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Journal Articles

Effect of background gas composition on the stoichiometry and lithium ion conductivity of pulse laser deposited epitaxial lithium lanthanum tantalate (Li3xLa1/3−xTaO3)

Ian A. Brummel, Chuanzhen Zhou, Jon F. Ihlefeld
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 032705 (2024)
https://doi.org/10.1116/6.0003457
Published: April 2024
View article titled, Effect of background gas composition on the stoichiometry and lithium ion conductivity of pulse laser deposited epitaxial lithium lanthanum tantalate (Li<sub>3<em>x</em></sub>La<sub>1/3−<em>x</em></sub>TaO<sub>3</sub>)
Open the PDF for Effect of background gas composition on the stoichiometry and lithium ion conductivity of pulse laser deposited epitaxial lithium lanthanum tantalate (Li<sub>3<em>x</em></sub>La<sub>1/3−<em>x</em></sub>TaO<sub>3</sub>) in another window
Includes: Supplementary data
Journal Articles

Ordered deficient perovskite La2/3TiO3 films grown via molecular beam epitaxy

Joan Weng, Hyungki Shin, Simon Godin, Mohamed Oudah, Ronny Sutarto, Rebecca Pons, Bruce A. Davidson, Ke Zou
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 062703 (2023)
https://doi.org/10.1116/6.0003091
Published: October 2023
View article titled, Ordered deficient perovskite La<sub>2/3</sub>TiO<sub>3</sub> films grown via molecular beam epitaxy
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Includes: Supplementary data
Journal Articles

High ionic conductivity of ultralow yttria concentration yttria-stabilized zirconia thin films

Wenfei Zhang, Bin Hua, Mengmeng Miao, Ken Cadien, Jing-Li Luo
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 042405 (2022)
https://doi.org/10.1116/6.0001736
Published: June 2022
View article titled, High ionic conductivity of ultralow yttria concentration yttria-stabilized zirconia thin films
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Includes: Supplementary data
Journal Articles

Low temperature plasma-enhanced atomic layer deposition of sodium phosphorus oxynitride with tunable nitrogen content

Editor’s Pick
Daniela Fontecha, R. Blake Nuwayhid, Alexander C. Kozen, David M. Stewart, Gary W. Rubloff, Keith E. Gregorczyk
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 032403 (2022)
https://doi.org/10.1116/6.0001752
Published: April 2022
View article titled, Low temperature plasma-enhanced atomic layer deposition of sodium phosphorus oxynitride with tunable nitrogen content
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Includes: Supplementary data
Journal Articles

Energy-dense Li metal anodes enabled by thin film electrolytes

Marina Maria Ioanniti, Fei Hu, Wyatt E. Tenhaeff
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 38, 060801 (2020)
https://doi.org/10.1116/6.0000430
Published: September 2020
View article titled, Energy-dense Li metal anodes enabled by thin film electrolytes
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Journal Articles

In situ x-ray photoelectron spectroscopy study of lithium carbonate removal from garnet-type solid-state electrolyte using ultra high vacuum techniques

Jessica C. Jones, Sathish Rajendran, Aparna Pilli, Veronica Lee, Natasha Chugh, Leela Mohana Reddy Arava, Jeffry A. Kelber
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 38, 023201 (2020)
https://doi.org/10.1116/1.5128102
Published: January 2020
View article titled, <em>In situ</em> x-ray photoelectron spectroscopy study of lithium carbonate removal from garnet-type solid-state electrolyte using ultra high vacuum techniques
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Includes: Supplementary data
Journal Articles

Chemically vapor deposited polymer nanolayers for rapid and controlled permeation of molecules and ions

Karen K. Gleason
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 38, 020801 (2020)
https://doi.org/10.1116/1.5132851
Published: January 2020
View article titled, Chemically vapor deposited polymer nanolayers for rapid and controlled permeation of molecules and ions
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Journal Articles

Influence of a platinum functional layer on a Ni-Ce0.9Gd0.1O1.95 anode for thin-film solid oxide fuel cells

Sungmin Kang, Ikwhang Chang, Young-Beom Kim, Suk Won Cha
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 33, 05E120 (2015)
https://doi.org/10.1116/1.4927160
Published: July 2015
View article titled, Influence of a platinum functional layer on a Ni-Ce<sub>0.9</sub>Gd<sub>0.1</sub>O<sub>1.95</sub> anode for thin-film solid oxide fuel cells
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Journal Articles

