Skip Nav Destination
Update search
Filter
All
- All
- Title
- Author
- Author Affiliations
- Full Text
- Abstract
- Keyword
- DOI
- ISBN
- EISBN
- ISSN
- EISSN
- Issue
- Volume
- References
Filter
All
- All
- Title
- Author
- Author Affiliations
- Full Text
- Abstract
- Keyword
- DOI
- ISBN
- EISBN
- ISSN
- EISSN
- Issue
- Volume
- References
Filter
All
- All
- Title
- Author
- Author Affiliations
- Full Text
- Abstract
- Keyword
- DOI
- ISBN
- EISBN
- ISSN
- EISSN
- Issue
- Volume
- References
Filter
All
- All
- Title
- Author
- Author Affiliations
- Full Text
- Abstract
- Keyword
- DOI
- ISBN
- EISBN
- ISSN
- EISSN
- Issue
- Volume
- References
Filter
All
- All
- Title
- Author
- Author Affiliations
- Full Text
- Abstract
- Keyword
- DOI
- ISBN
- EISBN
- ISSN
- EISSN
- Issue
- Volume
- References
Filter
All
- All
- Title
- Author
- Author Affiliations
- Full Text
- Abstract
- Keyword
- DOI
- ISBN
- EISBN
- ISSN
- EISSN
- Issue
- Volume
- References
NARROW
Format
Collections
Topics
Subjects
Journal
Article Type
Issue Section
Date
Availability
Journal Articles
I. Campos-Silva, L. E. Castillo-Vela, I. Mejía-Caballero, J. L. Rosales-Lopez, M. Olivares-Luna, K. D. Chaparro-Pérez, F. P. Espino-Cortes, J. M. González-Carmona
J. Vac. Sci. Technol. A 41, 063115 (2023)
Published: November 2023
Journal Articles
J. Vac. Sci. Technol. A 41, 063414 (2023)
Published: November 2023
Journal Articles
J. Vac. Sci. Technol. A 41, 053103 (2023)
Published: July 2023
Journal Articles
J. Vac. Sci. Technol. A 41, 043104 (2023)
Published: June 2023
Journal Articles
J. Vac. Sci. Technol. A 41, 043103 (2023)
Published: May 2023
Journal Articles
J. Vac. Sci. Technol. A 41, 033203 (2023)
Published: March 2023
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 41, 033401 (2023)
Published: March 2023
Journal Articles
J. Vac. Sci. Technol. A 41, 022203 (2023)
Published: February 2023
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 40, 062411 (2022)
Published: November 2022
Journal Articles
J. Vac. Sci. Technol. A 40, 060401 (2022)
Published: November 2022
Includes: Supplementary data
Journal Articles
SiO2 etching and surface evolution using combined exposure to CF4/O2 remote plasma and electron beam
Kang-Yi Lin, Christian Preischl, Christian Felix Hermanns, Daniel Rhinow, Hans-Michael Solowan, Michael Budach, Klaus Edinger, G. S. Oehrlein
J. Vac. Sci. Technol. A 40, 063004 (2022)
Published: October 2022
Journal Articles
Takeru Saito, Kazuki Yoshida, Kentaro Saito, Masanori Miura, Kensaku Kanomata, Bashir Ahmmad, Shigeru Kubota, Fumihiko Hirose
J. Vac. Sci. Technol. A 40, 042406 (2022)
Published: June 2022
Journal Articles
J. Vac. Sci. Technol. A 40, 023206 (2022)
Published: February 2022
Journal Articles
J. Vac. Sci. Technol. A 40, 023205 (2022)
Published: February 2022
Journal Articles
J. Vac. Sci. Technol. A 40, 010805 (2022)
Published: December 2021
Journal Articles
J. Vac. Sci. Technol. A 40, 012202 (2022)
Published: December 2021
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 39, 060402 (2021)
Published: September 2021
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 39, 062601 (2021)
Published: September 2021
Journal Articles
J. Vac. Sci. Technol. A 39, 063201 (2021)
Published: September 2021
Journal Articles
J. Vac. Sci. Technol. A 39, 043409 (2021)
Published: May 2021
Includes: Supplementary data
1