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Journal Articles

Structure and properties of Ta–Ti binary layer as anti-hydrogen embrittlement layer within neutron production target for accelerator-based boron neutron capture therapy (AB-BNCT)

Fanxi Zhang, Yupeng Xie, Yixin Si, Yaru Wang, Qiuyu Sun, Quanxu Jiang, Xuanyu Meng, Yaocheng Hu, Zheng Han, Yifan Yang, Chen Chen, Sheng Wang
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 033405 (2025)
https://doi.org/10.1116/6.0004318
Published: April 2025
View articletitled, Structure and properties of Ta–Ti binary layer as anti-hydrogen embrittlement layer within neutron production target for accelerator-based boron neutron capture therapy (AB-BNCT)
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Journal Articles

Spatial atomic layer deposition: Transport-reaction modeling and experimental validation of film geometry

Editor’s Pick
Daniel Penley, Neil P. Dasgupta
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 022415 (2025)
https://doi.org/10.1116/6.0004367
Published: March 2025
View articletitled, Spatial atomic layer deposition: Transport-reaction modeling and experimental validation of film geometry
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Journal Articles

Selective molecular gas phase etching in layered high aspect-ratio nanostructures for semiconductor processing. II. Experiments and model validation

Editor’s Pick
Zach Zajo, David S. L. Mui, Ji Zhu, Yusef Shari’ati, Mark Kawaguchi, Eric S. G. Shaqfeh
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 013007 (2025)
https://doi.org/10.1116/6.0004156
Published: January 2025
View articletitled, Selective molecular gas phase etching in layered high aspect-ratio nanostructures for semiconductor processing. II. Experiments and model validation
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Journal Articles

Lattice kinetic Monte Carlo method on fractal growth of transition metal dichalcogenides

Xuejiang Chen, Yishan Lin, Wensen Ai, Xinyao Zhang
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 012202 (2025)
https://doi.org/10.1116/6.0004104
Published: January 2025
View articletitled, Lattice kinetic Monte Carlo method on fractal growth of transition metal dichalcogenides
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Journal Articles

Modeling scale-up of particle coating by atomic layer deposition

Editor’s Pick
Angel Yanguas-Gil, Jeffrey W. Elam
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 43, 012404 (2025)
https://doi.org/10.1116/6.0004006
Published: December 2024
View articletitled, Modeling scale-up of particle coating by atomic layer deposition
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Journal Articles

Arsenic-flux dependence of surface morphology in InAs homoepitaxy

Akihiro Ohtake, Takuya Kawazu, Takaaki Mano
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 062702 (2024)
https://doi.org/10.1116/6.0003957
Published: September 2024
View articletitled, Arsenic-flux dependence of surface morphology in InAs homoepitaxy
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Journal Articles

Identifying kinetic models from reactor measurements

Prithvi Dake, Maria Rikaela Ilagan, Shoili Banerjee, Susannah L. Scott, James B. Rawlings
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 062201 (2024)
https://doi.org/10.1116/6.0003846
Published: September 2024
View articletitled, Identifying kinetic models from reactor measurements
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Journal Articles

Examination of nonideal film growth in batch atomic layer deposition for plasma-resistant coatings

Lanxin Guo, Yixian Wang, Zifan Pang, Xin Han, Yafeng Wang, Lipei Peng, Xin Gao, Chunlei Pei, Tuo Wang, Jinlong Gong
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 062401 (2024)
https://doi.org/10.1116/6.0003777
Published: September 2024
View articletitled, Examination of nonideal film growth in batch atomic layer deposition for plasma-resistant coatings
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Journal Articles

Fracture strain improving via structural austenitic stainless steel-coated 22MnB5 plates

Jiashun Lv, Pengchao Yu, Maoqing Tian, Zhuo Zhao, Yanwen Zhou
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 053108 (2024)
https://doi.org/10.1116/6.0003742
Published: September 2024
View articletitled, Fracture strain improving via structural austenitic stainless steel-coated 22MnB5 plates
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Journal Articles

First-principles calculations on adsorption-diffusion behavior of transition layer Ti atoms on the Fe surface

Haiwei Han, Chunyan Chen, Shunuo Bian, Lihua Yu, Junhua Xu, Xinmeng Wu, Yaohong Jiang, Lijun Zhao
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 053406 (2024)
https://doi.org/10.1116/6.0003808
Published: August 2024
View articletitled, First-principles calculations on adsorption-diffusion behavior of transition layer Ti atoms on the Fe surface
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Journal Articles

Microstructural and kinetics analysis of FeB–Fe2B layer grown by pulsed-DC powder-pack boriding on AISI 316 L steel

