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Journal Articles

Impact of encapsulation method on the adsorbate induced electrical instability of monolayer graphene

Sırrı Batuhan Kalkan, Alper Yanilmaz, Cem Çelebi
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 37, 051502 (2019)
https://doi.org/10.1116/1.5099141
Published: July 2019
View article titled, Impact of encapsulation method on the adsorbate induced electrical instability of monolayer graphene
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Journal Articles

5f states with spin-orbit and crystal field splittings

J. G. Tobin
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 37, 031201 (2019)
https://doi.org/10.1116/1.5087829
Published: March 2019
View article titled, 5f states with spin-orbit and crystal field splittings
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Journal Articles

Growth-temperature dependence of conductivity at the LaCrO3/SrTiO3 (001) interface

Editor’s Pick
Athby Al-Tawhid, Jordan R. Frick, Daniel B. Dougherty, Divine P. Kumah
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 37, 021102 (2019)
https://doi.org/10.1116/1.5085334
Published: February 2019
View article titled, Growth-temperature dependence of conductivity at the LaCrO<sub>3</sub>/SrTiO<sub>3</sub> (001) interface
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Journal Articles

SuperKEKB main ring vacuum system status until the end of Phase-2 commissioning

Yusuke Suetsugu, Kyo Shibata, Takuya Ishibashi, Mitsuru Shirai, Shinji Terui, Ken-ichi Kanazawa, Hiromi Hisamatsu
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 37, 021602 (2019)
https://doi.org/10.1116/1.5083928
Published: February 2019
View article titled, SuperKEKB main ring vacuum system status until the end of Phase-2 commissioning
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Journal Articles

Probing covalency with oxidant K edge x-ray absorption spectroscopy of UF4 and UO2

J. G. Tobin, S.-W. Yu, R. Qiao, W. L. Yang, D. K. Shuh
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 36, 061403 (2018)
https://doi.org/10.1116/1.5046947
Published: September 2018
View article titled, Probing covalency with oxidant K edge x-ray absorption spectroscopy of UF<sub>4</sub> and UO<sub>2</sub>
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Journal Articles

Effect of ion energies on the film properties of titanium dioxides synthesized via plasma enhanced atomic layer deposition

Shinya Iwashita, Tsuyoshi Moriya, Takamichi Kikuchi, Munehito Kagaya, Naotaka Noro, Toshio Hasegawa, Akira Uedono
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 36, 021515 (2018)
https://doi.org/10.1116/1.5001552
Published: February 2018
View article titled, Effect of ion energies on the film properties of titanium dioxides synthesized via plasma enhanced atomic layer deposition
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Journal Articles

Disilane addition versus silane-hydrogen flow rate effect on the PECVD of silicon thin films

Panagiotis Dimitrakellis, Eleftherios Amanatides, Dimitrios Mataras, Angelos G. Kalampounias, Nikolaos Spiliopoulos, Vanina Lahootun, François Coeuret, Alain Madec
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 34, 061307 (2016)
https://doi.org/10.1116/1.4966957
Published: November 2016
View article titled, Disilane addition versus silane-hydrogen flow rate effect on the PECVD of silicon thin films
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Journal Articles

Insights into the mechanism of in-plasma photo-assisted etching using optical emission spectroscopy

Shyam Sridhar, Lei Liu, Emilia W. Hirsch, Vincent M. Donnelly, Demetre J. Economou
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 34, 061303 (2016)
https://doi.org/10.1116/1.4964641
Published: October 2016
View article titled, Insights into the mechanism of in-plasma photo-assisted etching using optical emission spectroscopy
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Journal Articles

XPS and SIMS study of the surface and interface of aged C+ implanted uranium

Scott B. Donald, Wigbert J. Siekhaus, Art J. Nelson
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 34, 061401 (2016)
https://doi.org/10.1116/1.4962386
Published: September 2016
View article titled, XPS and SIMS study of the surface and interface of aged C<sup>+</sup> implanted uranium
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Journal Articles

Measurement of atmospheric pressure microplasma jet with Langmuir probes

Kunning G. Xu, Steven J. Doyle
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 34, 051301 (2016)
https://doi.org/10.1116/1.4959565
Published: July 2016
View article titled, Measurement of atmospheric pressure microplasma jet with Langmuir probes
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Journal Articles

Structural and electronic properties of InN epitaxial layer grown on c-plane sapphire by chemical vapor deposition technique

