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Journal Articles
Joan Weng, Hyungki Shin, Simon Godin, Mohamed Oudah, Ronny Sutarto, Rebecca Pons, Bruce A. Davidson, Ke Zou
J. Vac. Sci. Technol. A 41, 062703 (2023)
Published: October 2023
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 40, 042405 (2022)
Published: June 2022
Includes: Supplementary data
Journal Articles
Daniela Fontecha, R. Blake Nuwayhid, Alexander C. Kozen, David M. Stewart, Gary W. Rubloff, Keith E. Gregorczyk
J. Vac. Sci. Technol. A 40, 032403 (2022)
Published: April 2022
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 38, 060801 (2020)
Published: September 2020
Journal Articles
J. Vac. Sci. Technol. A 38, 032411 (2020)
Published: April 2020
Journal Articles
Jessica C. Jones, Sathish Rajendran, Aparna Pilli, Veronica Lee, Natasha Chugh, Leela Mohana Reddy Arava, Jeffry A. Kelber
J. Vac. Sci. Technol. A 38, 023201 (2020)
Published: January 2020
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 38, 020801 (2020)
Published: January 2020
Journal Articles
J. Vac. Sci. Technol. A 33, 05E120 (2015)
Published: July 2015
Journal Articles
J. Vac. Sci. Technol. A 33, 041511 (2015)
Published: June 2015
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 31, 01A107 (2013)
Published: October 2012
Journal Articles
J. Vac. Sci. Technol. A 30, 04D110 (2012)
Published: May 2012
Journal Articles
J. Vac. Sci. Technol. A 30, 01A161 (2012)
Published: January 2012
Journal Articles
J. Vac. Sci. Technol. A 30, 01A106 (2012)
Published: September 2011
Journal Articles
J. Vac. Sci. Technol. A 28, 568–572 (2010)
Published: June 2010
Journal Articles
J. Vac. Sci. Technol. A 27, 1126–1134 (2009)
Published: July 2009
Journal Articles
J. Vac. Sci. Technol. A 18, 1755–1757 (2000)
Published: July 2000
Journal Articles
J. Vac. Sci. Technol. A 14, 733–738 (1996)
Published: May 1996
Journal Articles
J. Vac. Sci. Technol. A 14, 34–37 (1996)
Published: January 1996
Journal Articles
J. Vac. Sci. Technol. A 13, 169–177 (1995)
Published: March 1995