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Journal Articles

Effect of discharge pulse frequency on the microstructure and field-emission performance of CN_X films deposited by pulse cathode arc evaporation

Haowei Du, Bing Zhou, D. G. Piliptsou, Hui Sun, Yong Ma, Hongjun Hei, Shengwang Yu, Zhubo Liu

J. Vac. Sci. Technol. A 42, 063410 (2024)

https://doi.org/10.1116/6.0003974

Published: November 2024

View article titled, Effect of discharge pulse frequency on the microstructure and field-emission performance of CNX films deposited by pulse cathode arc evaporation

Journal Articles

Report on laser-induced fluorescence transitions relevant for the microelectronics industry and sustainability applications

V. S. Santosh K. Kondeti, Shurik Yatom, Ivan Romadanov, Yevgeny Raitses, Leonid Dorf, Andrei Khomenko

J. Vac. Sci. Technol. A 42, 063005 (2024)

https://doi.org/10.1116/6.0004070

Published: November 2024

View article titled, Report on laser-induced fluorescence transitions relevant for the microelectronics industry and sustainability applications

Journal Articles

Low-loss and low-temperature Al₂O₃ thin films for integrated photonics and optical coatings

Pooya Torab Ahmadi, Michael Chesaux, Jacek Wojcik, Dino Deligiannis, Peter Mascher, Jonathan D. B. Bradley

J. Vac. Sci. Technol. A 42, 063402 (2024)

https://doi.org/10.1116/6.0003976

Published: October 2024

View article titled, Low-loss and low-temperature Al2O3 thin films for integrated photonics and optical coatings

Journal Articles

Atomic layer etching of SiO₂ using sequential exposures of Al(CH₃)₃ and H₂/SF₆ plasma

David S. Catherall, Azmain A. Hossain, Anthony J. Ardizzi, Austin J. Minnich

J. Vac. Sci. Technol. A 42, 052605 (2024)

https://doi.org/10.1116/6.0003793

Published: September 2024

View article titled, Atomic layer etching of SiO2 using sequential exposures of Al(CH3)3 and H2/SF6 plasma

Journal Articles

Impact of sputtering and redeposition on the morphological profile evolution during ion-beam etching of blazed gratings

Ze-Xuan Liu, Xing-Yu Li, Quan-Zhi Zhang, Julian Schulze, Ruo-Bing Zhang, You-Nian Wang

J. Vac. Sci. Technol. A 42, 053006 (2024)

https://doi.org/10.1116/6.0003745

Published: July 2024

View article titled, Impact of sputtering and redeposition on the morphological profile evolution during ion-beam etching of blazed gratings

Journal Articles

Radiation damage effects on electronic and optical properties of β-Ga₂O₃ from first-principles

Xiaoning Zhang, Xi Liang, Xing Li, Yuan Li, Jia-Yue Yang, Linhua Liu

J. Vac. Sci. Technol. A 42, 033201 (2024)

https://doi.org/10.1116/6.0003430

Published: March 2024

View article titled, Radiation damage effects on electronic and optical properties of β-Ga2O3 from first-principles

Includes: Supplementary data

Journal Articles

Infrared photoelectric detection of polycrystalline Bi₂Te₃ thin films prepared by pulsed laser deposition

Qijun Kao, Yi Xiao, Yongfeng Jia, Jin Wang, Chuanbin Wang

J. Vac. Sci. Technol. A 42, 023421 (2024)

https://doi.org/10.1116/6.0003343

Published: February 2024

View article titled, Infrared photoelectric detection of polycrystalline Bi2Te3 thin films prepared by pulsed laser deposition

Journal Articles

Observation of structural defects in GaN/InGaN multi-quantum wells grown on semipolar ( 11 2 ¯ 2 ) substrate using cathodoluminescence in transmission electron microscopy

Mi-Hyang Sheen, Yong-Hee Lee, Okhyun Nam, Young-Woon Kim

J. Vac. Sci. Technol. A 42, 023413 (2024)

https://doi.org/10.1116/6.0003232

Published: February 2024

View article titled, Observation of structural defects in GaN/InGaN multi-quantum wells grown on semipolar ( 11 2 ¯ 2 ) substrate using cathodoluminescence in transmission electron microscopy

Includes: Supplementary data

Journal Articles

Bottom angle control mechanism and optimization of slanted gratings for optical applications

