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Journal Articles

Selective molecular gas phase etching in layered high aspect-ratio nanostructures for semiconductor processing. II. Experiments and model validation

Editor’s Pick
Zach Zajo, David S. L. Mui, Ji Zhu, Yusef Shari’ati, Mark Kawaguchi, Eric S. G. Shaqfeh
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 013007 (2025)
https://doi.org/10.1116/6.0004156
Published: January 2025
View article titled, Selective molecular gas phase etching in layered high aspect-ratio nanostructures for semiconductor processing. II. Experiments and model validation
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Journal Articles

Lattice kinetic Monte Carlo method on fractal growth of transition metal dichalcogenides

Xuejiang Chen, Yishan Lin, Wensen Ai, Xinyao Zhang
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 012202 (2025)
https://doi.org/10.1116/6.0004104
Published: January 2025
View article titled, Lattice kinetic Monte Carlo method on fractal growth of transition metal dichalcogenides
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Journal Articles

Arsenic-flux dependence of surface morphology in InAs homoepitaxy

Akihiro Ohtake, Takuya Kawazu, Takaaki Mano
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 062702 (2024)
https://doi.org/10.1116/6.0003957
Published: September 2024
View article titled, Arsenic-flux dependence of surface morphology in InAs homoepitaxy
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Journal Articles

Fracture strain improving via structural austenitic stainless steel-coated 22MnB5 plates

Jiashun Lv, Pengchao Yu, Maoqing Tian, Zhuo Zhao, Yanwen Zhou
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 053108 (2024)
https://doi.org/10.1116/6.0003742
Published: September 2024
View article titled, Fracture strain improving via structural austenitic stainless steel-coated 22MnB5 plates
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Journal Articles

First-principles calculations on adsorption-diffusion behavior of transition layer Ti atoms on the Fe surface

Haiwei Han, Chunyan Chen, Shunuo Bian, Lihua Yu, Junhua Xu, Xinmeng Wu, Yaohong Jiang, Lijun Zhao
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 053406 (2024)
https://doi.org/10.1116/6.0003808
Published: August 2024
View article titled, First-principles calculations on adsorption-diffusion behavior of transition layer Ti atoms on the Fe surface
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Journal Articles

Microstructural and kinetics analysis of FeB–Fe2B layer grown by pulsed-DC powder-pack boriding on AISI 316 L steel

I. Campos-Silva, J. Cedeño-Velázquez, A. D. Contla-Pacheco, I. Arzate-Vázquez, L. E. Castillo-Vela, M. Olivares-Luna, J. L. Rosales-Lopez, F. P. Espino-Cortes
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 053101 (2024)
https://doi.org/10.1116/6.0003774
Published: July 2024
View article titled, Microstructural and kinetics analysis of FeB–Fe<sub>2</sub>B layer grown by pulsed-DC powder-pack boriding on AISI 316 L steel
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Journal Articles

Surface treatment of TaN for sub-2 nm, smooth, and conducting atomic layer deposition Ru films

Editor’s Pick
Corbin Feit, Udit Kumar, Md. Rafiqul Islam, Luis Tomar, S. Novia Berriel, John T. Gaskins, Patrick E. Hopkins, Sudipta Seal, Parag Banerjee
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 032407 (2024)
https://doi.org/10.1116/6.0003440
Published: April 2024
View article titled, Surface treatment of TaN for sub-2 nm, smooth, and conducting atomic layer deposition Ru films
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Includes: Supplementary data
Journal Articles

Effect of FeCrAl sublayer composition on the microstructure and corrosion resistance of FeCrAl/yttria-stabilized zirconia composite coatings

Changda Zhu, Xi Qiu, Yuanming Li, Wei Zhang, Jian Yang, Yilong Zhong, Jiuguo Deng, Mingyang Zhou, Ning Liu, Jijun Yang
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 023203 (2024)
https://doi.org/10.1116/6.0003114
Published: February 2024
View article titled, Effect of FeCrAl sublayer composition on the microstructure and corrosion resistance of FeCrAl/yttria-stabilized zirconia composite coatings
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Journal Articles

Kinetic Monte Carlo study on the effect of growth conditions on the epitaxial growth of 3C–SiC (0001) vicinal surface

Xuejiang Chen, Xinyao Zhang, Wensen Ai
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 022703 (2024)
https://doi.org/10.1116/6.0003144
Published: January 2024
View article titled, Kinetic Monte Carlo study on the effect of growth conditions on the epitaxial growth of 3C–SiC (0001) vicinal surface
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Journal Articles

Exploring the thermal behavior and diffusive functionality of structural defects and phase boundaries in near-stoichiometric chromium diborides by in situ scanning transmission electron microscopy

Featured
Per O. Å. Persson, Johanna Rosen, Ivan Petrov, Justinas Palisaitis
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 020401 (2024)
https://doi.org/10.1116/6.0003389
Published: January 2024
View article titled, Exploring the thermal behavior and diffusive functionality of structural defects and phase boundaries in near-stoichiometric chromium diborides by <em>in situ</em> scanning transmission electron microscopy
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Includes: Supplementary data
Journal Articles

