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Journal Articles
J. Vac. Sci. Technol. A 42, 032602 (2024)
Published: April 2024
Journal Articles
J. Vac. Sci. Technol. A 41, 033002 (2023)
Published: March 2023
Journal Articles
J. Vac. Sci. Technol. A 41, 030801 (2023)
Published: March 2023
Journal Articles
Takezo Mawaki, Akinobu Teramoto, Katsutoshi Ishii, Yoshinobu Shiba, Rihito Kuroda, Tomoyuki Suwa, Shuji Azumo, Akira Shimizu, Kota Umezawa, Yasuyuki Shirai, Shigetoshi Sugawa
J. Vac. Sci. Technol. A 40, 053201 (2022)
Published: July 2022
Journal Articles
J. Vac. Sci. Technol. A 40, 023405 (2022)
Published: January 2022
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 40, 013203 (2022)
Published: December 2021
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 39, 063005 (2021)
Published: November 2021
Includes: Supplementary data
Journal Articles
Pauline Dill, Florian Pachel, Christian Militzer, Alexander Held, Georg Puchas, Stefan Knohl, Walter Krenkel, Christoph Tegenkamp, Werner Andreas Goedel
J. Vac. Sci. Technol. A 39, 052406 (2021)
Published: August 2021
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 39, 040401 (2021)
Published: May 2021
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 38, 062401 (2020)
Published: September 2020
Journal Articles
J. Vac. Sci. Technol. A 38, 050803 (2020)
Published: August 2020
Journal Articles
J. Vac. Sci. Technol. A 38, 043007 (2020)
Published: June 2020
Journal Articles
J. Vac. Sci. Technol. A 38, 033404 (2020)
Published: April 2020
Journal Articles
J. Vac. Sci. Technol. A 37, 051003 (2019)
Published: August 2019
Journal Articles
David H. K. Jackson, Michael M. Schwartz, Chilan Ngo, Dustin Facteau, Svitlana Pylypenko, Christopher L. Marshall, Arrelaine A. Dameron
J. Vac. Sci. Technol. A 37, 020919 (2019)
Published: February 2019
Journal Articles
J. Vac. Sci. Technol. A 36, 051506 (2018)
Published: July 2018
Journal Articles
J. Vac. Sci. Technol. A 36, 041404 (2018)
Published: June 2018
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 36, 04F404 (2018)
Published: June 2018
Journal Articles
Sungyool Kwon, Wonjin Ban, Hyuna Lim, Youngsik Seo, Heonyong Park, Eun-Joo Kim, Yong Ki Cho, Sang Gyu Park, Donggeun Jung
J. Vac. Sci. Technol. A 36, 031403 (2018)
Published: May 2018
Journal Articles
J. Vac. Sci. Technol. A 36, 031604 (2018)
Published: March 2018
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