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Journal Articles

Room temperature magnetron sputtering and laser annealing of ultrathin amorphous sulfur-rich MoSx films

Spencer Gellerup, Corey L. Arnold, Christopher Muratore, Nicholas R. Glavin, Nigel D. Shepherd, Andrey A. Voevodin
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 053405 (2023)
https://doi.org/10.1116/6.0002544
Published: July 2023
View article titled, Room temperature magnetron sputtering and laser annealing of ultrathin amorphous sulfur-rich MoS<sub>x</sub> films
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Includes: Supplementary data
Journal Articles

Why thermal laser epitaxy aluminum sources yield reproducible fluxes in oxidizing environments

Thomas J. Smart, Felix V. E. Hensling, Dong Yeong Kim, Lena N. Majer, Y. Eren Suyolcu, Dominik Dereh, Darrell G. Schlom, Debdeep Jena, Jochen Mannhart, Wolfgang Braun
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 042701 (2023)
https://doi.org/10.1116/6.0002632
Published: May 2023
View article titled, Why thermal laser epitaxy aluminum sources yield reproducible fluxes in oxidizing environments
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Journal Articles

Design of InGaN-ZnSnGa2N4 quantum wells for high-efficiency amber light emitting diodes

Kaitian Zhang, Chenxi Hu, Vijay Gopal Thirupakuzi Vangipuram, Kathleen Kash, Hongping Zhao
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 033206 (2023)
https://doi.org/10.1116/6.0002524
Published: April 2023
View article titled, Design of InGaN-ZnSnGa<sub>2</sub>N<sub>4</sub> quantum wells for high-efficiency amber light emitting diodes
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Journal Articles

Pulsed laser induced atomic layer etching of silicon

Matthew Eliceiri, Yoonsoo Rho, Runxuan Li, Costas P. Grigoropoulos
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 022602 (2023)
https://doi.org/10.1116/6.0002399
Published: February 2023
View article titled, Pulsed laser induced atomic layer etching of silicon
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Includes: Supplementary data
Journal Articles

Surface oxidation of hydrophobic ZnSe for enhanced growth of atomic layer deposited aluminum oxide

Corbin Feit, Jaynlynn Sosa, Alexandros Kostogiannes, Matthieu Chazot, Nicholas G. Rudawski, Titel Jurca, Kathleen A. Richardson, Parag Banerjee
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 052402 (2022)
https://doi.org/10.1116/6.0002018
Published: August 2022
View article titled, Surface oxidation of hydrophobic ZnSe for enhanced growth of atomic layer deposited aluminum oxide
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Journal Articles

Impact of interfacial thickness on Raman intensity profiles and phonon anisotropy in short-period (AlSb)n/(GaSb)m superlattices

Devki N. Talwar
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 042704 (2022)
https://doi.org/10.1116/6.0001864
Published: July 2022
View article titled, Impact of interfacial thickness on Raman intensity profiles and phonon anisotropy in short-period (AlSb)<sub>n</sub>/(GaSb)<sub>m</sub> superlattices
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Journal Articles

Perspectives on UV and x-ray photoelectron spectroscopy

Stephen H. Southworth, Steven T. Manson
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 043002 (2022)
https://doi.org/10.1116/6.0001856
Published: May 2022
View article titled, Perspectives on UV and x-ray photoelectron spectroscopy
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Journal Articles

Role of nanoscale surface defects on Sn adsorption and diffusion behavior on oxidized Nb(100)

Rachael G. Farber, Sarah A. Willson, S. J. Sibener
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 39, 063212 (2021)
https://doi.org/10.1116/6.0001374
Published: October 2021
View article titled, Role of nanoscale surface defects on Sn adsorption and diffusion behavior on oxidized Nb(100)
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Journal Articles

Epitaxial film growth by thermal laser evaporation

Dong Yeong Kim, Jochen Mannhart, Wolfgang Braun
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 39, 053406 (2021)
https://doi.org/10.1116/6.0001177
Published: August 2021
View article titled, Epitaxial film growth by thermal laser evaporation
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Includes: Supplementary data
Journal Articles

Localized phase transition of TiO2 thin films induced by sub-bandgap laser irradiation

Syeed E. Ahmed, Violet M. Poole, John Igo, Yi Gu, Matthew D. McCluskey
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 39, 053402 (2021)
https://doi.org/10.1116/6.0001088
Published: July 2021
View article titled, Localized phase transition of TiO<sub>2</sub> thin films induced by sub-bandgap laser irradiation
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Journal Articles

