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Journal Articles

Long and flexible atmospheric pressure plasma jet probes for operation in humid environments

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Jae Young Kim, Gyu Tae Bae, Ye Rin Lee, Sebinn Jang, Eun Young Jung, Heung-Sik Tae
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 043002 (2023)
https://doi.org/10.1116/6.0002710
Published: June 2023
View articletitled, Long and flexible atmospheric pressure plasma jet probes for operation in humid environments
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Journal Articles

Selective vapor sensors with thin-film MoS2-coated optical fibers

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Michael Motala, Lucas K. Beagle, Jason Lynch, David C. Moore, Peter R. Stevenson, Anna Benton, Ly D. Tran, Luke A. Baldwin, Drake Austin, Christopher Muratore, Deep Jariwala, Nicholas R. Glavin
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 032202 (2022)
https://doi.org/10.1116/6.0001759
Published: April 2022
View articletitled, Selective vapor sensors with thin-film MoS2-coated optical fibers
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Includes: Supplementary data
Journal Articles

Surface plasmon resonance is possible in an optical fiber tapered to a point

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Doryne Sunda-Meya, Hans D. Hallen
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 39, 043206 (2021)
https://doi.org/10.1116/6.0000965
Published: June 2021
View articletitled, Surface plasmon resonance is possible in an optical fiber tapered to a point
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Journal Articles

New development of nanoscale spectroscopy using scanning probe microscope

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Khant Minn, Blake Birmingham, Zhenrong Zhang
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 38, 030801 (2020)
https://doi.org/10.1116/1.5142029
Published: April 2020
View articletitled, New development of nanoscale spectroscopy using scanning probe microscope
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Journal Articles

Smallest microhouse in the world, assembled on the facet of an optical fiber by origami and welded in the μRobotex nanofactory

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Jean-Yves Rauch, Olivier Lehmann, Patrick Rougeot, Joel Abadie, Joel Agnus, Miguel. Angel Suarez
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 36, 041601 (2018)
https://doi.org/10.1116/1.5020128
Published: May 2018
View articletitled, Smallest microhouse in the world, assembled on the facet of an optical fiber by origami and welded in the μRobotex nanofactory
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Journal Articles

In situ photoluminescence system for studying surface passivation in silicon heterojunction solar cells

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Sergey N. Abolmasov, Pere Roca i Cabarrocas
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 33, 021201 (2015)
https://doi.org/10.1116/1.4902014
Published: November 2014
View articletitled, In situ photoluminescence system for studying surface passivation in silicon heterojunction solar cells
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Journal Articles

Numerical ellipsometry: n-k plane analysis of transparent conducting films

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D. Barton, F. K. Urban, III
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 29, 041508 (2011)
https://doi.org/10.1116/1.3589803
Published: June 2011
View articletitled, Numerical ellipsometry: n-k plane analysis of transparent conducting films
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Journal Articles

Microstructured optical fiber UHV integration for cold-atom experiments

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J.-F. Clément, T. Vitse, P. Szriftgiser
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 28, 1421–1422 (2010)
https://doi.org/10.1116/1.3497028
Published: November 2010
View articletitled, Microstructured optical fiber UHV integration for cold-atom experiments
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Journal Articles

Ultraviolet curing adhesive-based optical fiber feedthrough for ultrahigh vacuum systems

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J.-F. Clément, D. Bacquet, P. Szriftgiser
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 28, 627–628 (2010)
https://doi.org/10.1116/1.3448023
Published: June 2010
View articletitled, Ultraviolet curing adhesive-based optical fiber feedthrough for ultrahigh vacuum systems
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Journal Articles

Gas temperature measurement in C F 4 , S F 6 , O 2 , Cl 2 , and HBr inductively coupled plasmas

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G. Cunge, R. Ramos, D. Vempaire, M. Touzeau, M. Neijbauer, N. Sadeghi
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 27, 471–478 (2009)
https://doi.org/10.1116/1.3106626
Published: March 2009
View articletitled, Gas temperature measurement in C F 4 , S F 6 , O 2 , Cl 2 , and HBr inductively coupled plasmas
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Journal Articles

Fabrication of surface plasmon waveguides and integrated components on ultrathin freestanding membranes

