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Journal Articles

Molecular thin film chemical modifications under vacuum ultraviolet irradiation

M.-P. Nghiem, Th. Tondu, J.-F. Roussel, D. Faye
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 28, 119–126 (2010)
https://doi.org/10.1116/1.3271134
Published: December 2009
View articletitled, Molecular thin film chemical modifications under vacuum ultraviolet irradiation
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Journal Articles

Benjamin Franklin and electrophotography

L. B. Schein
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 25, 1256–1260 (2007)
https://doi.org/10.1116/1.2715957
Published: July 2007
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Journal Articles

Characteristics of organic film deposited by plasma-enhanced chemical-vapor deposition using a benzocyclobutene resin

Suehiro Sugitani, Hideaki Matsuzaki, Takatomo Enoki
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 22, 2373–2378 (2004)
https://doi.org/10.1116/1.1806438
Published: October 2004
View articletitled, Characteristics of organic film deposited by plasma-enhanced chemical-vapor deposition using a benzocyclobutene resin
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Journal Articles

Review of pumping by thermal molecular pressure

J. P. Hobson, D. B. Salzman
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 18, 1758–1765 (2000)
https://doi.org/10.1116/1.582420
Published: July 2000
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Journal Articles

Effects of silicon–hydrogen bond characteristics on the crystallization of hydrogenated amorphous silicon films prepared by plasma enhanced chemical vapor deposition

Hae-Yeol Kim, Jae-Beom Choi, Jai-Young Lee
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 17, 3240–3245 (1999)
https://doi.org/10.1116/1.582049
Published: November 1999
View articletitled, Effects of silicon–hydrogen bond characteristics on the crystallization of hydrogenated amorphous silicon films prepared by plasma enhanced chemical vapor deposition
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Journal Articles

Clean aluminum oxide formation on surface of aluminum cylinder in an ultraclean gas-sampling system

Yoshio Ishihara, Noriko Itou, Tetsuya Kimijima, Takashi Hirano
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 17, 3139–3143 (1999)
https://doi.org/10.1116/1.582018
Published: September 1999
View articletitled, Clean aluminum oxide formation on surface of aluminum cylinder in an ultraclean gas-sampling system
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Journal Articles

Miniature cryosorption vacuum pump for portable instruments

Harley V. Piltingsrud
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 12, 235–240 (1994)
https://doi.org/10.1116/1.578889
Published: January 1994
View articletitled, Miniature cryosorption vacuum pump for portable instruments
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Journal Articles

Precision parts cleaning using supercritical fluids

Robert Purtell, Laura Rothman, Benjamin Eldridge, Catherine Chess
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 11, 1696–1701 (1993)
https://doi.org/10.1116/1.578481
Published: July 1993
View articletitled, Precision parts cleaning using supercritical fluids
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Journal Articles

A combined instrument for the investigation of catalytic reactions by means of gas chromatography, secondary ion and gas phase mass spectrometry, Auger and photoelectron spectroscopy, and ion scattering spectroscopy

O. Ganschow, R. Jede, L. D. An, E. Manske, J. Neelsen, L. Wiedmann, A. Benninghoven
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 1, 1491–1506 (1983)
https://doi.org/10.1116/1.572175
Published: July 1983
View articletitled, A combined instrument for the investigation of catalytic reactions by means of gas chromatography, secondary ion and gas phase mass spectrometry, Auger and photoelectron spectroscopy, and ion scattering spectroscopy
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