Surface plasmon resonance is possible in an optical fiber tapered to a point

Doryne Sunda-Meya, Hans D. Hallen
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 39, 043206 (2021)
https://doi.org/10.1116/6.0000965
Published: June 2021
View article titled, Surface plasmon resonance is possible in an optical fiber tapered to a point
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Journal Articles

Solid-phase epitaxial crystallization of β-Ga2O3 thin film by KrF excimer laser irradiation from backside of NiO (111)-buffered α-Al2O3 (0001) substrate at room temperature

Hiroyuki Morita, Takumi Matsushima, Kisho Nakamura, Kenta Kaneko, Satoru Kaneko, Akifumi Matsuda, Mamoru Yoshimoto
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 39, 043414 (2021)
https://doi.org/10.1116/6.0000996
Published: June 2021
View article titled, Solid-phase epitaxial crystallization of β-Ga<sub>2</sub>O<sub>3</sub> thin film by KrF excimer laser irradiation from backside of NiO (111)-buffered α-Al<sub>2</sub>O<sub>3</sub> (0001) substrate at room temperature
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Journal Articles

Influence of quantum-confined device fabrication on semiconductor-laser theory

Weng W. Chow, Frank Jahnke
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 39, 032408 (2021)
https://doi.org/10.1116/6.0000767
Published: March 2021
View article titled, Influence of quantum-confined device fabrication on semiconductor-laser theory
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Journal Articles

True hero of the trade: On the critical contributions of Art Gossard to modern device techonology

Aaron J. Muhowski, Alec M. Skipper, Stephen D. March, Mark J. W. Rodwell, Seth R. Bank
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 39, 020804 (2021)
https://doi.org/10.1116/6.0000792
Published: February 2021
View article titled, True hero of the trade: On the critical contributions of Art Gossard to modern device techonology
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Journal Articles

Quantum dot lasers—History and future prospects

Justin C. Norman, Richard P. Mirin, John E. Bowers
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 39, 020802 (2021)
https://doi.org/10.1116/6.0000768
Published: January 2021
View article titled, Quantum dot lasers—History and future prospects
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Journal Articles

Review of key vertical-cavity laser and modulator advances enabled by advanced MBE technology

Larry A. Coldren
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 39, 010801 (2021)
https://doi.org/10.1116/6.0000574
Published: November 2020
View article titled, Review of key vertical-cavity laser and modulator advances enabled by advanced MBE technology
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Journal Articles

First-principles study of phonon thermal transport in II–VI group graphenelike materials

Jianye Liu, Yinchang Zhao, Weiqiang Wang, Qi Zhong, Zhenhong Dai, Sheng Meng
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 38, 062202 (2020)
https://doi.org/10.1116/6.0000376
Published: October 2020
View article titled, First-principles study of phonon thermal transport in II–VI group graphenelike materials
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Journal Articles

Pulsed laser annealing of amorphous two-dimensional transition metal dichalcogenides

Rachel H. Rai, Argelia Pérez-Pacheco, Rosa Quispe-Siccha, Nicholas R. Glavin, Christopher Muratore
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 38, 052201 (2020)
https://doi.org/10.1116/6.0000253
Published: August 2020
View article titled, Pulsed laser annealing of amorphous two-dimensional transition metal dichalcogenides
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Includes: Supplementary data
Journal Articles

Effect of two-step post-treatment on optical properties, microstructure, and nanosecond laser damage threshold of HfO2/TiO2/SiO2 multilayer high reflection films

Sida Mao, Jie Fan, Yonggang Zou, Yunping Lan, Yingtian Xu, Jiabin Zhang, Jianing Dong, Xiaohui Ma
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 37, 061503 (2019)
https://doi.org/10.1116/1.5116294
Published: October 2019
View article titled, Effect of two-step post-treatment on optical properties, microstructure, and nanosecond laser damage threshold of HfO<sub>2</sub>/TiO<sub>2</sub>/SiO<sub>2</sub> multilayer high reflection films
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Journal Articles

Kinetic model for color-center formation in TiO2 film using femtosecond laser irradiation

Susumu Kato, Atsushi Sunahara, Masahiro Tsukamoto
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 37, 031512 (2019)
https://doi.org/10.1116/1.5085822
Published: April 2019
View article titled, Kinetic model for color-center formation in TiO<sub>2</sub> film using femtosecond laser irradiation
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