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Journal Articles

Arsenic-flux dependence of surface morphology in InAs homoepitaxy

Akihiro Ohtake, Takuya Kawazu, Takaaki Mano
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 062702 (2024)
https://doi.org/10.1116/6.0003957
Published: September 2024
View article titled, Arsenic-flux dependence of surface morphology in InAs homoepitaxy
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Journal Articles

First-principles calculations on adsorption-diffusion behavior of transition layer Ti atoms on the Fe surface

Haiwei Han, Chunyan Chen, Shunuo Bian, Lihua Yu, Junhua Xu, Xinmeng Wu, Yaohong Jiang, Lijun Zhao
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 053406 (2024)
https://doi.org/10.1116/6.0003808
Published: August 2024
View article titled, First-principles calculations on adsorption-diffusion behavior of transition layer Ti atoms on the Fe surface
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Journal Articles

Surface treatment of TaN for sub-2 nm, smooth, and conducting atomic layer deposition Ru films

Editor’s Pick
Corbin Feit, Udit Kumar, Md. Rafiqul Islam, Luis Tomar, S. Novia Berriel, John T. Gaskins, Patrick E. Hopkins, Sudipta Seal, Parag Banerjee
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 032407 (2024)
https://doi.org/10.1116/6.0003440
Published: April 2024
View article titled, Surface treatment of TaN for sub-2 nm, smooth, and conducting atomic layer deposition Ru films
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Includes: Supplementary data
Journal Articles

Effect of FeCrAl sublayer composition on the microstructure and corrosion resistance of FeCrAl/yttria-stabilized zirconia composite coatings

Changda Zhu, Xi Qiu, Yuanming Li, Wei Zhang, Jian Yang, Yilong Zhong, Jiuguo Deng, Mingyang Zhou, Ning Liu, Jijun Yang
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 023203 (2024)
https://doi.org/10.1116/6.0003114
Published: February 2024
View article titled, Effect of FeCrAl sublayer composition on the microstructure and corrosion resistance of FeCrAl/yttria-stabilized zirconia composite coatings
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Journal Articles

Exploring the thermal behavior and diffusive functionality of structural defects and phase boundaries in near-stoichiometric chromium diborides by in situ scanning transmission electron microscopy

Featured
Per O. Å. Persson, Johanna Rosen, Ivan Petrov, Justinas Palisaitis
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 020401 (2024)
https://doi.org/10.1116/6.0003389
Published: January 2024
View article titled, Exploring the thermal behavior and diffusive functionality of structural defects and phase boundaries in near-stoichiometric chromium diborides by <em>in situ</em> scanning transmission electron microscopy
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Includes: Supplementary data
Journal Articles

Method for extracting the intrinsic diffusion coefficient from grain boundary diffusion depth profile

Songyou Lian, Antonie J. Fourie, Jiangyong Wang, Hendrik C. Swart, Jacobus Johannes Terblans
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 033401 (2023)
https://doi.org/10.1116/6.0002400
Published: March 2023
View article titled, Method for extracting the intrinsic diffusion coefficient from grain boundary diffusion depth profile
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Journal Articles

Atomic layer deposition of MoNx thin films using a newly synthesized liquid Mo precursor

Byunguk Kim, Sangmin Lee, Taesung Kang, Sunghoon Kim, Sangman Koo, Hyeongtag Jeon
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 062411 (2022)
https://doi.org/10.1116/6.0002154
Published: November 2022
View article titled, Atomic layer deposition of MoN<sub>x</sub> thin films using a newly synthesized liquid Mo precursor
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Journal Articles

Sulfur-enhanced dynamics of coinage metal(111) surfaces: Step edges versus terraces as locations for metal-sulfur complex formation

Featured
Da-Jiang Liu, James W. Evans
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 023205 (2022)
https://doi.org/10.1116/6.0001408
Published: February 2022
View article titled, Sulfur-enhanced dynamics of coinage metal(111) surfaces: Step edges versus terraces as locations for metal-sulfur complex formation
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Journal Articles

Thermodynamics and kinetics of H adsorption and intercalation for graphene on 6H-SiC(0001) from first-principles calculations

Yong Han, James W. Evans, Michael C. Tringides
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 012202 (2022)
https://doi.org/10.1116/6.0001343
Published: December 2021
View article titled, Thermodynamics and kinetics of H adsorption and intercalation for graphene on 6<em>H</em>-SiC(0001) from first-principles calculations
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Includes: Supplementary data
Journal Articles

Stoichiometry tuning of TaN films through ion treatment: Molecular dynamics study