Jiuru Gao, Chanjuan Liu, Zhiwei He, Shuo Dong, Kaidong Xu, Shiwei Zhuang

J. Vac. Sci. Technol. A 42, 023403 (2024)

https://doi.org/10.1116/6.0003221

Published: January 2024

View article titled, Bottom angle control mechanism and optimization of slanted gratings for optical applications

Journal Articles

Atomic layer deposition of Pt nanoparticles using dimethyl (N, N–dimethyl-3-butene-1-amine−N) platinum and H₂ reactant and its application to 2D WS₂ photodetectors

Dain Shin, Inkyu Sohn, Donghyun Kim, Jaehyeok Kim, Taewook Nam, Youngjun Kim, Jusang Park, Tatsuya Nakazawa, Seung-min Chung, Hyungjun Kim

J. Vac. Sci. Technol. A 42, 012405 (2024)

https://doi.org/10.1116/6.0003194

Published: January 2024

View article titled, Atomic layer deposition of Pt nanoparticles using dimethyl (N, N–dimethyl-3-butene-1-amine−N) platinum and H2 reactant and its application to 2D WS2 photodetectors

Includes: Supplementary data

Journal Articles

Apparatus design of operando hydrogen microscope for visualization of time-dependent distribution of hydrogen

Naoya Miyauchi, Taro Yakabe, Yoshiharu Murase, Masahiro Kitajima, Shoji Takagi, Akiko N. Itakura

J. Vac. Sci. Technol. A 42, 013201 (2024)

https://doi.org/10.1116/6.0003153

Published: December 2023

View article titled, Apparatus design of operando hydrogen microscope for visualization of time-dependent distribution of hydrogen

Journal Articles

Growth of large edge length two-dimensional W S 2 using a custom 12-zone atmospheric pressure chemical vapor deposition system

Md Samim Reza, Aman Abhishek Tiwari, Deshdeep Sahdev, Madhusudan Singh

J. Vac. Sci. Technol. A 42, 012701 (2024)

https://doi.org/10.1116/6.0002985

Published: December 2023

View article titled, Growth of large edge length two-dimensional W S 2 using a custom 12-zone atmospheric pressure chemical vapor deposition system

Includes: Supplementary data

Journal Articles

MOCVD grown ultraviolet microlight-emitting diodes with an InGaN/GaN/AlGaN active region design

Guangying Wang, Yuting Li, Cheng Liu, Qinchen Lin, Surjava Sanyal, Chirag Gupta, Shubhra S. Pasayat

J. Vac. Sci. Technol. A 41, 062706 (2023)

https://doi.org/10.1116/6.0002996

Published: November 2023

View article titled, MOCVD grown ultraviolet microlight-emitting diodes with an InGaN/GaN/AlGaN active region design

Journal Articles

Improved optical efficiency of GaAs-based infrared vertical-cavity surface-emitting laser enabled by combining a metallic reflector and a Bragg reflector

In-Kyu Jang, Hyung-Joo Lee, Dae-Kwang Kim, Lee-Ku Kwac, Sung Woon Cho

J. Vac. Sci. Technol. A 41, 063415 (2023)

https://doi.org/10.1116/6.0002975

Published: November 2023

View article titled, Improved optical efficiency of GaAs-based infrared vertical-cavity surface-emitting laser enabled by combining a metallic reflector and a Bragg reflector

Journal Articles

Fabrication of antireflective coatings with self-cleaning function using Si–Ti modified hollow silicon mixed sol

Yufan Li, Yong Zheng, Yuze Du, Xi Zhang, Wangwang Wang, Jin Lv

J. Vac. Sci. Technol. A 41, 063411 (2023)

https://doi.org/10.1116/6.0003082

Published: November 2023

View article titled, Fabrication of antireflective coatings with self-cleaning function using Si–Ti modified hollow silicon mixed sol

Journal Articles

Electrochromic properties of NiO films prepared by atomic layer deposition

Xi Su, Zexin Tu, Liwei Ji, Hao Wu, Hongxing Xu, Chang Liu

J. Vac. Sci. Technol. A 41, 062407 (2023)

https://doi.org/10.1116/6.0003040

Published: October 2023

View article titled, Electrochromic properties of NiO films prepared by atomic layer deposition

