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Journal Articles

Low-loss and low-temperature Al2O3 thin films for integrated photonics and optical coatings

Editor’s Pick
Pooya Torab Ahmadi, Michael Chesaux, Jacek Wojcik, Dino Deligiannis, Peter Mascher, Jonathan D. B. Bradley
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 063402 (2024)
https://doi.org/10.1116/6.0003976
Published: October 2024
View article titled, Low-loss and low-temperature Al<sub>2</sub>O<sub>3</sub> thin films for integrated photonics and optical coatings
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Journal Articles

Fabrication of antireflective coatings with self-cleaning function using Si–Ti modified hollow silicon mixed sol

Yufan Li, Yong Zheng, Yuze Du, Xi Zhang, Wangwang Wang, Jin Lv
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 063411 (2023)
https://doi.org/10.1116/6.0003082
Published: November 2023
View article titled, Fabrication of antireflective coatings with self-cleaning function using Si–Ti modified hollow silicon mixed sol
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Journal Articles

Enhancing biocompatibility, mechanical properties, and corrosion resistance of laser cladding β-TiNb coatings

Yu Zheng, Peng Xu, Long Li, Qibin Liu, Shanzhu Guo
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 063103 (2023)
https://doi.org/10.1116/6.0002885
Published: September 2023
View article titled, Enhancing biocompatibility, mechanical properties, and corrosion resistance of laser cladding β-TiNb coatings
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Journal Articles

Mechanical and optical properties of amorphous silicon nitride-based films prepared by electron cyclotron resonance plasma-enhanced chemical vapor deposition

Brahim Ahammou, Paramita Bhattacharyya, Christophe Levallois, Fahmida Azmi, Jean-Pierre Landesman, Peter Mascher
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 053113 (2023)
https://doi.org/10.1116/6.0002896
Published: August 2023
View article titled, Mechanical and optical properties of amorphous silicon nitride-based films prepared by electron cyclotron resonance plasma-enhanced chemical vapor deposition
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Journal Articles

Hybrid octa-silane polyhedral oligomeric silsesquioxane (OS-POSS) optical films prepared by ion beam assisted evaporation

Artem Shelemin, Oleg Zabeida, Jincheng Qian, Jolanta Klemberg-Sapieha, Ludvik Martinu
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 023409 (2023)
https://doi.org/10.1116/6.0002371
Published: February 2023
View article titled, Hybrid octa-silane polyhedral oligomeric silsesquioxane (OS-POSS) optical films prepared by ion beam assisted evaporation
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Includes: Supplementary data
Journal Articles

Optical dielectric properties of HfO2-based films

Hongyi Dou, Nives Strkalj, Yizhi Zhang, Judith L. MacManus-Driscoll, Quanxi Jia, Haiyan Wang
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 033412 (2022)
https://doi.org/10.1116/6.0001651
Published: April 2022
View article titled, Optical dielectric properties of HfO<sub>2</sub>-based films
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Journal Articles

Ion beam assisted chemical vapor deposition of hybrid coatings—Process diagnostics and mechanisms

Scilight
Artem Shelemin, Oleg Zabeida, Jolanta-Ewa Klemberg-Sapieha, Ludvik Martinu
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 39, 063003 (2021)
https://doi.org/10.1116/6.0001291
Published: October 2021
View article titled, Ion beam assisted chemical vapor deposition of hybrid coatings—Process diagnostics and mechanisms
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Includes: Supplementary data
Journal Articles

Multilayer ultraviolet reflective coating based on atomic layer deposited aluminum oxide and fluoride

Scilight
Zhiyu Huang, Daniel C. Messina, Brianna S. Eller, Franz A. Koeck, Paul A. Scowen, Robert J. Nemanich
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 39, 042402 (2021)
https://doi.org/10.1116/6.0001010
Published: June 2021
View article titled, Multilayer ultraviolet reflective coating based on atomic layer deposited aluminum oxide and fluoride
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Journal Articles

Effect of anti-reflection coating on the performance of silicon solar cells with nanocrystalline quantum dots downshifting film

Ala H. Sabeeh, Alyssa N. Brigman, Jerzy Ruzyllo
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 39, 032802 (2021)
https://doi.org/10.1116/6.0000833
Published: May 2021
View article titled, Effect of anti-reflection coating on the performance of silicon solar cells with nanocrystalline quantum dots downshifting film
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Journal Articles

Atomic layer deposition of TbF3 thin films

Elisa Atosuo, Juha Ojala, Mikko J. Heikkilä, Miika Mattinen, Kenichiro Mizohata, Jyrki Räisänen, Markku Leskelä, Mikko Ritala
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 39, 022404 (2021)
https://doi.org/10.1116/6.0000790
Published: February 2021
View article titled, Atomic layer deposition of TbF<sub>3</sub> thin films
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Journal Articles

