Skip Nav Destination
Update search
Filter
All
- All
- Title
- Author
- Author Affiliations
- Full Text
- Abstract
- Keyword
- DOI
- ISBN
- EISBN
- ISSN
- EISSN
- Issue
- Volume
- References
Filter
All
- All
- Title
- Author
- Author Affiliations
- Full Text
- Abstract
- Keyword
- DOI
- ISBN
- EISBN
- ISSN
- EISSN
- Issue
- Volume
- References
Filter
All
- All
- Title
- Author
- Author Affiliations
- Full Text
- Abstract
- Keyword
- DOI
- ISBN
- EISBN
- ISSN
- EISSN
- Issue
- Volume
- References
Filter
All
- All
- Title
- Author
- Author Affiliations
- Full Text
- Abstract
- Keyword
- DOI
- ISBN
- EISBN
- ISSN
- EISSN
- Issue
- Volume
- References
Filter
All
- All
- Title
- Author
- Author Affiliations
- Full Text
- Abstract
- Keyword
- DOI
- ISBN
- EISBN
- ISSN
- EISSN
- Issue
- Volume
- References
Filter
All
- All
- Title
- Author
- Author Affiliations
- Full Text
- Abstract
- Keyword
- DOI
- ISBN
- EISBN
- ISSN
- EISSN
- Issue
- Volume
- References
NARROW
Format
Collections
Topics
Subjects
Journal
Article Type
Issue Section
Date
Availability
Journal Articles
J. Vac. Sci. Technol. A 42, 042801 (2024)
Published: May 2024
Journal Articles
J. Vac. Sci. Technol. A 42, 032705 (2024)
Published: April 2024
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 42, 023110 (2024)
Published: February 2024
Journal Articles
J. Vac. Sci. Technol. A 42, 013101 (2024)
Published: December 2023
Journal Articles
Joan Weng, Hyungki Shin, Simon Godin, Mohamed Oudah, Ronny Sutarto, Rebecca Pons, Bruce A. Davidson, Ke Zou
J. Vac. Sci. Technol. A 41, 062703 (2023)
Published: October 2023
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 41, 053413 (2023)
Published: August 2023
Journal Articles
Teo Lombardo, Felix Walther, Christine Kern, Yannik Moryson, Timo Weintraut, Anja Henss, Marcus Rohnke
J. Vac. Sci. Technol. A 41, 053207 (2023)
Published: August 2023
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 41, 043414 (2023)
Published: June 2023
Journal Articles
J. Vac. Sci. Technol. A 40, 053005 (2022)
Published: August 2022
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 40, 042405 (2022)
Published: June 2022
Includes: Supplementary data
Journal Articles
Yougang Mao, Naba K. Karan, Ravi Kumar, Russell Hopson, Pradeep R. Guduru, Brian W. Sheldon, Li-Qiong Wang
J. Vac. Sci. Technol. A 40, 043203 (2022)
Published: May 2022
Journal Articles
Florian Buchner, Katrin Forster-Tonigold, Tim Bolter, Alexander Rampf, Jens Klein, Axel Groß, R. Jürgen Behm
J. Vac. Sci. Technol. A 40, 023204 (2022)
Published: February 2022
Includes: Supplementary data
Journal Articles
Sungun Wi, Vaithiyalingam Shutthanandan, Bhuvaneswari M. Sivakumar, Suntharampillai Thevuthasan, Venkateshkumar Prabhakaran, Swadipta Roy, Ajay Karakoti, Vijayakumar Murugesan
J. Vac. Sci. Technol. A 40, 010808 (2022)
Published: January 2022
Journal Articles
J. Vac. Sci. Technol. A 40, 010801 (2022)
Published: November 2021
Journal Articles
J. Vac. Sci. Technol. A 39, 023410 (2021)
Published: February 2021
Includes: Supplementary data
Journal Articles
Valentina Wieser, Pierluigi Bilotto, Ulrich Ramach, Hui Yuan, Kai Schwenzfeier, Hsiu-Wei Cheng, Markus Valtiner
J. Vac. Sci. Technol. A 39, 023201 (2021)
Published: January 2021
Includes: Supplementary data
Journal Articles
Jin-Myoung Lim, Norman S. Luu, Kyu-Young Park, Mark T. Z. Tan, Sungkyu Kim, Julia R. Downing, Kai He, Vinayak P. Dravid, Mark C. Hersam
J. Vac. Sci. Technol. A 38, 063210 (2020)
Published: November 2020
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 38, 060801 (2020)
Published: September 2020
Journal Articles
J. Vac. Sci. Technol. A 38, 050401 (2020)
Published: August 2020
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 38, 040805 (2020)
Published: June 2020
1