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Journal Articles

Density functional theory and molecular dynamics study on the growth of graphene by chemical vapor deposition on copper substrate

Qihang Li, Jinping Luo, Zaoyang Li, Mark H. Rummeli, Lijun Liu
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 042202 (2024)
https://doi.org/10.1116/6.0003667
Published: June 2024
View article titled, Density functional theory and molecular dynamics study on the growth of graphene by chemical vapor deposition on copper substrate
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Journal Articles

Scalable synthesis of supported catalysts using fluidized bed atomic layer deposition

Editor’s Pick
Zheng Lu, Angel Yanguas-Gil, Donghyeon Kang, Pragathi Darapaneni, Anil U. Mane, Christopher L. Marshall, Jeffrey W. Elam
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 042404 (2022)
https://doi.org/10.1116/6.0001891
Published: June 2022
View article titled, Scalable synthesis of supported catalysts using fluidized bed atomic layer deposition
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Journal Articles

Ultra-thin Al2O3 capped with SiNx enabling implied open-circuit voltage reaching 720 mV on industrial p-type Cz c-Si wafers for passivated emitter and rear solar cells

Gamze Kökbudak, Ahmet E. Keçeci, Hisham Nasser, Raşit Turan
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 39, 012409 (2021)
https://doi.org/10.1116/6.0000692
Published: December 2020
View article titled, Ultra-thin Al<sub>2</sub>O<sub>3</sub> capped with SiN<sub>x</sub> enabling implied open-circuit voltage reaching 720 mV on industrial p-type Cz c-Si wafers for passivated emitter and rear solar cells
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Journal Articles

Modification of copper and copper oxide surface states due to isopropyl alcohol treatment toward area-selective processes

Takezo Mawaki, Akinobu Teramoto, Katsutoshi Ishii, Yoshinobu Shiba, Rihito Kuroda, Tomoyuki Suwa, Shuji Azumo, Akira Shimizu, Kota Umezawa, Yasuyuki Shirai, Shigetoshi Sugawa
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 39, 013403 (2021)
https://doi.org/10.1116/6.0000618
Published: December 2020
View article titled, Modification of copper and copper oxide surface states due to isopropyl alcohol treatment toward area-selective processes
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Journal Articles

Silver thin film deposited 3-dimensional gold nanorod arrays for plasmonic catalysis

Mehmet Yilmaz, Gokcen Birlik Demirel, Gokhan Demirel
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 38, 023407 (2020)
https://doi.org/10.1116/1.5130721
Published: February 2020
View article titled, Silver thin film deposited 3-dimensional gold nanorod arrays for plasmonic catalysis
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Journal Articles

Surface passivation of aluminum hydride particles via atomic layer deposition

Rong Chen, Chen-Long Duan, Xiao Liu, Kai Qu, Gen Tang, Xing-Xing Xu, Bin Shan
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 35, 03E111 (2017)
https://doi.org/10.1116/1.4982661
Published: April 2017
View article titled, Surface passivation of aluminum hydride particles via atomic layer deposition
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Journal Articles

Desorption and sublimation kinetics for fluorinated aluminum nitride surfaces

Sean W. King, Robert F. Davis, Robert J. Nemanich
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 32, 051402 (2014)
https://doi.org/10.1116/1.4891650
Published: July 2014
View article titled, Desorption and sublimation kinetics for fluorinated aluminum nitride surfaces
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Journal Articles

Thermal chemistry of copper(I)-N,N ′-di-sec-butylacetamidinate on Cu(110) single-crystal surfaces

Qiang Ma, Francisco Zaera, Roy G. Gordon
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 30, 01A114 (2012)
https://doi.org/10.1116/1.3658381
Published: November 2011
View article titled, Thermal chemistry of copper(I)-<em>N,N ′</em>-di-<em>sec</em>-butylacetamidinate on Cu(110) single-crystal surfaces
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Journal Articles

Oxidation of C 2 13 H 5 O H by NO and O 2 on the surface of stepped Pt(332): Relationship to selective catalytic reduction of NO with hydrocarbons

Yuhai Hu, Peter Norton, Keith Griffiths
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 27, 121–129 (2009)
https://doi.org/10.1116/1.3054132
Published: December 2008
View article titled, Oxidation of C 2 13 H 5 O H by NO and O 2 on the surface of stepped Pt(332): Relationship to selective catalytic reduction of NO with hydrocarbons
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Journal Articles