Role of high aspect-ratio thin-film metal deposition in Cu back-end-of-line technology

Andrew Simon, Oscar van der Straten, Nicholas A. Lanzillo, Chih-Chao Yang, Takeshi Nogami, Daniel C. Edelstein
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 38, 053402 (2020)
https://doi.org/10.1116/6.0000170
Published: July 2020
View article titled, Role of high aspect-ratio thin-film metal deposition in Cu back-end-of-line technology
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Journal Articles

Simultaneous realization of infrared-light switching and high visible-light transmittance in extremely thin VO2 films grown on ZnO-nanorods buffered glasses

Tatsuro Fukuzumi, Fei Chen, Kunio Okimura, Iwao Yamaguchi, Tetsuo Tsuchiya
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 38, 033407 (2020)
https://doi.org/10.1116/1.5142212
Published: April 2020
View article titled, Simultaneous realization of infrared-light switching and high visible-light transmittance in extremely thin VO<sub>2</sub> films grown on ZnO-nanorods buffered glasses
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Journal Articles

Atomic layer deposited ultrathin metal nitride barrier layers for ruthenium interconnect applications

Sonal Dey, Kai-Hung Yu, Steven Consiglio, Kandabara Tapily, Takahiro Hakamata, Cory S. Wajda, Gert J. Leusink, Jean Jordan-Sweet, Christian Lavoie, David Muir, Beatriz Moreno, Alain C. Diebold
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 35, 03E109 (2017)
https://doi.org/10.1116/1.4979709
Published: April 2017
View article titled, Atomic layer deposited ultrathin metal nitride barrier layers for ruthenium interconnect applications
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Includes: Supplementary data
Journal Articles

Performance and durability of broadband antireflection coatings for thin film CdTe solar cells

Editor’s Pick
Gerald Womack, Piotr M. Kaminski, Ali Abbas, Kenan Isbilir, Ralph Gottschalg, John Michael Walls
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 35, 021201 (2017)
https://doi.org/10.1116/1.4973909
Published: January 2017
View article titled, Performance and durability of broadband antireflection coatings for thin film CdTe solar cells
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Journal Articles

Comprehensive study of antireflection coatings for mid-infrared lasers

Jeyran Amirloo, Simarjeet S. Saini, Mario Dagenais
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 34, 061505 (2016)
https://doi.org/10.1116/1.4963373
Published: October 2016
View article titled, Comprehensive study of antireflection coatings for mid-infrared lasers
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Journal Articles

New leak assembly based on fluidic nanochannels

Aiqing Zhu, Yongheng Zhao, Xudi Wang, Yu Wang, Wei Wei, Keqiang Qiu, Dong Dong
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 34, 050604 (2016)
https://doi.org/10.1116/1.4960646
Published: August 2016
View article titled, New leak assembly based on fluidic nanochannels
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Journal Articles

Diffusion of water into permeation barrier layers

Bhadri Visweswaran, Prashant Mandlik, Siddharth Harikrishna Mohan, Jeff A. Silvernail, Ruiqing Ma, James C. Sturm, Sigurd Wagner
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 33, 031513 (2015)
https://doi.org/10.1116/1.4918327
Published: April 2015
View article titled, Diffusion of water into permeation barrier layers
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Journal Articles

Vacuum thermal evaporation of polyaniline doped with camphor sulfonic acid

Devon Boyne, Nicola Menegazzo, Rachel C. Pupillo, Joel Rosenthal, Karl S. Booksh
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 33, 031510 (2015)
https://doi.org/10.1116/1.4916990
Published: April 2015
View article titled, Vacuum thermal evaporation of polyaniline doped with camphor sulfonic acid
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Journal Articles

Atomic layer deposition of magnesium fluoride via bis(ethylcyclopentadienyl)magnesium and anhydrous hydrogen fluoride

John Hennessy, April D. Jewell, Frank Greer, Michael C. Lee, Shouleh Nikzad
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 33, 01A125 (2015)
https://doi.org/10.1116/1.4901808
Published: November 2014
View article titled, Atomic layer deposition of magnesium fluoride via bis(ethylcyclopentadienyl)magnesium and anhydrous hydrogen fluoride
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Journal Articles

Stability and annealing of alucones and alucone alloys

Lilit Ghazaryan, Ernst-Bernhard Kley, Andreas Tünnermann, Adriana Viorica Szeghalmi
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 31, 01A149 (2013)
https://doi.org/10.1116/1.4773296
Published: December 2012
View article titled, Stability and annealing of alucones and alucone alloys
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