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Journal Articles

X-ray photoelectron spectroscopy investigation of chemical changes to nickel oxide and iron–nickel oxide surfaces caused by monoatomic argon ion and gas cluster ion beam sputtering

Michael C. Burrell, Caleb Hustedt, Robert A. Morris
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 033202 (2025)
https://doi.org/10.1116/6.0004377
Published: March 2025
View articletitled, X-ray photoelectron spectroscopy investigation of chemical changes to nickel oxide and iron–nickel oxide surfaces caused by monoatomic argon ion and gas cluster ion beam sputtering
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Journal Articles

Nucleation studies of high-κ aluminum oxide and hafnium oxide thin films on silicon carbide by plasma-enhanced atomic layer deposition

B. Galizia, E. Schilirò, P. Fiorenza, S. Peters, J. Zessin, F. Roccaforte, R. Lo Nigro
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 022410 (2025)
https://doi.org/10.1116/6.0004252
Published: February 2025
View articletitled, Nucleation studies of high-κ aluminum oxide and hafnium oxide thin films on silicon carbide by plasma-enhanced atomic layer deposition
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Journal Articles

Study on the fabrication of high-quality hafnium oxide thin films using spatial rotated atomic layer deposition and supercritical fluids treatment

Wen-Hsi Lee, Chien-Ching Feng, Guan-Fu Chen, Tai-Chen Kuo
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 062409 (2024)
https://doi.org/10.1116/6.0004041
Published: November 2024
View articletitled, Study on the fabrication of high-quality hafnium oxide thin films using spatial rotated atomic layer deposition and supercritical fluids treatment
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Journal Articles

Cr2O3–NiO mixed oxides thin films for p-type transparent conductive electrodes

Aleksei Almaev, Bogdan Kushnarev, Petr Korusenko, Pavel Butenko, Viktor Kopyev, Aleksandra Koroleva, Andrei Chikiryaka, Evgeniy Zhizhin
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 063406 (2024)
https://doi.org/10.1116/6.0003956
Published: October 2024
View articletitled, Cr2O3–NiO mixed oxides thin films for p-type transparent conductive electrodes
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Journal Articles

Over 6 MV/cm operation in β-Ga2O3 Schottky barrier diodes with IrO2 and RuO2 anodes deposited by molecular beam epitaxy

Editor’s Pick
B. Cromer, D. Saraswat, N. Pieczulewski, W. Li, K. Nomoto, F. V. E. Hensling, K. Azizie, H. P. Nair, D. G. Schlom, D. A. Muller, D. Jena, H. G. Xing
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 033206 (2024)
https://doi.org/10.1116/6.0003468
Published: April 2024
View articletitled, Over 6 MV/cm operation in β-Ga2O3 Schottky barrier diodes with IrO2 and RuO2 anodes deposited by molecular beam epitaxy
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Includes: Supplementary data
Journal Articles

Deposition rate and optical emissions in niobium oxide processes by reactive sputtering

Featured
João Saccoman, Nilton Francelosi A. Neto, José H. D. da Silva
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 033402 (2024)
https://doi.org/10.1116/6.0003255
Published: March 2024
View articletitled, Deposition rate and optical emissions in niobium oxide processes by reactive sputtering
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Journal Articles

Thickness dependent thermal conductivity of strontium titanate thin films on silicon substrate

Editor’s Pick
Roshan Sameer Annam, Swapneel Danayat, Avinash Nayal, Fatema Tarannum, Matthew Chrysler, Joseph Ngai, Jiechao Jiang, Aaron J. Schmidt, Jivtesh Garg
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 022707 (2024)
https://doi.org/10.1116/6.0003320
Published: February 2024
View articletitled, Thickness dependent thermal conductivity of strontium titanate thin films on silicon substrate
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Journal Articles

Hollow-cathode plasma deposited vanadium oxide films: Metal precursor influence on growth and material properties

Adnan Mohammad, Krishna D. Joshi, Dhan Rana, Saidjafarzoda Ilhom, Barrett Wells, Boris Sinkovic, Ali K. Okyay, Necmi Biyikli
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 012406 (2024)
https://doi.org/10.1116/6.0002988
Published: January 2024
View articletitled, Hollow-cathode plasma deposited vanadium oxide films: Metal precursor influence on growth and material properties
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Includes: Supplementary data
Journal Articles

Cu2O/ZnO heterojunction self-powered photodetector performance regulation

Siyuan Li, Man Zhao, Dayong Jiang, Mingyang Li, Meijiao Wang, Yanyan Peng, Jingda Gu
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 013409 (2024)
https://doi.org/10.1116/6.0003274
Published: January 2024
View articletitled, Cu2O/ZnO heterojunction self-powered photodetector performance regulation
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Journal Articles

Electrochromic properties of NiO films prepared by atomic layer deposition

Xi Su, Zexin Tu, Liwei Ji, Hao Wu, Hongxing Xu, Chang Liu
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 062407 (2023)
https://doi.org/10.1116/6.0003040
Published: October 2023
View articletitled, Electrochromic properties of NiO films prepared by atomic layer deposition
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Journal Articles

