vac. Sci. Technol. A 25, 1251–1255 (2007)
Published: July 2007
Journal Articles
O. B. Malyshev, D. J. Scott, I. R. Bailey, D. P. Barber, E. Baynham, T. Bradshaw, A. Brummitt, S. Carr, J. A. Clarke, P. Cooke, J. B. Dainton, Y. Ivanyushenkov, L. I. Malysheva, G. A. Moortgat-Pick, J. Rochford
J. Vac. Sci. Technol. A 25, 791–801 (2007)
Published: June 2007
Journal Articles
Oleg B. Malyshev, Vadim V. Anashin, Rodion V. Dostovalov, Nikita V. Fedorov, Alexander A. Krasnov, Ian R. Collins, Vladimir L. Ruzinov
J. Vac. Sci. Technol. A 23, 570–576 (2005)
Published: April 2005
Journal Articles
J. Vac. Sci. Technol. A 20, 857–860 (2002)
Published: May 2002
Journal Articles
J. Vac. Sci. Technol. A 19, 1657–1661 (2001)
Published: July 2001
Journal Articles
J. Vac. Sci. Technol. A 19, 1652–1656 (2001)
Published: July 2001
Journal Articles
J. Vac. Sci. Technol. A 17, 635–643 (1999)
Published: March 1999
Journal Articles
J. Vac. Sci. Technol. A 16, 3455–3459 (1998)
Published: November 1998
Journal Articles
J. Vac. Sci. Technol. A 15, 736–739 (1997)
Published: May 1997
Journal Articles
J. Vac. Sci. Technol. A 15, 731–735 (1997)
Published: May 1997
Journal Articles
J. Vac. Sci. Technol. A 14, 1273–1276 (1996)
Published: May 1996
Journal Articles
J. Vac. Sci. Technol. A 13, 581–584 (1995)
Published: May 1995
Journal Articles
J. Vac. Sci. Technol. A 12, 1673–1677 (1994)
Published: July 1994
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