Skip Nav Destination
Update search
Filter
All
- All
- Title
- Author
- Author Affiliations
- Full Text
- Abstract
- Keyword
- DOI
- ISBN
- EISBN
- ISSN
- EISSN
- Issue
- Volume
- References
Filter
All
- All
- Title
- Author
- Author Affiliations
- Full Text
- Abstract
- Keyword
- DOI
- ISBN
- EISBN
- ISSN
- EISSN
- Issue
- Volume
- References
Filter
All
- All
- Title
- Author
- Author Affiliations
- Full Text
- Abstract
- Keyword
- DOI
- ISBN
- EISBN
- ISSN
- EISSN
- Issue
- Volume
- References
Filter
All
- All
- Title
- Author
- Author Affiliations
- Full Text
- Abstract
- Keyword
- DOI
- ISBN
- EISBN
- ISSN
- EISSN
- Issue
- Volume
- References
Filter
All
- All
- Title
- Author
- Author Affiliations
- Full Text
- Abstract
- Keyword
- DOI
- ISBN
- EISBN
- ISSN
- EISSN
- Issue
- Volume
- References
Filter
All
- All
- Title
- Author
- Author Affiliations
- Full Text
- Abstract
- Keyword
- DOI
- ISBN
- EISBN
- ISSN
- EISSN
- Issue
- Volume
- References
NARROW
Format
Collections
Topics
Journal
Article Type
Issue Section
Date
Availability
Journal Articles
Zhe Chuan Feng, Deng Xie, Manika Tun Nafisa, Hao-Hsiung Lin, Weijie Lu, Jin-Ming Chen, Jeffrey Yiin, Kuei-Hsien Chen, Li-Chyong Chen, Benjamin Klein, Ian T. Ferguson
J. Vac. Sci. Technol. A 41, 053401 (2023)
Published: July 2023
Journal Articles
J. Vac. Sci. Technol. A 40, 053205 (2022)
Published: September 2022
Journal Articles
J. Vac. Sci. Technol. A 40, 043207 (2022)
Published: June 2022
Journal Articles
J. Vac. Sci. Technol. A 40, 043002 (2022)
Published: May 2022
Journal Articles
A. C. F. Santos, O. Travnikova, N. Boudjemia, T. Marchenko, R. Guillemin, I. Ismail, D. Koulentianos, D. Céolin, F. Gel’mukhanov, M. Simon, M. N. Piancastelli, R. Püttner
J. Vac. Sci. Technol. A 40, 042801 (2022)
Published: May 2022
Journal Articles
J. G. Tobin, S. Nowak, S.-W. Yu, P. Roussel, R. Alonso-Mori, T. Kroll, D. Nordlund, T.-C. Weng, D. Sokaras
J. Vac. Sci. Technol. A 40, 033205 (2022)
Published: April 2022
Journal Articles
J. Vac. Sci. Technol. A 40, 033204 (2022)
Published: April 2022
Journal Articles
J. Vac. Sci. Technol. A 39, 063205 (2021)
Published: September 2021
Journal Articles
Kyo Shibata, Yusuke Suetsugu, Takuya Ishibashi, Mitsuru Shirai, Shinji Terui, Ken-ichi Kanazawa, Hiromi Hisamatsu
J. Vac. Sci. Technol. A 37, 041601 (2019)
Published: June 2019
Journal Articles
J. Vac. Sci. Technol. A 37, 030602 (2019)
Published: April 2019
Journal Articles
Yusuke Suetsugu, Kyo Shibata, Takuya Ishibashi, Mitsuru Shirai, Shinji Terui, Ken-ichi Kanazawa, Hiromi Hisamatsu
J. Vac. Sci. Technol. A 37, 021602 (2019)
Published: February 2019
Journal Articles
Kyo Shibata, Yusuke Suetsugu, Takuya Ishibashi, Mitsuru Shirai, Shinji Terui, Ken-ichi Kanazawa, Hiromi Hisamatsu
J. Vac. Sci. Technol. A 35, 03E106 (2017)
Published: March 2017
Journal Articles
Xiangyu Guo, Dongfei Pei, Huifeng Zheng, Weiyi Li, J. Leon Shohet, Sean W. King, Yi-Hung Lin, Hok-Sum Fung, Cheng-Chi Chen, Yoshio Nishi
J. Vac. Sci. Technol. A 35, 021509 (2017)
Published: January 2017
Journal Articles
J. Vac. Sci. Technol. A 35, 01B142 (2017)
Published: December 2016
Journal Articles
Lawrence Boyu Young, Chao-Kai Cheng, Guan-Jie Lu, Keng-Yung Lin, Yen-Hsun Lin, Hsien-Wen Wan, Mei-Yi Li, Ren-Fong Cai, Shen-Chuan Lo, Chia-Hung Hsu, Jueinai Kwo, Minghwei Hong
J. Vac. Sci. Technol. A 35, 01B123 (2017)
Published: December 2016
Journal Articles
J. Vac. Sci. Technol. A 34, 061602 (2016)
Published: October 2016
Journal Articles
J. Vac. Sci. Technol. A 34, 031603 (2016)
Published: April 2016
Journal Articles
Carl Hägglund, Thomas Grehl, Jukka T. Tanskanen, Ye Sheng Yee, Marja N. Mullings, Adriaan J. M. Mackus, Callisto MacIsaac, Bruce M. Clemens, Hidde H. Brongersma, Stacey F. Bent
J. Vac. Sci. Technol. A 34, 021516 (2016)
Published: February 2016
Journal Articles
J. Vac. Sci. Technol. A 34, 020601 (2016)
Published: December 2015
Journal Articles
J. Vac. Sci. Technol. A 32, 051601 (2014)
Published: July 2014
1