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Journal Articles

MOCVD grown ultraviolet microlight-emitting diodes with an InGaN/GaN/AlGaN active region design

Guangying Wang, Yuting Li, Cheng Liu, Qinchen Lin, Surjava Sanyal, Chirag Gupta, Shubhra S. Pasayat
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 062706 (2023)
https://doi.org/10.1116/6.0002996
Published: November 2023
View article titled, MOCVD grown ultraviolet microlight-emitting diodes with an InGaN/GaN/AlGaN active region design
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Journal Articles

Improved optical efficiency of GaAs-based infrared vertical-cavity surface-emitting laser enabled by combining a metallic reflector and a Bragg reflector

In-Kyu Jang, Hyung-Joo Lee, Dae-Kwang Kim, Lee-Ku Kwac, Sung Woon Cho
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 063415 (2023)
https://doi.org/10.1116/6.0002975
Published: November 2023
View article titled, Improved optical efficiency of GaAs-based infrared vertical-cavity surface-emitting laser enabled by combining a metallic reflector and a Bragg reflector
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Journal Articles

Fabrication of antireflective coatings with self-cleaning function using Si–Ti modified hollow silicon mixed sol

Yufan Li, Yong Zheng, Yuze Du, Xi Zhang, Wangwang Wang, Jin Lv
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 063411 (2023)
https://doi.org/10.1116/6.0003082
Published: November 2023
View article titled, Fabrication of antireflective coatings with self-cleaning function using Si–Ti modified hollow silicon mixed sol
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Journal Articles

Electrochromic properties of NiO films prepared by atomic layer deposition

Xi Su, Zexin Tu, Liwei Ji, Hao Wu, Hongxing Xu, Chang Liu
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 062407 (2023)
https://doi.org/10.1116/6.0003040
Published: October 2023
View article titled, Electrochromic properties of NiO films prepared by atomic layer deposition
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Journal Articles

Enhancing biocompatibility, mechanical properties, and corrosion resistance of laser cladding β-TiNb coatings

Yu Zheng, Peng Xu, Long Li, Qibin Liu, Shanzhu Guo
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 063103 (2023)
https://doi.org/10.1116/6.0002885
Published: September 2023
View article titled, Enhancing biocompatibility, mechanical properties, and corrosion resistance of laser cladding β-TiNb coatings
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Journal Articles

Full-angle high-reflection ultrathin composite film realizing high spatial resolution of scintillation crystal array

Jing Yang, Linwei Wang, Zhang Chen, Zhongjun Xue, Shuwen Zhao, Dongzhou Ding
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 063401 (2023)
https://doi.org/10.1116/6.0002875
Published: September 2023
View article titled, Full-angle high-reflection ultrathin composite film realizing high spatial resolution of scintillation crystal array
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Includes: Supplementary data
Journal Articles

Mechanical and optical properties of amorphous silicon nitride-based films prepared by electron cyclotron resonance plasma-enhanced chemical vapor deposition

Brahim Ahammou, Paramita Bhattacharyya, Christophe Levallois, Fahmida Azmi, Jean-Pierre Landesman, Peter Mascher
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 053113 (2023)
https://doi.org/10.1116/6.0002896
Published: August 2023
View article titled, Mechanical and optical properties of amorphous silicon nitride-based films prepared by electron cyclotron resonance plasma-enhanced chemical vapor deposition
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Journal Articles

Recombination mechanism of heavily Be-doped GaAsN by time-resolved photoluminescence

Takashi Tsukasaki, Hisashi Sumikura, Takuma Fujimoto, Miki Fujita, Toshiki Makimoto
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 052702 (2023)
https://doi.org/10.1116/6.0002522
Published: July 2023
View article titled, Recombination mechanism of heavily Be-doped GaAsN by time-resolved photoluminescence
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Journal Articles

Review of virtual substrate technologies for 6.3 Ångström lattice constants

Stefan P. Svensson, Nadeemullah A. Mahadik, Gela Kipshidze, Dmitri Donetski, Jingze Zhao, Gregory Belenky
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 040802 (2023)
https://doi.org/10.1116/6.0002715
Published: June 2023
View article titled, Review of virtual substrate technologies for 6.3 Ångström lattice constants
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Journal Articles

Dependence of persistent photoconductivity on the thickness of β-Ga2O3 thin film photodetectors on c-plane sapphire via magnetron sputtering

Damanpreet Kaur, Rohit Dahiya, Mukesh Kumar
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 043410 (2023)
https://doi.org/10.1116/6.0002646
Published: June 2023
View article titled, Dependence of persistent photoconductivity on the thickness of β-Ga<sub>2</sub>O<sub>3</sub> thin film photodetectors on <em>c</em>-plane sapphire via magnetron sputtering
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Journal Articles

Design and fabrication of color-generating nitride based thin-film optical filters for photovoltaic applications

