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Journal Articles

Maghemite thin films prepared using atmospheric-pressure plasma annealing

Hong-Ying Chen, Shun-Hsiang Yang

J. Vac. Sci. Technol. A 36, 04F405 (2018)

https://doi.org/10.1116/1.5023144

Published: June 2018

View article titled, Maghemite thin films prepared using atmospheric-pressure plasma annealing

Journal Articles

RBS-channeling study of radiation damage in Ar⁺ implanted CuInSe₂ crystals

Michael V. Yakushev, Vladimir A. Volkov, Niyazi N. Mursakulov, Chimnaz E. Sabzaliyeva, Robert W. Martin

J. Vac. Sci. Technol. A 34, 051203 (2016)

https://doi.org/10.1116/1.4961882

Published: August 2016

View article titled, RBS-channeling study of radiation damage in Ar+ implanted CuInSe2 crystals

Journal Articles

EXAFS investigation of UF₄

J. G. Tobin, C. H. Booth, W. Siekhaus, D. K. Shuh

J. Vac. Sci. Technol. A 33, 033001 (2015)

https://doi.org/10.1116/1.4915893

Published: March 2015

View article titled, EXAFS investigation of UF4

Journal Articles

Self limiting deposition of pyrite absorbers by pulsed PECVD

Christopher D. Sentman, Maria O'Brien, Colin A. Wolden

J. Vac. Sci. Technol. A 32, 021201 (2014)

https://doi.org/10.1116/1.4828818

Published: November 2013

View article titled, Self limiting deposition of pyrite absorbers by pulsed PECVD

Journal Articles

Theoretical investigation of cubic B1-like and corundum (Cr₁₋_xAl_x)₂O₃ solid solutions

Björn Alling, Ali Khatibi, Sergei I. Simak, Per Eklund, Lars Hultman

J. Vac. Sci. Technol. A 31, 030602 (2013)

https://doi.org/10.1116/1.4795392

Published: March 2013

View article titled, Theoretical investigation of cubic B1-like and corundum (Cr1−xAlx)2O3 solid solutions

Journal Articles

Magnetron-sputter deposition of Fe₃S₄ thin films and their conversion into pyrite (FeS₂) by thermal sulfurization for photovoltaic applications

Hongfei Liu, Dongzhi Chi

J. Vac. Sci. Technol. A 30, 04D102 (2012)

https://doi.org/10.1116/1.3699022

Published: April 2012

View article titled, Magnetron-sputter deposition of Fe3S4 thin films and their conversion into pyrite (FeS2) by thermal sulfurization for photovoltaic applications

Journal Articles

Plasma-enhanced and thermal atomic layer deposition of Al₂O₃ using dimethylaluminum isopropoxide, [Al(CH₃)₂(μ-OⁱPr)]₂, as an alternative aluminum precursor

Stephen E. Potts, Gijs Dingemans, Christophe Lachaud, W. M. M. Kessels

J. Vac. Sci. Technol. A 30, 021505 (2012)

https://doi.org/10.1116/1.3683057

Published: February 2012

View article titled, Plasma-enhanced and thermal atomic layer deposition of Al2O3 using dimethylaluminum isopropoxide, [Al(CH3)2(μ-OiPr)]2, as an alternative aluminum precursor

Journal Articles

Experimental evaluation of an adaptive Joule–Thomson cooling system including silicon-microfabricated heat exchanger and microvalve components

Weibin Zhu, Jong M. Park, Michael J. White, Gregory F. Nellis, Yogesh B. Gianchandani

J. Vac. Sci. Technol. A 29, 021005 (2011)

https://doi.org/10.1116/1.3545917

Published: January 2011

View article titled, Experimental evaluation of an adaptive Joule–Thomson cooling system including silicon-microfabricated heat exchanger and microvalve components

Journal Articles

Formation of pyrite ( FeS 2 ) thin films by thermal sulfurization of dc magnetron sputtered iron

R. J. Soukup, P. Prabukanthan, N. J. Ianno, A. Sarkar, C. A. Kamler, D. G. Sekora

J. Vac. Sci. Technol. A 29, 011001 (2011)

https://doi.org/10.1116/1.3517739

Published: January 2011

View article titled, Formation of pyrite ( FeS 2 ) thin films by thermal sulfurization of dc magnetron sputtered iron

Journal Articles

Synthesis and structural characterization of Fe–O nanonetworks

G. Carbajal-Franco, C. V. Ramana

J. Vac. Sci. Technol. A 28, 984–988 (2010)

https://doi.org/10.1116/1.3336680

Published: June 2010

View article titled, Synthesis and structural characterization of Fe–O nanonetworks

Journal Articles

Surface roughening of silicon, thermal silicon dioxide, and low- k dielectric coral films in argon plasma

Yunpeng Yin, Herbert H. Sawin

J. Vac. Sci. Technol. A 26, 151–160 (2008)

https://doi.org/10.1116/1.2821747

Published: January 2008

View article titled, Surface roughening of silicon, thermal silicon dioxide, and low- k dielectric coral films in argon plasma

Journal Articles

Angular etching yields of polysilicon and dielectric materials in Cl 2 ∕ Ar and fluorocarbon plasmas

Yunpeng Yin, Herbert H. Sawin

J. Vac. Sci. Technol. A 26, 161–173 (2008)

https://doi.org/10.1116/1.2821750

Published: January 2008

View article titled, Angular etching yields of polysilicon and dielectric materials in Cl 2 ∕ Ar and fluorocarbon plasmas

Journal Articles

Impact of etching kinetics on the roughening of thermal Si O 2 and low- k dielectric coral films in fluorocarbon plasmas