Growth and optical properties of NiO thin films deposited by pulsed dc reactive magnetron sputtering

Faezeh A. F. Lahiji, Samiran Bairagi, Roger Magnusson, Mauricio A. Sortica, Daniel Primetzhofer, Erik Ekström, Biplab Paul, Arnaud le Febvrier, Per Eklund
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 063402 (2023)
https://doi.org/10.1116/6.0002914
Published: September 2023
View articletitled, Growth and optical properties of NiO thin films deposited by pulsed dc reactive magnetron sputtering
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Includes: Supplementary data
Journal Articles

Vertical NiO/β-Ga2O3 rectifiers grown by metalorganic chemical vapor deposition

Hsiao-Hsuan Wan, Jian-Sian Li, Chao-Ching Chiang, Fan Ren, Timothy Jinsoo Yoo, Honggyu Kim, Andrei Osinsky, Fikadu Alema, Stephen J. Pearton
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 052707 (2023)
https://doi.org/10.1116/6.0002884
Published: August 2023
View articletitled, Vertical NiO/β-Ga2O3 rectifiers grown by metalorganic chemical vapor deposition
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Journal Articles

Plasma deposited carbon containing zirconia films as thermal barriers

Vitali Bedarev, Philipp A. Maaß, Anna Thewes, Marc Böke, Achim von Keudell
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 053001 (2023)
https://doi.org/10.1116/6.0002745
Published: July 2023
View articletitled, Plasma deposited carbon containing zirconia films as thermal barriers
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Journal Articles

Foldable electrochromic NiO films

Xi Su, Zexin Tu, Liwei Ji, Hao Wu, Hongxing Xu, Chang Liu
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 043414 (2023)
https://doi.org/10.1116/6.0002742
Published: June 2023
View articletitled, Foldable electrochromic NiO films
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Journal Articles

Effect of drift layer doping and NiO parameters in achieving 8.9 kV breakdown in 100 μm diameter and 4 kV/4 A in 1 mm diameter NiO/β-Ga2O3 rectifiers

Jian-Sian Li, Chao-Ching Chiang, Xinyi Xia, Hsiao-Hsuan Wan, Fan Ren, S. J. Pearton
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 043404 (2023)
https://doi.org/10.1116/6.0002722
Published: June 2023
View articletitled, Effect of drift layer doping and NiO parameters in achieving 8.9 kV breakdown in 100 μm diameter and 4 kV/4 A in 1 mm diameter NiO/β-Ga2O3 rectifiers
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Journal Articles

Modulation of the LaFeO3 film growth by the terrace width of SrTiO3 substrates

Zeguo Lin, Xiaofeng Xu, Xiaoran Liu, Jiandong Guo, Fang Yang
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 043204 (2023)
https://doi.org/10.1116/6.0002579
Published: May 2023
View articletitled, Modulation of the LaFeO3 film growth by the terrace width of SrTiO3 substrates
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Includes: Supplementary data
Journal Articles

7.5 kV, 6.2 GW cm−2 NiO/β-Ga2O3 vertical rectifiers with on–off ratio greater than 1013

Jian-Sian Li, Chao-Ching Chiang, Xinyi Xia, Hsiao-Hsuan Wan, Fan Ren, S. J. Pearton
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 030401 (2023)
https://doi.org/10.1116/6.0002580
Published: April 2023
View articletitled, 7.5 kV, 6.2 GW cm−2 NiO/β-Ga2O3 vertical rectifiers with on–off ratio greater than 1013
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Journal Articles

Low-temperature synthesis of crystalline vanadium oxide films using oxygen plasmas

Adnan Mohammad, Krishna D. Joshi, Dhan Rana, Saidjafarzoda Ilhom, Barrett Wells, Brian Willis, Boris Sinkovic, A. K. Okyay, Necmi Biyikli
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 032405 (2023)
https://doi.org/10.1116/6.0002383
Published: March 2023
View articletitled, Low-temperature synthesis of crystalline vanadium oxide films using oxygen plasmas
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Includes: Supplementary data
Journal Articles

Area selective atomic layer deposition of SnO2 as an etch resist in fluorine based processes

Editor’s Pick
Xin Yang, Himamshu Nallan, Brennan M. Coffey, John G. Ekerdt
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 032402 (2023)
https://doi.org/10.1116/6.0002429
Published: March 2023
View articletitled, Area selective atomic layer deposition of SnO2 as an etch resist in fluorine based processes
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Journal Articles

NiO/β-(AlxGa1−x)2O3/Ga2O3 heterojunction lateral rectifiers with reverse breakdown voltage >7 kV

Hsiao-Hsuan Wan, Jian-Sian Li, Chao-Ching Chiang, Xinyi Xia, Fan Ren, Hannah N. Masten, James Spencer Lundh, Joseph A. Spencer, Fikadu Alema, Andrei Osinsky, Alan G. Jacobs, Karl Hobart, Marko J. Tadjer, S. J. Pearton
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 032701 (2023)
https://doi.org/10.1116/6.0002393
Published: March 2023
View articletitled, NiO/β-(AlxGa1−x)2O3/Ga2O3 heterojunction lateral rectifiers with reverse breakdown voltage >7 kV
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