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Journal Articles

Visible/infrared refractive index and phonon properties of GaN films grown on sapphire by hollow-cathode plasma-assisted atomic layer deposition

Nese Gungor, Mustafa Alevli
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 37, 050901 (2019)
https://doi.org/10.1116/1.5097467
Published: July 2019
View article titled, Visible/infrared refractive index and phonon properties of GaN films grown on sapphire by hollow-cathode plasma-assisted atomic layer deposition
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Journal Articles

Reference-free grazing incidence x-ray fluorescence and reflectometry as a methodology for independent validation of x-ray reflectometry on ultrathin layer stacks and a depth-dependent characterization

Philipp Hönicke, Blanka Detlefs, Emmanuel Nolot, Yves Kayser, Uwe Mühle, Beatrix Pollakowski, Burkhard Beckhoff
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 37, 041502 (2019)
https://doi.org/10.1116/1.5094891
Published: May 2019
View article titled, Reference-free grazing incidence x-ray fluorescence and reflectometry as a methodology for independent validation of x-ray reflectometry on ultrathin layer stacks and a depth-dependent characterization
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Journal Articles

Measuring thickness in thin NbN films for superconducting devices

Owen Medeiros, Marco Colangelo, Ilya Charaev, Karl K. Berggren
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 37, 041501 (2019)
https://doi.org/10.1116/1.5088061
Published: May 2019
View article titled, Measuring thickness in thin NbN films for superconducting devices
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Journal Articles

Optical properties of MoO3/Ag/MoO3 multilayer structures determined using spectroscopic ellipsometry

Dae Ho Jung, Hyeon Seob So, Hosun Lee, Jin-Yeong Park, Han-Ki Kim
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 37, 031515 (2019)
https://doi.org/10.1116/1.5095958
Published: May 2019
View article titled, Optical properties of MoO<sub>3</sub>/Ag/MoO<sub>3</sub> multilayer structures determined using spectroscopic ellipsometry
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Journal Articles

Reactive sputter deposition of WO3 films by using two deposition methods

Yoji Yasuda, Yoichi Hoshi, Shin-ichi Kobayashi, Takayuki Uchida, Yutaka Sawada, Meihan Wang, Hao Lei
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 37, 031514 (2019)
https://doi.org/10.1116/1.5092863
Published: May 2019
View article titled, Reactive sputter deposition of WO<sub>3</sub> films by using two deposition methods
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Journal Articles

Tetraallyltin precursor for plasma enhanced atomic layer deposition of tin oxide: Growth study and material characterization

Triratna Muneshwar, Doug Barlage, Ken Cadien
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 37, 030601 (2019)
https://doi.org/10.1116/1.5091944
Published: April 2019
View article titled, Tetraallyltin precursor for plasma enhanced atomic layer deposition of tin oxide: Growth study and material characterization
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Includes: Supplementary data
Journal Articles

Electrical and optical properties of wide-gap n-type Sn2Ta2O7 films

Shunichi Suzuki, Keishi Nishio, Naoto Kikuchi
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 37, 031501 (2019)
https://doi.org/10.1116/1.5081991
Published: February 2019
View article titled, Electrical and optical properties of wide-gap n-type Sn<sub>2</sub>Ta<sub>2</sub>O<sub>7</sub> films
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Journal Articles

Structural and optical properties of high magnesium content wurtzite-Zn1−xMgxO nanowires

Abdiel Rivera, Anas Mazady, John W. Zeller, Ashok K. Sood, Tariq Manzur, Mehdi Anwar
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 37, 020604 (2019)
https://doi.org/10.1116/1.5085837
Published: February 2019
View article titled, Structural and optical properties of high magnesium content wurtzite-Zn<sub>1−x</sub>Mg<sub>x</sub>O nanowires
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Journal Articles

Atomic layer deposition of ultrathin indium oxide and indium tin oxide films using a trimethylindium, tetrakis(dimethylamino)tin, and ozone precursor system

Hossein Salami, Alan Uy, Aarathi Vadapalli, Corinne Grob, Vivek Dwivedi, Raymond A. Adomaitis
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 37, 010905 (2019)
https://doi.org/10.1116/1.5058171
Published: December 2018
View article titled, Atomic layer deposition of ultrathin indium oxide and indium tin oxide films using a trimethylindium, tetrakis(dimethylamino)tin, and ozone precursor system
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Journal Articles

Superconformal coating and filling of deep trenches by chemical vapor deposition with forward-directed fluxes

Tushar K. Talukdar, Wenjiao B. Wang, Gregory S. Girolami, John R. Abelson
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 36, 051513 (2018)
https://doi.org/10.1116/1.5038100
Published: August 2018
View article titled, Superconformal coating and filling of deep trenches by chemical vapor deposition with forward-directed fluxes
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Includes: Supplementary data
Journal Articles

Conformal MgO film grown at high rate at low temperature by forward-directed chemical vapor deposition

