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Journal Articles
J. Vac. Sci. Technol. A 43, 013005 (2025)
Published: January 2025
Journal Articles
J. Vac. Sci. Technol. A 42, 053106 (2024)
Published: August 2024
Journal Articles
J. Vac. Sci. Technol. A 42, 032803 (2024)
Published: April 2024
Journal Articles
J. Vac. Sci. Technol. A 42, 033207 (2024)
Published: April 2024
Includes: Supplementary data
Journal Articles
Michael A. Collings, Marcel Junige, Andrew S. Cavanagh, Victor Wang, Andrew C. Kummel, Steven M. George
J. Vac. Sci. Technol. A 41, 062408 (2023)
Published: November 2023
Journal Articles
J. Vac. Sci. Technol. A 41, 053104 (2023)
Published: July 2023
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 41, 042404 (2023)
Published: June 2023
Journal Articles
J. Vac. Sci. Technol. A 41, 042706 (2023)
Published: June 2023
Journal Articles
J. Vac. Sci. Technol. A 41, 043205 (2023)
Published: May 2023
Journal Articles
Thomas J. Smart, Felix V. E. Hensling, Dong Yeong Kim, Lena N. Majer, Y. Eren Suyolcu, Dominik Dereh, Darrell G. Schlom, Debdeep Jena, Jochen Mannhart, Wolfgang Braun
J. Vac. Sci. Technol. A 41, 042701 (2023)
Published: May 2023
Journal Articles
Ye Eun Kim, Doo San Kim, Yun Jong Jang, Hong Seong Gil, Ho Seop Jeon, Jong Woo Hong, In Ho Kim, Cheol Kim, Jeong-Heon Park, Geun Young Yeom
J. Vac. Sci. Technol. A 41, 033005 (2023)
Published: April 2023
Journal Articles
Kang-Yi Lin, Christian Preischl, Christian Felix Hermanns, Daniel Rhinow, Hans-Michael Solowan, Michael Budach, Hubertus Marbach, Klaus Edinger, G. S. Oehrlein
J. Vac. Sci. Technol. A 41, 013004 (2023)
Published: December 2022
Journal Articles
J. Vac. Sci. Technol. A 41, 013203 (2023)
Published: December 2022
Includes: Supplementary data
Journal Articles
Epitaxial growth of the first two members of the Ban+1InnO2.5n+1 Ruddlesden–Popper homologous series
Felix V. E. Hensling, Michelle A. Smeaton, Veronica Show, Kathy Azizie, Matthew R. Barone, Lena F. Kourkoutis, Darrell G. Schlom
J. Vac. Sci. Technol. A 40, 062707 (2022)
Published: November 2022
Includes: Supplementary data
Journal Articles
SiO2 etching and surface evolution using combined exposure to CF4/O2 remote plasma and electron beam
Kang-Yi Lin, Christian Preischl, Christian Felix Hermanns, Daniel Rhinow, Hans-Michael Solowan, Michael Budach, Klaus Edinger, G. S. Oehrlein
J. Vac. Sci. Technol. A 40, 063004 (2022)
Published: October 2022
Journal Articles
J. Vac. Sci. Technol. A 40, 053203 (2022)
Published: August 2022
Journal Articles
J. Vac. Sci. Technol. A 40, 013415 (2022)
Published: December 2021
Journal Articles
J. Vac. Sci. Technol. A 40, 012201 (2022)
Published: November 2021
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 39, 063218 (2021)
Published: October 2021
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 39, 042403 (2021)
Published: June 2021
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