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Journal Articles
I. Campos-Silva, J. Cedeño-Velázquez, A. D. Contla-Pacheco, I. Arzate-Vázquez, L. E. Castillo-Vela, M. Olivares-Luna, J. L. Rosales-Lopez, F. P. Espino-Cortes
J. Vac. Sci. Technol. A 42, 053101 (2024)
Published: July 2024
Journal Articles
J. Vac. Sci. Technol. A 41, 033401 (2023)
Published: March 2023
Journal Articles
SiO2 etching and surface evolution using combined exposure to CF4/O2 remote plasma and electron beam
Kang-Yi Lin, Christian Preischl, Christian Felix Hermanns, Daniel Rhinow, Hans-Michael Solowan, Michael Budach, Klaus Edinger, G. S. Oehrlein
J. Vac. Sci. Technol. A 40, 063004 (2022)
Published: October 2022
Journal Articles
J. Vac. Sci. Technol. A 40, 023206 (2022)
Published: February 2022
Journal Articles
J. Vac. Sci. Technol. A 40, 023205 (2022)
Published: February 2022