Journal Articles

Enhancing biocompatibility, mechanical properties, and corrosion resistance of laser cladding β-TiNb coatings

Yu Zheng, Peng Xu, Long Li, Qibin Liu, Shanzhu Guo

J. Vac. Sci. Technol. A 41, 063103 (2023)

https://doi.org/10.1116/6.0002885

Published: September 2023

View article titled, Enhancing biocompatibility, mechanical properties, and corrosion resistance of laser cladding β-TiNb coatings

Journal Articles

Full-angle high-reflection ultrathin composite film realizing high spatial resolution of scintillation crystal array

Jing Yang, Linwei Wang, Zhang Chen, Zhongjun Xue, Shuwen Zhao, Dongzhou Ding

J. Vac. Sci. Technol. A 41, 063401 (2023)

https://doi.org/10.1116/6.0002875

Published: September 2023

View article titled, Full-angle high-reflection ultrathin composite film realizing high spatial resolution of scintillation crystal array

Includes: Supplementary data

Journal Articles

Mechanical and optical properties of amorphous silicon nitride-based films prepared by electron cyclotron resonance plasma-enhanced chemical vapor deposition

Brahim Ahammou, Paramita Bhattacharyya, Christophe Levallois, Fahmida Azmi, Jean-Pierre Landesman, Peter Mascher

J. Vac. Sci. Technol. A 41, 053113 (2023)

https://doi.org/10.1116/6.0002896

Published: August 2023

View article titled, Mechanical and optical properties of amorphous silicon nitride-based films prepared by electron cyclotron resonance plasma-enhanced chemical vapor deposition

Journal Articles

Recombination mechanism of heavily Be-doped GaAsN by time-resolved photoluminescence

Takashi Tsukasaki, Hisashi Sumikura, Takuma Fujimoto, Miki Fujita, Toshiki Makimoto

J. Vac. Sci. Technol. A 41, 052702 (2023)

https://doi.org/10.1116/6.0002522

Published: July 2023

View article titled, Recombination mechanism of heavily Be-doped GaAsN by time-resolved photoluminescence

NARROW

Topics

Effect of discharge pulse frequency on the microstructure and field-emission performance of CN_X films deposited by pulse cathode arc evaporation

Report on laser-induced fluorescence transitions relevant for the microelectronics industry and sustainability applications

Low-loss and low-temperature Al₂O₃ thin films for integrated photonics and optical coatings

Atomic layer etching of SiO₂ using sequential exposures of Al(CH₃)₃ and H₂/SF₆ plasma

Impact of sputtering and redeposition on the morphological profile evolution during ion-beam etching of blazed gratings

Radiation damage effects on electronic and optical properties of β-Ga₂O₃ from first-principles

Infrared photoelectric detection of polycrystalline Bi₂Te₃ thin films prepared by pulsed laser deposition

Observation of structural defects in GaN/InGaN multi-quantum wells grown on semipolar ( 11 2 ¯ 2 ) substrate using cathodoluminescence in transmission electron microscopy

Bottom angle control mechanism and optimization of slanted gratings for optical applications

Atomic layer deposition of Pt nanoparticles using dimethyl (N, N–dimethyl-3-butene-1-amine−N) platinum and H₂ reactant and its application to 2D WS₂ photodetectors

Apparatus design of operando hydrogen microscope for visualization of time-dependent distribution of hydrogen

Growth of large edge length two-dimensional W S 2 using a custom 12-zone atmospheric pressure chemical vapor deposition system

MOCVD grown ultraviolet microlight-emitting diodes with an InGaN/GaN/AlGaN active region design

Improved optical efficiency of GaAs-based infrared vertical-cavity surface-emitting laser enabled by combining a metallic reflector and a Bragg reflector

Fabrication of antireflective coatings with self-cleaning function using Si–Ti modified hollow silicon mixed sol

Electrochromic properties of NiO films prepared by atomic layer deposition

Enhancing biocompatibility, mechanical properties, and corrosion resistance of laser cladding β-TiNb coatings

Full-angle high-reflection ultrathin composite film realizing high spatial resolution of scintillation crystal array

Mechanical and optical properties of amorphous silicon nitride-based films prepared by electron cyclotron resonance plasma-enhanced chemical vapor deposition

Recombination mechanism of heavily Be-doped GaAsN by time-resolved photoluminescence

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