Fabrication of ion conductive tin oxide-phosphate amorphous thin films by atomic layer deposition

Suk Won Park, Dong Young Jang, Jun Woo Kim, Joon Hyung Shim
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 33, 041511 (2015)
https://doi.org/10.1116/1.4922577
Published: June 2015
View article titled, Fabrication of ion conductive tin oxide-phosphate amorphous thin films by atomic layer deposition
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Includes: Supplementary data
Journal Articles

Ion conduction in nanoscale yttria-stabilized zirconia fabricated by atomic layer deposition with various doping rates

Kyung Sik Son, Kiho Bae, Jun Woo Kim, Jeong Suk Ha, Joon Hyung Shim
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 31, 01A107 (2013)
https://doi.org/10.1116/1.4755921
Published: October 2012
View article titled, Ion conduction in nanoscale yttria-stabilized zirconia fabricated by atomic layer deposition with various doping rates
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Journal Articles

Charge transport and relaxation in hydrogenated barium titanate films and their potential for integrated supercapacitors

Fadhel El Kamel, Patrice Gonon
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 30, 04D110 (2012)
https://doi.org/10.1116/1.4714356
Published: May 2012
View article titled, Charge transport and relaxation in hydrogenated barium titanate films and their potential for integrated supercapacitors
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Journal Articles

Fluorine contamination in yttrium-doped barium zirconate film deposited by atomic layer deposition

Jihwan An, Young Beom Kim, Joong Sun Park, Joon Hyung Shim, Turgut M. Gür, Fritz B. Prinz
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 30, 01A161 (2012)
https://doi.org/10.1116/1.3670750
Published: January 2012
View article titled, Fluorine contamination in yttrium-doped barium zirconate film deposited by atomic layer deposition
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Journal Articles

Study of amorphous lithium silicate thin films grown by atomic layer deposition

Jani Hämäläinen, Frans Munnik, Timo Hatanpää, Jani Holopainen, Mikko Ritala, Markku Leskelä
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 30, 01A106 (2012)
https://doi.org/10.1116/1.3643349
Published: September 2011
View article titled, Study of amorphous lithium silicate thin films grown by atomic layer deposition
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Journal Articles

Lithium phosphorus oxynitride solid-state thin-film electrolyte deposited and modified by bias sputtering and low temperature annealing

K.-F. Chiu, C. C. Chen, K. M. Lin, C. C. Lo, H. C. Lin, W.-H. Ho, C. S. Jiang
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 28, 568–572 (2010)
https://doi.org/10.1116/1.3435330
Published: June 2010
View article titled, Lithium phosphorus oxynitride solid-state thin-film electrolyte deposited and modified by bias sputtering and low temperature annealing
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Journal Articles

Interface-mediated ultrafast carrier conduction in oxide thin films and superlattices for energy

Shriram Ramanathan
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 27, 1126–1134 (2009)
https://doi.org/10.1116/1.3186616
Published: July 2009
View article titled, Interface-mediated ultrafast carrier conduction in oxide thin films and superlattices for energy
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Journal Articles

Fundamental functions of a new type of leak detector using oxygen-ion conductor

K. Tatenuma, T. Noguchi, K. Uchida, H. Saeki, A. Ando, T. Momose
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 18, 1755–1757 (2000)
https://doi.org/10.1116/1.582419
Published: July 2000
View article titled, Fundamental functions of a new type of leak detector using oxygen-ion conductor
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Journal Articles

High rate vacuum deposition of polymer electrolytes

J. D. Affinito, M. E. Gross, C. A. Coronado, G. C. Dunham, P. M. Martin
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 14, 733–738 (1996)
https://doi.org/10.1116/1.580380
Published: May 1996
View article titled, High rate vacuum deposition of polymer electrolytes
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Journal Articles

Enhanced deposition rate of lithium phosphorus oxynitride thin films by sputtering of Li3PO4 in N2–He gas mixtures

J. B. Bates, Xiaohua Yu
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 14, 34–37 (1996)
https://doi.org/10.1116/1.579876
Published: January 1996
View article titled, Enhanced deposition rate of lithium phosphorus oxynitride thin films by sputtering of Li<sub>3</sub>PO<sub>4</sub> in N<sub>2</sub>–He gas mixtures
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Journal Articles

Field desorption of lithium fluoride

A. Stintz, J. A. Panitz
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 13, 169–177 (1995)
https://doi.org/10.1116/1.579394
Published: March 1995
View article titled, Field desorption of lithium fluoride
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