Yunpeng Yin, Herbert H. Sawin

J. Vac. Sci. Technol. A 25, 802–811 (2007)

https://doi.org/10.1116/1.2748797

Published: June 2007

View article titled, Impact of etching kinetics on the roughening of thermal Si O 2 and low- k dielectric coral films in fluorocarbon plasmas

Journal Articles

New design for indentation measurement using fiber Bragg grating

Jun Chen, Mojtaba Kahrizi

J. Vac. Sci. Technol. A 24, 2159–2163 (2006)

https://doi.org/10.1116/1.2360977

Published: October 2006

View article titled, New design for indentation measurement using fiber Bragg grating

Journal Articles

Etching of organosilicate glass low-k dielectric films in halogen plasmas

Steven A. Vitale, Herbert H. Sawin

J. Vac. Sci. Technol. A 20, 651–660 (2002)

https://doi.org/10.1116/1.1460891

Published: May 2002

View article titled, Etching of organosilicate glass low-k dielectric films in halogen plasmas

Journal Articles

Substrate temperature studies of SrBi 2 ( Ta 1−x Nb x ) 2 O 9 grown by pulsed laser ablation deposition

S. T. Tay, C. H. A. Huan, A. T. S. Wee, R. Liu, W. C. Goh, C. K. Ong, G. S. Chen

J. Vac. Sci. Technol. A 20, 125–131 (2002)

https://doi.org/10.1116/1.1426364

Published: January 2002

View article titled, Substrate temperature studies of SrBi 2 ( Ta 1−x Nb x ) 2 O 9 grown by pulsed laser ablation deposition

Journal Articles

Tribocharging in electrostatic beneficiation of coal: Effects of surface composition on work function as measured by x-ray photoelectron spectroscopy and ultraviolet photoelectron spectroscopy in air

S. Trigwell, M. K. Mazumder, R. Pellissier

J. Vac. Sci. Technol. A 19, 1454–1459 (2001)

https://doi.org/10.1116/1.1379320

Published: July 2001

View article titled, Tribocharging in electrostatic beneficiation of coal: Effects of surface composition on work function as measured by x-ray photoelectron spectroscopy and ultraviolet photoelectron spectroscopy in air

Journal Articles

Iron oxide thin films prepared by ion beam induced chemical vapor deposition: Structural characterization by infrared spectroscopy

F. Yubero, M. Ocaña, A. Justo, L. Contreras, A. R. González-Elipe

J. Vac. Sci. Technol. A 18, 2244–2248 (2000)

https://doi.org/10.1116/1.1286198

Published: September 2000

View article titled, Iron oxide thin films prepared by ion beam induced chemical vapor deposition: Structural characterization by infrared spectroscopy

Journal Articles

Characterization of zirconia coatings deposited by inductively coupled plasma assisted chemical vapor deposition

P. Colpo, G. Ceccone, P. Sauvageot, M. Baker, F. Rossi

J. Vac. Sci. Technol. A 18, 1096–1101 (2000)

https://doi.org/10.1116/1.582306

Published: July 2000

View article titled, Characterization of zirconia coatings deposited by inductively coupled plasma assisted chemical vapor deposition

Journal Articles

X-ray photoelectron spectroscopy study of bombardment-induced compositional changes in ZrO 2 , SiO 2 , and ZrSiO 4

Fabio Iacona, Roger Kelly, Giovanni Marletta

J. Vac. Sci. Technol. A 17, 2771–2778 (1999)

https://doi.org/10.1116/1.581943

Published: September 1999

View article titled, X-ray photoelectron spectroscopy study of bombardment-induced compositional changes in ZrO 2 , SiO 2 , and ZrSiO 4

NARROW

Topics

Maghemite thin films prepared using atmospheric-pressure plasma annealing

RBS-channeling study of radiation damage in Ar⁺ implanted CuInSe₂ crystals

EXAFS investigation of UF₄

Self limiting deposition of pyrite absorbers by pulsed PECVD

Theoretical investigation of cubic B1-like and corundum (Cr₁₋_xAl_x)₂O₃ solid solutions

Magnetron-sputter deposition of Fe₃S₄ thin films and their conversion into pyrite (FeS₂) by thermal sulfurization for photovoltaic applications

Plasma-enhanced and thermal atomic layer deposition of Al₂O₃ using dimethylaluminum isopropoxide, [Al(CH₃)₂(μ-OⁱPr)]₂, as an alternative aluminum precursor

Experimental evaluation of an adaptive Joule–Thomson cooling system including silicon-microfabricated heat exchanger and microvalve components

Formation of pyrite ( FeS 2 ) thin films by thermal sulfurization of dc magnetron sputtered iron

Synthesis and structural characterization of Fe–O nanonetworks

Surface roughening of silicon, thermal silicon dioxide, and low- k dielectric coral films in argon plasma

Angular etching yields of polysilicon and dielectric materials in Cl 2 ∕ Ar and fluorocarbon plasmas

Impact of etching kinetics on the roughening of thermal Si O 2 and low- k dielectric coral films in fluorocarbon plasmas

New design for indentation measurement using fiber Bragg grating

Etching of organosilicate glass low-k dielectric films in halogen plasmas

Substrate temperature studies of SrBi 2 ( Ta 1−x Nb x ) 2 O 9 grown by pulsed laser ablation deposition

Tribocharging in electrostatic beneficiation of coal: Effects of surface composition on work function as measured by x-ray photoelectron spectroscopy and ultraviolet photoelectron spectroscopy in air

Iron oxide thin films prepared by ion beam induced chemical vapor deposition: Structural characterization by infrared spectroscopy

Characterization of zirconia coatings deposited by inductively coupled plasma assisted chemical vapor deposition

X-ray photoelectron spectroscopy study of bombardment-induced compositional changes in ZrO 2 , SiO 2 , and ZrSiO 4

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