Impact of the DC intensity and electrode distance on pulsed-DC powder-pack boride layer growth kinetics

I. Campos-Silva, L. E. Castillo-Vela, I. Mejía-Caballero, J. L. Rosales-Lopez, M. Olivares-Luna, K. D. Chaparro-Pérez, F. P. Espino-Cortes, J. M. González-Carmona
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 063115 (2023)
https://doi.org/10.1116/6.0003167
Published: November 2023
View article titled, Impact of the DC intensity and electrode distance on pulsed-DC powder-pack boride layer growth kinetics
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Journal Articles

Enhancing laser-driven flyer velocity by optimizing of modulation period of Al/Ti reactive multilayer films

Weilong Gao, Ruizhi Zhang, Jin Wang, Zihao Huang, Zhiguo Li, Yajun Fu, Guoqiang Luo, Rong Tu
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 063414 (2023)
https://doi.org/10.1116/6.0003066
Published: November 2023
View article titled, Enhancing laser-driven flyer velocity by optimizing of modulation period of Al/Ti reactive multilayer films
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Journal Articles

Hot corrosion behavior of NiCoCrAlY laser cladding coating on 17-4PH stainless steel before and after high-current pulsed electron beam irradiation

Ruibin Duan, Miao Tian, Yuxin Li, Peikang Bai, Zhanyong Zhao, Jianhong Wang, Shouzheng Wei
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 053103 (2023)
https://doi.org/10.1116/6.0002791
Published: July 2023
View article titled, Hot corrosion behavior of NiCoCrAlY laser cladding coating on 17-4PH stainless steel before and after high-current pulsed electron beam irradiation
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Journal Articles

Alternative approach for the growth of a TiB2/TiC multilayer on M2 steel using the duplex method: Cathodic arc physical vapor deposition and cathodic reduction and thermal diffusion boriding

Mehran Karimzadehkhoei, Erkan Kacar, Servet Timur, Mustafa Urgen, Guldem Kartal Sireli
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 043104 (2023)
https://doi.org/10.1116/6.0002616
Published: June 2023
View article titled, Alternative approach for the growth of a TiB<sub>2</sub>/TiC multilayer on M2 steel using the duplex method: Cathodic arc physical vapor deposition and cathodic reduction and thermal diffusion boriding
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Journal Articles

Studies on the growth mechanism of aluminide coating on K444 alloy surface by chemical vapor deposition

Weijun Mo, Mingpeng Shao, Yong Wu, Qingyun Sun, Siyao Xia, Feng Wen, Yongxin Wang
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 043103 (2023)
https://doi.org/10.1116/6.0002654
Published: May 2023
View article titled, Studies on the growth mechanism of aluminide coating on K444 alloy surface by chemical vapor deposition
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Journal Articles

Effects of adventitious impurity adsorption on oxygen interstitial injection rates from submerged TiO2(110) and ZnO(0001) surfaces

Heonjae Jeong, Edmund G. Seebauer
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 033203 (2023)
https://doi.org/10.1116/6.0002467
Published: March 2023
View article titled, Effects of adventitious impurity adsorption on oxygen interstitial injection rates from submerged TiO<sub>2</sub>(110) and ZnO(0001) surfaces
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Includes: Supplementary data
Journal Articles

Method for extracting the intrinsic diffusion coefficient from grain boundary diffusion depth profile

Songyou Lian, Antonie J. Fourie, Jiangyong Wang, Hendrik C. Swart, Jacobus Johannes Terblans
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 033401 (2023)
https://doi.org/10.1116/6.0002400
Published: March 2023
View article titled, Method for extracting the intrinsic diffusion coefficient from grain boundary diffusion depth profile
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Journal Articles

Atomic layer deposition of MoNx thin films using a newly synthesized liquid Mo precursor

Byunguk Kim, Sangmin Lee, Taesung Kang, Sunghoon Kim, Sangman Koo, Hyeongtag Jeon
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 062411 (2022)
https://doi.org/10.1116/6.0002154
Published: November 2022
View article titled, Atomic layer deposition of MoN<sub>x</sub> thin films using a newly synthesized liquid Mo precursor
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Journal Articles

Diffusion-assisted molecular beam epitaxy of CuCrO2 thin films

Gaurab Rimal, Alessandro R. Mazza, Matthew Brahlek, Seongshik Oh
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 060401 (2022)
https://doi.org/10.1116/6.0002151
Published: November 2022
View article titled, Diffusion-assisted molecular beam epitaxy of CuCrO<sub>2</sub> thin films
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Includes: Supplementary data
Journal Articles

SiO2 etching and surface evolution using combined exposure to CF4/O2 remote plasma and electron beam

Editor’s Pick
Kang-Yi Lin, Christian Preischl, Christian Felix Hermanns, Daniel Rhinow, Hans-Michael Solowan, Michael Budach, Klaus Edinger, G. S. Oehrlein
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 063004 (2022)
https://doi.org/10.1116/6.0002038
Published: October 2022
View article titled, SiO<sub>2</sub> etching and surface evolution using combined exposure to CF<sub>4</sub>/O<sub>2</sub> remote plasma and electron beam
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