Editor’s Pick
Tushar K. Talukdar, Sumeng Liu, Zhejun Zhang, Frank Harwath, Gregory S. Girolami, John R. Abelson
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 36, 051504 (2018)
https://doi.org/10.1116/1.5040855
Published: July 2018
View article titled, Conformal MgO film grown at high rate at low temperature by forward-directed chemical vapor deposition
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Journal Articles

Impact of the sequence of precursor introduction on the growth and properties of atomic layer deposited Al-doped ZnO films

Harold Le Tulzo, Nathanaelle Schneider, Daniel Lincot, Gilles Patriarche, Frédérique Donsanti
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 36, 041502 (2018)
https://doi.org/10.1116/1.5030990
Published: June 2018
View article titled, Impact of the sequence of precursor introduction on the growth and properties of atomic layer deposited Al-doped ZnO films
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Journal Articles

Epitaxial titanium nitride on sapphire: Effects of substrate temperature on microstructure and optical properties

Editor’s Pick
Hadley A. Smith, Said Elhamri, Kurt G. Eyink, Lawrence Grazulis, Madelyn J. Hill, Tyson C. Back, Augustine M. Urbas, Brandon M. Howe, Amber N. Reed
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 36, 03E107 (2018)
https://doi.org/10.1116/1.5022068
Published: May 2018
View article titled, Epitaxial titanium nitride on sapphire: Effects of substrate temperature on microstructure and optical properties
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Journal Articles

Optical characterization of pore filling in mesoporous multilayers by ultrathin atomic layer deposited hafnium dioxide

Andras Kovacs, Ulrich Mescheder
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 36, 031508 (2018)
https://doi.org/10.1116/1.5003355
Published: March 2018
View article titled, Optical characterization of pore filling in mesoporous multilayers by ultrathin atomic layer deposited hafnium dioxide
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Journal Articles

Compositional, structural, and optical properties of atomic layer deposited tantalum oxide for optical fiber sensor overlays

Kamil Kosiel, Karolina Pągowska, Maciej Kozubal, Marek Guziewicz, Krystyna Lawniczak-Jablonska, Rafał Jakieła, Yevgen Syryanyy, Tomasz Gabler, Mateusz Śmietana
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 36, 031505 (2018)
https://doi.org/10.1116/1.5017725
Published: March 2018
View article titled, Compositional, structural, and optical properties of atomic layer deposited tantalum oxide for optical fiber sensor overlays
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Journal Articles

Simple plasma assisted atomic layer deposition technique for high substitutional nitrogen doping of TiO2

Abdullah H. Alshehri, Nathan Nelson-Fitzpatrick, Khaled H. Ibrahim, Kissan Mistry, Mustafa Yavuz, Kevin P. Musselman
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 36, 031602 (2018)
https://doi.org/10.1116/1.5019170
Published: March 2018
View article titled, Simple plasma assisted atomic layer deposition technique for high substitutional nitrogen doping of TiO<sub>2</sub>
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Includes: Supplementary data
Journal Articles

Interferometry of plasma bursts in helium atmospheric-pressure plasma jets

Editor’s Pick
Vladimir Samara, Sylwia Ptasinska
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 36, 04F402 (2018)
https://doi.org/10.1116/1.5023113
Published: March 2018
View article titled, Interferometry of plasma bursts in helium atmospheric-pressure plasma jets
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Includes: Supplementary data
Journal Articles

Amorphous gallium oxide grown by low-temperature PECVD

Eiji Kobayashi, Mathieu Boccard, Quentin Jeangros, Nathan Rodkey, Daniel Vresilovic, Aïcha Hessler-Wyser, Max Döbeli, Daniel Franta, Stefaan De Wolf, Monica Morales-Masis, Christophe Ballif
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 36, 021518 (2018)
https://doi.org/10.1116/1.5018800
Published: March 2018
View article titled, Amorphous gallium oxide grown by low-temperature PECVD
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Includes: Supplementary data
Journal Articles

Plasma assisted low temperature electron beam deposited NiO thin films for electro-optic applications

Mustafa Burak Cosar, Kerem Cagatay Icli, Macit Ozenbas
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 36, 031501 (2018)
https://doi.org/10.1116/1.5013126
Published: March 2018
View article titled, Plasma assisted low temperature electron beam deposited NiO thin films for electro-optic applications
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Journal Articles

Effect of ion energies on the film properties of titanium dioxides synthesized via plasma enhanced atomic layer deposition

Shinya Iwashita, Tsuyoshi Moriya, Takamichi Kikuchi, Munehito Kagaya, Naotaka Noro, Toshio Hasegawa, Akira Uedono
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 36, 021515 (2018)
https://doi.org/10.1116/1.5001552
Published: February 2018
View article titled, Effect of ion energies on the film properties of titanium dioxides synthesized via plasma enhanced atomic layer deposition
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