I. Campos-Silva, J. Cedeño-Velázquez, A. D. Contla-Pacheco, I. Arzate-Vázquez, L. E. Castillo-Vela, M. Olivares-Luna, J. L. Rosales-Lopez, F. P. Espino-Cortes
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 053101 (2024)
https://doi.org/10.1116/6.0003774
Published: July 2024
View articletitled, Microstructural and kinetics analysis of FeB–Fe2B layer grown by pulsed-DC powder-pack boriding on AISI 316 L steel
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Journal Articles

Reactor wall effects in Si–Cl2–Ar atomic layer etching

Joseph R. Vella, Mahmoud A. I. Elgarhy, Qinzhen Hao, Vincent M. Donnelly, David B. Graves
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 042604 (2024)
https://doi.org/10.1116/6.0003651
Published: June 2024
View articletitled, Reactor wall effects in Si–Cl2–Ar atomic layer etching
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Journal Articles

Case study in machine learning for predicting moderate pressure plasma behavior

Shadhin Hussain, David J. Lary, Kentaro Hara, Kallol Bera, Shahid Rauf, Matthew Goeckner
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 043001 (2024)
https://doi.org/10.1116/6.0003434
Published: May 2024
View articletitled, Case study in machine learning for predicting moderate pressure plasma behavior
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Journal Articles

Effect of growth conditions and reactor configuration on the growth uniformity of large-scale graphene by chemical vapor deposition

Qihang Li, Jinping Luo, Zaoyang Li, Mark H. Rummeli, Lijun Liu
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 033406 (2024)
https://doi.org/10.1116/6.0003487
Published: April 2024
View articletitled, Effect of growth conditions and reactor configuration on the growth uniformity of large-scale graphene by chemical vapor deposition
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Includes: Supplementary data
Journal Articles

Surface treatment of TaN for sub-2 nm, smooth, and conducting atomic layer deposition Ru films

Editor’s Pick
Corbin Feit, Udit Kumar, Md. Rafiqul Islam, Luis Tomar, S. Novia Berriel, John T. Gaskins, Patrick E. Hopkins, Sudipta Seal, Parag Banerjee
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 032407 (2024)
https://doi.org/10.1116/6.0003440
Published: April 2024
View articletitled, Surface treatment of TaN for sub-2 nm, smooth, and conducting atomic layer deposition Ru films
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Includes: Supplementary data
Journal Articles

Effect of FeCrAl sublayer composition on the microstructure and corrosion resistance of FeCrAl/yttria-stabilized zirconia composite coatings

Changda Zhu, Xi Qiu, Yuanming Li, Wei Zhang, Jian Yang, Yilong Zhong, Jiuguo Deng, Mingyang Zhou, Ning Liu, Jijun Yang
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 023203 (2024)
https://doi.org/10.1116/6.0003114
Published: February 2024
View articletitled, Effect of FeCrAl sublayer composition on the microstructure and corrosion resistance of FeCrAl/yttria-stabilized zirconia composite coatings
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Journal Articles

Kinetic Monte Carlo study on the effect of growth conditions on the epitaxial growth of 3C–SiC (0001) vicinal surface

Xuejiang Chen, Xinyao Zhang, Wensen Ai
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 022703 (2024)
https://doi.org/10.1116/6.0003144
Published: January 2024
View articletitled, Kinetic Monte Carlo study on the effect of growth conditions on the epitaxial growth of 3C–SiC (0001) vicinal surface
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Journal Articles

Exploring the thermal behavior and diffusive functionality of structural defects and phase boundaries in near-stoichiometric chromium diborides by in situ scanning transmission electron microscopy

Featured
Per O. Å. Persson, Johanna Rosen, Ivan Petrov, Justinas Palisaitis
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 020401 (2024)
https://doi.org/10.1116/6.0003389
Published: January 2024
View articletitled, Exploring the thermal behavior and diffusive functionality of structural defects and phase boundaries in near-stoichiometric chromium diborides by in situ scanning transmission electron microscopy
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Includes: Supplementary data
Journal Articles

Impact of the DC intensity and electrode distance on pulsed-DC powder-pack boride layer growth kinetics

I. Campos-Silva, L. E. Castillo-Vela, I. Mejía-Caballero, J. L. Rosales-Lopez, M. Olivares-Luna, K. D. Chaparro-Pérez, F. P. Espino-Cortes, J. M. González-Carmona
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 063115 (2023)
https://doi.org/10.1116/6.0003167
Published: November 2023
View articletitled, Impact of the DC intensity and electrode distance on pulsed-DC powder-pack boride layer growth kinetics
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Journal Articles

Enhancing laser-driven flyer velocity by optimizing of modulation period of Al/Ti reactive multilayer films

Weilong Gao, Ruizhi Zhang, Jin Wang, Zihao Huang, Zhiguo Li, Yajun Fu, Guoqiang Luo, Rong Tu
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 063414 (2023)
https://doi.org/10.1116/6.0003066
Published: November 2023
View articletitled, Enhancing laser-driven flyer velocity by optimizing of modulation period of Al/Ti reactive multilayer films
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