Barun Kumar Barick, Nivedita Prasad, Rajendra Kumar Saroj, Subhabrata Dhar
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 34, 051503 (2016)
https://doi.org/10.1116/1.4955270
Published: July 2016
View article titled, Structural and electronic properties of InN epitaxial layer grown on <em>c</em>-plane sapphire by chemical vapor deposition technique
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Includes: Supplementary data
Journal Articles

F-atom kinetics in SF6/Ar inductively coupled plasmas

Wei Yang, Shu-Xia Zhao, De-Qi Wen, Wei Liu, Yong-Xin Liu, Xue-Chun Li, You-Nian Wang
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 34, 031305 (2016)
https://doi.org/10.1116/1.4945003
Published: March 2016
View article titled, F-atom kinetics in SF<sub>6</sub>/Ar inductively coupled plasmas
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Journal Articles

Results and problems in the construction phase of the SuperKEKB vacuum system

Yusuke Suetsugu, Ken-ichi Kanazawa, Kyo Shibata, Takuya Ishibashi, Hiromi Hisamatsu, Mitsuru Shirai, Shinji Terui
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 34, 021605 (2016)
https://doi.org/10.1116/1.4942455
Published: February 2016
View article titled, Results and problems in the construction phase of the SuperKEKB vacuum system
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Journal Articles

One-dimensional Ar-SF6 hydromodel at low-pressure in e-beam generated plasmas

George M. Petrov, David R. Boris, Tzvetelina B. Petrova, Scott G. Walton
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 34, 021302 (2016)
https://doi.org/10.1116/1.4940885
Published: February 2016
View article titled, One-dimensional Ar-SF<sub>6</sub> hydromodel at low-pressure in e-beam generated plasmas
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Journal Articles

Enhanced UV photodetector response and recovery times using a nonpolar ZnO sensing layer

Chung-Hua Chao, Wei-Jie Weng, Da-Hua Wei
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 34, 02D106 (2016)
https://doi.org/10.1116/1.4939751
Published: January 2016
View article titled, Enhanced UV photodetector response and recovery times using a nonpolar ZnO sensing layer
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Journal Articles

Simulation of nucleation and growth of atomic layer deposition phosphorus for doping of advanced FinFETs

Thomas E. Seidel, Alexander Goldberg, Mat D. Halls, Michael I. Current
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 34, 01A150 (2016)
https://doi.org/10.1116/1.4938585
Published: December 2015
View article titled, Simulation of nucleation and growth of atomic layer deposition phosphorus for doping of advanced FinFETs
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Journal Articles

Modification of a metal nanoparticle beam by a hollow electrode discharge

Amir Mohammad Ahadi, Alexander Hinz, Oleksandr Polonskyi, Thomas Trottenberg, Thomas Strunskus, Holger Kersten, Franz Faupel
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 34, 021301 (2016)
https://doi.org/10.1116/1.4936188
Published: November 2015
View article titled, Modification of a metal nanoparticle beam by a hollow electrode discharge
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Includes: Supplementary data
Journal Articles

Spatially resolved electron density and electron energy distribution function in Ar magnetron plasmas used for sputter-deposition of ZnO-based thin films

L. Maaloul, R. K. Gangwar, S. Morel, L. Stafford
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 33, 061310 (2015)
https://doi.org/10.1116/1.4934762
Published: October 2015
View article titled, Spatially resolved electron density and electron energy distribution function in Ar magnetron plasmas used for sputter-deposition of ZnO-based thin films
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Journal Articles

Fluorophore-based sensor for oxygen radicals in processing plasmas

Faraz A. Choudhury, Grzegorz Sabat, Michael R. Sussman, Yoshio Nishi, J. Leon Shohet
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 33, 061305 (2015)
https://doi.org/10.1116/1.4930315
Published: September 2015
View article titled, Fluorophore-based sensor for oxygen radicals in processing plasmas
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Journal Articles

Development of high-vacuum planar magnetron sputtering using an advanced magnetic field geometry

Takahiro Ohno, Daisuke Yagyu, Shigeru Saito, Yasunori Ohno, Hirofumi Nakano, Masatoshi Itoh, Yoshio Uhara, Tsutomu Miura
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 33, 063001 (2015)
https://doi.org/10.1116/1.4927442
Published: July 2015
View article titled, Development of high-vacuum planar magnetron sputtering using an advanced magnetic field geometry
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