Jaipal Methary, Rajesh Sathiyanarayanan, Rui Li, Phillip J. Stout
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 39, 062601 (2021)
https://doi.org/10.1116/6.0001251
Published: September 2021
View article titled, Stoichiometry tuning of TaN films through ion treatment: Molecular dynamics study
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Journal Articles

Substitutional Co-mediated island-edge decoration in Co/Cu(001): A kinetic Monte Carlo study

Marvin A. Albao
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 39, 063201 (2021)
https://doi.org/10.1116/6.0001323
Published: September 2021
View article titled, Substitutional Co-mediated island-edge decoration in Co/Cu(001): A kinetic Monte Carlo study
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Journal Articles

Role of high aspect-ratio thin-film metal deposition in Cu back-end-of-line technology

Andrew Simon, Oscar van der Straten, Nicholas A. Lanzillo, Chih-Chao Yang, Takeshi Nogami, Daniel C. Edelstein
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 38, 053402 (2020)
https://doi.org/10.1116/6.0000170
Published: July 2020
View article titled, Role of high aspect-ratio thin-film metal deposition in Cu back-end-of-line technology
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Journal Articles

Thin film deposition research and its impact on microelectronics scaling

Cyril Cabral, Jr., Christian Lavoie, Conal Murray, Adam Pyzyna, Ken Rodbell
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 38, 040803 (2020)
https://doi.org/10.1116/6.0000230
Published: June 2020
View article titled, Thin film deposition research and its impact on microelectronics scaling
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Journal Articles

Direct plasma-enhanced atomic layer deposition of aluminum nitride for water permeation barriers

David Dustin Fischer, Martin Knaut, Johanna Reif, Frederik Nehm, Matthias Albert, Johann W. Bartha
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 38, 022419 (2020)
https://doi.org/10.1116/1.5131087
Published: February 2020
View article titled, Direct plasma-enhanced atomic layer deposition of aluminum nitride for water permeation barriers
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Includes: Supplementary data
Journal Articles

Influence of the microstructure on the diffusion barrier performance of Nb-based coatings for cyclotron targets

Vincenzo Palmieri, Oscar Azzolini, Edoardo Bemporad, Daniele De Felicis, Richard R. Johnson, Marco Renzelli, Hanna Skliarova
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 37, 051510 (2019)
https://doi.org/10.1116/1.5098168
Published: August 2019
View article titled, Influence of the microstructure on the diffusion barrier performance of Nb-based coatings for cyclotron targets
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Journal Articles

Study on the mechanisms of formation of aluminized diffusion coatings on a Ni-base superalloy using different pack aluminization procedures

Ederson Pauletti, Ana Sofia Clímaco Monteiro d'Oliveira
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 36, 041504 (2018)
https://doi.org/10.1116/1.5026272
Published: June 2018
View article titled, Study on the mechanisms of formation of aluminized diffusion coatings on a Ni-base superalloy using different pack aluminization procedures
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Journal Articles

Atmospheric pressure plasma enhanced spatial atomic layer deposition of SnOx as conductive gas diffusion barrier

Lukas Hoffmann, Detlef Theirich, Daniel Schlamm, Tim Hasselmann, Sven Pack, Kai Oliver Brinkmann, Detlef Rogalla, Sven Peters, André Räupke, Hassan Gargouri, Thomas Riedl
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 36, 01A112 (2018)
https://doi.org/10.1116/1.5006781
Published: December 2017
View article titled, Atmospheric pressure plasma enhanced spatial atomic layer deposition of SnO<sub>x</sub> as conductive gas diffusion barrier
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Includes: Supplementary data
Journal Articles

Thermally activated diffusion of copper into amorphous carbon

David Appy, Mark Wallingford, Dapeng Jing, Ryan Ott, Michael C. Tringides, Gunther Richter, Patricia A. Thiel
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 35, 061401 (2017)
https://doi.org/10.1116/1.4991519
Published: July 2017
View article titled, Thermally activated diffusion of copper into amorphous carbon
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Journal Articles

Chemical composition and properties of MoAl thin films deposited by sputtering from MoAl compound targets

Roland Lorenz, Michael O'Sullivan, Dietmar Sprenger, Bernhard Lang, Christian Mitterer
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 35, 041504 (2017)
https://doi.org/10.1116/1.4983689
Published: May 2017
View article titled, Chemical composition and properties of MoAl thin films deposited by sputtering from MoAl compound targets
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Journal Articles

Investigations of medium-temperature heat treatments to achieve low outgassing rates in stainless steel ultrahigh vacuum chambers

Makfir Sefa, James A. Fedchak, Julia Scherschligt
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 35, 041601 (2017)
https://doi.org/10.1116/1.4983211
Published: May 2017
View article titled, Investigations of medium-temperature heat treatments to achieve low outgassing rates in stainless steel ultrahigh vacuum chambers
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