Quantitative determination of reaction products by in-line thermal desorption spectroscopy: The system methanol∕Pd(111)

E. Demirci, A. Winkler
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 26, 78–82 (2008)
https://doi.org/10.1116/1.2816947
Published: December 2007
View article titled, Quantitative determination of reaction products by in-line thermal desorption spectroscopy: The system methanol∕Pd(111)
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Journal Articles

Temperature programed desorption of C 2 H 4 from pure and graphite-covered Pt(111)

B. Vermang, M. Juel, S. Raaen
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 25, 1512–1518 (2007)
https://doi.org/10.1116/1.2784721
Published: September 2007
View article titled, Temperature programed desorption of C 2 H 4 from pure and graphite-covered Pt(111)
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Journal Articles

Reduction of laser-induced roughness in a -Si:H surfaces for vacuum compatible lithography

R. N. Jacobs, E. W. Robinson, A. J. Stoltz, J. H. Dinan, L. Salamanca-Riba
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 24, 1684–1689 (2006)
https://doi.org/10.1116/1.2172938
Published: June 2006
View article titled, Reduction of laser-induced roughness in a -Si:H surfaces for vacuum compatible lithography
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Journal Articles

Epitaxial iron oxide growth on a stepped Pt(9 11 11) surface

Guido Ketteler, Wolfgang Ranke
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 23, 1055–1060 (2005)
https://doi.org/10.1116/1.1889441
Published: June 2005
View article titled, Epitaxial iron oxide growth on a stepped Pt(9 11 11) surface
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Journal Articles

Coupling reactions of trifluoroethyl iodide on GaAs(100)

N. K. Singh, N. T. Kemp, N. Paris, V. Balan
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 22, 1659–1666 (2004)
https://doi.org/10.1116/1.1735887
Published: July 2004
View article titled, Coupling reactions of trifluoroethyl iodide on GaAs(100)
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Journal Articles

Physical and electrical properties of low temperature (<100 ° C )   SiO 2 films deposited by electron cyclotron resonance plasmas

R. Rashid, A. J. Flewitt, J. Robertson
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 21, 728–739 (2003)
https://doi.org/10.1116/1.1562179
Published: April 2003
View article titled, Physical and electrical properties of low temperature (&lt;100 ° C )   SiO 2 films deposited by electron cyclotron resonance plasmas
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Journal Articles

Fast x-ray spectroscopy study of ethene on clean and SO 4 precovered Pt{111}

Adam F. Lee, Karen Wilson
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 21, 563–568 (2003)
https://doi.org/10.1116/1.1559923
Published: March 2003
View article titled, Fast x-ray spectroscopy study of ethene on clean and SO 4 precovered Pt{111}
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Journal Articles

Adsorption and reaction of ethene on oxide-supported Pd, Rh, and Ir particles

Martin Frank, Marcus Bäumer, Ralf Kühnemuth, Hans-Joachim Freund
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 19, 1497–1501 (2001)
https://doi.org/10.1116/1.1336828
Published: July 2001
View article titled, Adsorption and reaction of ethene on oxide-supported Pd, Rh, and Ir particles
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Journal Articles

Interaction of HCOOH with stoichiometric and reduced SrTiO 3 (100) surfaces

Li-Qiong Wang, K. F. Ferris, G. S. Herman, M. H. Engelhard
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 18, 1893–1899 (2000)
https://doi.org/10.1116/1.582442
Published: July 2000
View article titled, Interaction of HCOOH with stoichiometric and reduced SrTiO 3 (100) surfaces
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Journal Articles

Deposition and characterization of highly oriented Mg 3 (VO 4 ) 2 thin film catalysts

Judith A. Ruffner, Allen G. Sault, Mark A. Rodriguez, Ralph G. Tissot, Jr.
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 18, 1928–1932 (2000)
https://doi.org/10.1116/1.582448
Published: July 2000
View article titled, Deposition and characterization of highly oriented Mg 3 (VO 4 ) 2 thin film catalysts
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Journal Articles

Fluoroether bonding to carbon overcoats

Laura Cornaglia, Andrew J. Gellman
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 15, 2755–2765 (1997)
https://doi.org/10.1116/1.580819
Published: September 1997
View article titled, Fluoroether bonding to carbon overcoats
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