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Journal Articles

Atomic layer etching of SiO2 using sequential exposures of Al(CH3)3 and H2/SF6 plasma

Editor’s Pick
David S. Catherall, Azmain A. Hossain, Anthony J. Ardizzi, Austin J. Minnich
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 052605 (2024)
https://doi.org/10.1116/6.0003793
Published: September 2024
View article titled, Atomic layer etching of SiO<sub>2</sub> using sequential exposures of Al(CH<sub>3</sub>)<sub>3</sub> and H<sub>2</sub>/SF<sub>6</sub> plasma
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Journal Articles

Quantum dot lasers—History and future prospects

Justin C. Norman, Richard P. Mirin, John E. Bowers
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 39, 020802 (2021)
https://doi.org/10.1116/6.0000768
Published: January 2021
View article titled, Quantum dot lasers—History and future prospects
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Journal Articles

Review of key vertical-cavity laser and modulator advances enabled by advanced MBE technology

Larry A. Coldren
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 39, 010801 (2021)
https://doi.org/10.1116/6.0000574
Published: November 2020
View article titled, Review of key vertical-cavity laser and modulator advances enabled by advanced MBE technology
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Journal Articles

Gas modulation refractometry for high-precision assessment of pressure under non-temperature-stabilized conditions

Isak Silander, Thomas Hausmaninger, Martin Zelan, Ove Axner
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 36, 03E105 (2018)
https://doi.org/10.1116/1.5022244
Published: April 2018
View article titled, Gas modulation refractometry for high-precision assessment of pressure under non-temperature-stabilized conditions
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Journal Articles

Atomic hydrogen induced defect kinetics in amorphous silicon

Editor’s Pick
Floran J. J. Peeters, Jie Zheng, Igor M. P. Aarts, Andrew C. R. Pipino, Wilhelmus M. M. Kessels, Mauritius C. M. van de Sanden
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 35, 05C307 (2017)
https://doi.org/10.1116/1.4987152
Published: June 2017
View article titled, Atomic hydrogen induced defect kinetics in amorphous silicon
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Journal Articles

Comprehensive study of antireflection coatings for mid-infrared lasers

Jeyran Amirloo, Simarjeet S. Saini, Mario Dagenais
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 34, 061505 (2016)
https://doi.org/10.1116/1.4963373
Published: October 2016
View article titled, Comprehensive study of antireflection coatings for mid-infrared lasers
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Journal Articles

Enhanced quantum efficiency of photoelectron emission, through surface textured metal electrodes

Anna Alexander, Nathan A. Moody, Prabhakar R. Bandaru
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 34, 021401 (2016)
https://doi.org/10.1116/1.4936082
Published: November 2015
View article titled, Enhanced quantum efficiency of photoelectron emission, through surface textured metal electrodes
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Journal Articles

Microscopic silicon-based lateral high-aspect-ratio structures for thin film conformality analysis

Feng Gao, Sanna Arpiainen, Riikka L. Puurunen
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 33, 010601 (2015)
https://doi.org/10.1116/1.4903941
Published: December 2014
View article titled, Microscopic silicon-based lateral high-aspect-ratio structures for thin film conformality analysis
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Journal Articles

Cyclic, cryogenic, highly anisotropic plasma etching of silicon using S F 6 ∕ O 2

A. F. Isakovic, K. Evans-Lutterodt, D. Elliott, A. Stein, J. B. Warren
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 26, 1182–1187 (2008)
https://doi.org/10.1116/1.2960557
Published: August 2008
View article titled, Cyclic, cryogenic, highly anisotropic plasma etching of silicon using S F 6 ∕ O 2
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Journal Articles

Investigation of vacuum system requirements for a 5 km baseline gravitational-wave detector

S. Sunil, D. G. Blair
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 25, 763–768 (2007)
https://doi.org/10.1116/1.2743645
Published: June 2007
View article titled, Investigation of vacuum system requirements for a 5 km baseline gravitational-wave detector
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Journal Articles

Gain spectra of 1.3 μ m GaInNAs laser diodes

X. Zhang, J. A. Gupta, P. J. Barrios, G. Pakulski, X. Wu, A. Delâge
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 24, 787–790 (2006)
https://doi.org/10.1116/1.2186662
Published: May 2006
View article titled, Gain spectra of 1.3 μ m GaInNAs laser diodes
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Journal Articles

Terahertz quantum cascade lasers: Fabrication, characterization, and doping effect

D. Ban, M. Wächter, H. C. Liu, Z. R. Wasilewski, M. Buchanan, G. C. Aers
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 24, 778–782 (2006)
https://doi.org/10.1116/1.2174020
Published: May 2006
View article titled, Terahertz quantum cascade lasers: Fabrication, characterization, and doping effect
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Journal Articles

Monolithic multiple wavelength ridge waveguide laser array fabricated by Nd:YAG laser-induced quantum well intermixing

J. J. Dubowski, Y. Feng, P. J. Poole, M. Buchanan, S. Poirier, J. Genest, V. Aimez
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 20, 1426–1429 (2002)
https://doi.org/10.1116/1.1487876
Published: June 2002
View article titled, Monolithic multiple wavelength ridge waveguide laser array fabricated by Nd:YAG laser-induced quantum well intermixing
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Journal Articles

Widely tunable self-assembled quantum dot lasers

K. Hinzer, C. Nı́. Allen, J. Lapointe, D. Picard, Z. R. Wasilewski, S. Fafard, A. J. SpringThorpe
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 18, 578–581 (2000)
https://doi.org/10.1116/1.582229
Published: March 2000
View article titled, Widely tunable self-assembled quantum dot lasers
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Journal Articles

Failure analysis of high power GaAs-based lasers using electron beam induced current analysis and transmission electron microscopy

R. E. Mallard, R. Clayton, D. Mayer, L. Hobbs
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 16, 825–829 (1998)
https://doi.org/10.1116/1.581066
Published: March 1998
View article titled, Failure analysis of high power GaAs-based lasers using electron beam induced current analysis and transmission electron microscopy
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Journal Articles

Interaction of hydrogen plasmas with hydrocarbon films, investigated by infrared spectroscopy using an optical cavity substrate

A. von Keudell, W. Jacob
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 15, 402–407 (1997)
https://doi.org/10.1116/1.580498
Published: March 1997
View article titled, Interaction of hydrogen plasmas with hydrocarbon films, investigated by infrared spectroscopy using an optical cavity substrate
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Journal Articles

Relating electric field distribution of an electron cyclotron resonance cavity to dry etching characteristics

K. K. Ko, S. W. Pang, M. Dahimene
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 14, 2020–2025 (1996)
https://doi.org/10.1116/1.580077
Published: July 1996
View article titled, Relating electric field distribution of an electron cyclotron resonance cavity to dry etching characteristics
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Journal Articles

Methods to enhance absorption signals in infrared reflectance spectroscopy: A comparison using optical simulations

M. Katiyar, J. R. Abelson
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 13, 2005–2012 (1995)
https://doi.org/10.1116/1.579644
Published: July 1995
View article titled, Methods to enhance absorption signals in infrared reflectance spectroscopy: A comparison using optical simulations
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Journal Articles

Characterization of plasma deposited halocarbon polymer films containing small gold particles

L. Martinů, H. Biederman
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 3, 2639–2642 (1985)
https://doi.org/10.1116/1.572804
Published: November 1985
View article titled, Characterization of plasma deposited halocarbon polymer films containing small gold particles
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