Paramita Bhattacharyya, Brahim Ahammou, Fahmida Azmi, Rafael Kleiman, Peter Mascher
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 033409 (2023)
https://doi.org/10.1116/6.0002357
Published: May 2023
View article titled, Design and fabrication of color-generating nitride based thin-film optical filters for photovoltaic applications
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Journal Articles

Design of InGaN-ZnSnGa2N4 quantum wells for high-efficiency amber light emitting diodes

Kaitian Zhang, Chenxi Hu, Vijay Gopal Thirupakuzi Vangipuram, Kathleen Kash, Hongping Zhao
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 033206 (2023)
https://doi.org/10.1116/6.0002524
Published: April 2023
View article titled, Design of InGaN-ZnSnGa<sub>2</sub>N<sub>4</sub> quantum wells for high-efficiency amber light emitting diodes
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Journal Articles

Hybrid octa-silane polyhedral oligomeric silsesquioxane (OS-POSS) optical films prepared by ion beam assisted evaporation

Artem Shelemin, Oleg Zabeida, Jincheng Qian, Jolanta Klemberg-Sapieha, Ludvik Martinu
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 023409 (2023)
https://doi.org/10.1116/6.0002371
Published: February 2023
View article titled, Hybrid octa-silane polyhedral oligomeric silsesquioxane (OS-POSS) optical films prepared by ion beam assisted evaporation
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Includes: Supplementary data
Journal Articles

Aluminum nitride crystal-based photodetector with bias polarity-dependent spectral selectivity

Zelong Fan, Zuoyan Qin, Lei Jin, Yuan Cao, Zhongyu Yue, Baikui Li, Honglei Wu, Zhenhua Sun
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 013204 (2023)
https://doi.org/10.1116/5.0133162
Published: December 2022
View article titled, Aluminum nitride crystal-based photodetector with bias polarity-dependent spectral selectivity
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Includes: Supplementary data
Journal Articles

Electron beam-induced etching of SiO2, Si3N4, and poly-Si assisted by CF4/O2 remote plasma

Kang-Yi Lin, Christian Preischl, Christian Felix Hermanns, Daniel Rhinow, Hans-Michael Solowan, Michael Budach, Hubertus Marbach, Klaus Edinger, G. S. Oehrlein
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 013004 (2023)
https://doi.org/10.1116/6.0002234
Published: December 2022
View article titled, Electron beam-induced etching of SiO<sub>2</sub>, Si<sub>3</sub>N<sub>4</sub>, and poly-Si assisted by CF<sub>4</sub>/O<sub>2</sub> remote plasma
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Journal Articles

Photoelectron spectroscopic studies on metal halide perovskite materials

Shuang-Qiao Sun, Man-Keung Fung, Shuit-Tong Lee
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 060801 (2022)
https://doi.org/10.1116/6.0001903
Published: September 2022
View article titled, Photoelectron spectroscopic studies on metal halide perovskite materials
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Journal Articles

Surface oxidation of hydrophobic ZnSe for enhanced growth of atomic layer deposited aluminum oxide

Corbin Feit, Jaynlynn Sosa, Alexandros Kostogiannes, Matthieu Chazot, Nicholas G. Rudawski, Titel Jurca, Kathleen A. Richardson, Parag Banerjee
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 052402 (2022)
https://doi.org/10.1116/6.0002018
Published: August 2022
View article titled, Surface oxidation of hydrophobic ZnSe for enhanced growth of atomic layer deposited aluminum oxide
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Journal Articles

Thermal stability and high-temperature photoluminescence of chemical vapor deposited MoS2 in different atmosphere

Rongsheng Li, Junyao Yu, Bing Yao, Zhenjia Zhou, Guowen Yuan, Jie Xu, Libo Gao
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 052201 (2022)
https://doi.org/10.1116/5.0095120
Published: August 2022
View article titled, Thermal stability and high-temperature photoluminescence of chemical vapor deposited MoS<sub>2</sub> in different atmosphere
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Includes: Supplementary data
Journal Articles

Optical dielectric properties of HfO2-based films

Hongyi Dou, Nives Strkalj, Yizhi Zhang, Judith L. MacManus-Driscoll, Quanxi Jia, Haiyan Wang
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 033412 (2022)
https://doi.org/10.1116/6.0001651
Published: April 2022
View article titled, Optical dielectric properties of HfO<sub>2</sub>-based films
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Journal Articles

Thorium model and weak 5f delocalization

J. G. Tobin, S. Nowak, S.-W. Yu, P. Roussel, R. Alonso-Mori, T. Kroll, D. Nordlund, T.-C. Weng, D. Sokaras
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 033205 (2022)
https://doi.org/10.1116/6.0001754
Published: April 2022
View article titled, Thorium model and weak 5f delocalization
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