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Pierre Berini, Nancy Lahoud, Robert Charbonneau
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 26, 1383–1391 (2008)
https://doi.org/10.1116/1.2975196
Published: October 2008
View articletitled, Fabrication of surface plasmon waveguides and integrated components on ultrathin freestanding membranes
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Journal Articles

New design for indentation measurement using fiber Bragg grating

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Jun Chen, Mojtaba Kahrizi
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 24, 2159–2163 (2006)
https://doi.org/10.1116/1.2360977
Published: October 2006
View articletitled, New design for indentation measurement using fiber Bragg grating
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Journal Articles

Rotational and translational temperature equilibrium in an inductively coupled plasma

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Masashi Shimada, George R. Tynan, Robert Cattolica
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 24, 1878–1883 (2006)
https://doi.org/10.1116/1.2244539
Published: August 2006
View articletitled, Rotational and translational temperature equilibrium in an inductively coupled plasma
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Journal Articles

Silicon dioxide etching process for fabrication of micro-optics employing pulse-modulated electron-beam-excited plasma

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Keigo Takeda, Takayuki Ohta, Masafumi Ito, Masaru Hori
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 24, 1725–1729 (2006)
https://doi.org/10.1116/1.2217979
Published: August 2006
View articletitled, Silicon dioxide etching process for fabrication of micro-optics employing pulse-modulated electron-beam-excited plasma
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Journal Articles

Fabrication of out-of-plane micromirrors in silicon-on-insulator planar waveguides

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B. Lamontagne, P. Cheben, E. Post, S. Janz, D.-X. Xu, A. Delâge
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 24, 718–722 (2006)
https://doi.org/10.1116/1.2186656
Published: May 2006
View articletitled, Fabrication of out-of-plane micromirrors in silicon-on-insulator planar waveguides
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Journal Articles

Fabrication of lithographically defined optical coupling facets for silicon-on-insulator waveguides by inductively coupled plasma etching

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K. P. Yap, B. Lamontagne, A. Delâge, S. Janz, A. Bogdanov, M. Picard, E. Post, P. Chow-Chong, M. Malloy, D. Roth, P. Marshall, K. Y. Liu, B. Syrett
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 24, 812–816 (2006)
https://doi.org/10.1116/1.2186657
Published: May 2006
View articletitled, Fabrication of lithographically defined optical coupling facets for silicon-on-insulator waveguides by inductively coupled plasma etching
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Journal Articles

Silicon-on-insulator waveguide photodetector with self-ion-implantation-engineered-enhanced infrared response

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A. P. Knights, J. D. B. Bradley, S. H. Gou, P. E. Jessop
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 24, 783–786 (2006)
https://doi.org/10.1116/1.2167975
Published: May 2006
View articletitled, Silicon-on-insulator waveguide photodetector with self-ion-implantation-engineered-enhanced infrared response
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Journal Articles

Gain spectra of 1.3 μ m GaInNAs laser diodes

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X. Zhang, J. A. Gupta, P. J. Barrios, G. Pakulski, X. Wu, A. Delâge
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 24, 787–790 (2006)
https://doi.org/10.1116/1.2186662
Published: May 2006
View articletitled, Gain spectra of 1.3 μ m GaInNAs laser diodes
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Journal Articles

Electron inelastic mean free path and dielectric properties of a -boron, a -carbon, and their nitrides as determined by quantitative analysis of reflection electron energy loss spectroscopy

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P. Prieto, C. Quirós, E. Elizalde, J. M. Sanz
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 24, 396–407 (2006)
https://doi.org/10.1116/1.2183249
Published: April 2006
View articletitled, Electron inelastic mean free path and dielectric properties of a -boron, a -carbon, and their nitrides as determined by quantitative analysis of reflection electron energy loss spectroscopy
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Journal Articles

Optical switching of vanadium dioxide thin films deposited by reactive pulsed laser deposition

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M. Soltani, M. Chaker, E. Haddad, R. V. Kruzelecky, D. Nikanpour
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 22, 859–864 (2004)
https://doi.org/10.1116/1.1722506
Published: May 2004
View articletitled, Optical switching of vanadium dioxide thin films deposited by reactive pulsed laser deposition
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