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Journal Articles
J. Vac. Sci. Technol. A 24, 2159–2163 (2006)
Published: October 2006
Journal Articles
J. Vac. Sci. Technol. A 24, 732–736 (2006)
Published: May 2006
Journal Articles
J. Vac. Sci. Technol. A 24, 763–769 (2006)
Published: May 2006
Journal Articles
J. Vac. Sci. Technol. A 24, 835–840 (2006)
Published: May 2006
Journal Articles
J. Vac. Sci. Technol. A 6, 1745–1748 (1988)
Published: May 1988