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Journal Articles

In-cycle evolution of thickness and roughness parameters during oxygen plasma enhanced ZnO atomic layer deposition using in situ spectroscopic ellipsometry

Editor’s Pick
Yousra Traouli, Ufuk Kilic, Sema G. Kilic, Matthew Hilfiker, Daniel Schmidt, Stefan Schoeche, Eva Schubert, Mathias Schubert
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 052403 (2024)
https://doi.org/10.1116/6.0003830
Published: September 2024
View article titled, In-cycle evolution of thickness and roughness parameters during oxygen plasma enhanced ZnO atomic layer deposition using <em>in situ</em> spectroscopic ellipsometry
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Journal Articles

Radiation damage effects on electronic and optical properties of β-Ga2O3 from first-principles

Xiaoning Zhang, Xi Liang, Xing Li, Yuan Li, Jia-Yue Yang, Linhua Liu
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 42, 033201 (2024)
https://doi.org/10.1116/6.0003430
Published: March 2024
View article titled, Radiation damage effects on electronic and optical properties of <em>β</em>-Ga<sub>2</sub>O<sub>3</sub> from first-principles
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Includes: Supplementary data
Journal Articles

Growth and optical properties of NiO thin films deposited by pulsed dc reactive magnetron sputtering

Faezeh A. F. Lahiji, Samiran Bairagi, Roger Magnusson, Mauricio A. Sortica, Daniel Primetzhofer, Erik Ekström, Biplab Paul, Arnaud le Febvrier, Per Eklund
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 063402 (2023)
https://doi.org/10.1116/6.0002914
Published: September 2023
View article titled, Growth and optical properties of NiO thin films deposited by pulsed dc reactive magnetron sputtering
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Includes: Supplementary data
Journal Articles

Spatiotemporal evolution of excitation temperature of vacuum arcs by tomography

Bo Cao, Rui Li, Zhiyuan Cao, Haomin Li, Liqiong Sun, Yingsan Geng, Jianhua Wang, Zhenxing Wang
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 053006 (2023)
https://doi.org/10.1116/6.0002876
Published: August 2023
View article titled, Spatiotemporal evolution of excitation temperature of vacuum arcs by tomography
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Journal Articles

Review of virtual substrate technologies for 6.3 Ångström lattice constants

Stefan P. Svensson, Nadeemullah A. Mahadik, Gela Kipshidze, Dmitri Donetski, Jingze Zhao, Gregory Belenky
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 040802 (2023)
https://doi.org/10.1116/6.0002715
Published: June 2023
View article titled, Review of virtual substrate technologies for 6.3 Ångström lattice constants
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Journal Articles

Understanding the unique optical and vibrational signatures of sequential infiltration synthesis derived indium oxyhydroxide clusters for CO2 absorption

Thabiso Kunene, Alex B. F. Martinson
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 042402 (2023)
https://doi.org/10.1116/6.0002664
Published: June 2023
View article titled, Understanding the unique optical and vibrational signatures of sequential infiltration synthesis derived indium oxyhydroxide clusters for CO<sub>2</sub> absorption
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Includes: Supplementary data
Journal Articles

Transient photocapacitance spectroscopy of deep-levels in (001) β-Ga2O3

Editor’s Pick
Fenfen Fenda Florena, Aboulaye Traoré, Takeaki Sakurai
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 41, 033205 (2023)
https://doi.org/10.1116/6.0002378
Published: March 2023
View article titled, Transient photocapacitance spectroscopy of deep-levels in (001) <em>β</em>-Ga<sub>2</sub>O<sub>3</sub>
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Journal Articles

Bandgap engineering of indium gallium nitride layers grown by plasma-enhanced chemical vapor deposition

Jonathan Emanuel Thomet, Aman Kamlesh Singh, Mélanie Nelly Rouèche, Nils Toggwyler, Franz-Josef Haug, Gabriel Christmann, Sylvain Nicolay, Christophe Ballif, Nicolas Wyrsch, Aïcha Hessler-Wyser, Mathieu Boccard
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 063102 (2022)
https://doi.org/10.1116/6.0002039
Published: November 2022
View article titled, Bandgap engineering of indium gallium nitride layers grown by plasma-enhanced chemical vapor deposition
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Journal Articles

Quantitative analysis of composition and temperature of semiconductor processing plasmas via terahertz spectroscopy

Yaser H. Helal, Christopher F. Neese, Frank C. De Lucia, Phillip J. Stout, Barry Craver, Michael Armacost
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 043004 (2022)
https://doi.org/10.1116/6.0001843
Published: June 2022
View article titled, Quantitative analysis of composition and temperature of semiconductor processing plasmas via terahertz spectroscopy
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Journal Articles

Electronic structure and anion engineering for perovskite oxysulfide BaTi(O,S)3

Jingjing Liu, Sa Zhang, Ming Jiang, Haiyan Xiao, Shan Feng, Liang Qiao
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 012801 (2022)
https://doi.org/10.1116/6.0001471
Published: December 2021
View article titled, Electronic structure and anion engineering for perovskite oxysulfide BaTi(O,S)<sub>3</sub>
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Journal Articles

Hole selective nickel oxide as transparent conductive oxide

David Tröger, Johanna Reif, Thomas Mikolajick, Matthias Grube
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 013409 (2022)
https://doi.org/10.1116/6.0001391
Published: December 2021
View article titled, Hole selective nickel oxide as transparent conductive oxide
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Includes: Supplementary data
Journal Articles

Effect of heat treatment on the optical, structural, and morphological properties of Eu3+-doped CaTa4O11 thin films

Shinho Cho
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 40, 013406 (2022)
https://doi.org/10.1116/6.0001440
Published: December 2021
View article titled, Effect of heat treatment on the optical, structural, and morphological properties of Eu<sup>3+</sup>-doped CaTa<sub>4</sub>O<sub>11</sub> thin films
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Journal Articles

Impact of ion species on ion beam sputtered Ta2O5 layer quality parameters and on corresponding process productivity: A preinvestigation for large-area coatings

Wjatscheslaw Sakiew, Philippe Schwerdtner, Marco Jupé, Andreas Pflug, Detlev Ristau
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 39, 063402 (2021)
https://doi.org/10.1116/6.0001224
Published: September 2021
View article titled, Impact of ion species on ion beam sputtered Ta<sub>2</sub>O<sub>5</sub> layer quality parameters and on corresponding process productivity: A preinvestigation for large-area coatings
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Journal Articles

Influence of plasma power on deposition mechanism and structural properties of MoOx thin films by plasma enhanced atomic layer deposition

Chen Wang, Chun-Hui Bao, Wan-Yu Wu, Chia-Hsun Hsu, Ming-Jie Zhao, Shui-Yang Lien, Wen-Zhang Zhu
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 39, 032415 (2021)
https://doi.org/10.1116/6.0000968
Published: May 2021
View article titled, Influence of plasma power on deposition mechanism and structural properties of MoO<em><sub>x</sub></em> thin films by plasma enhanced atomic layer deposition
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Journal Articles

Material properties and performance of ErAs:In(Al)GaAs photoconductors for 1550 nm laser operation

U. Nandi, M. Mohammadi, H. Lu, J. Norman, A. C. Gossard, L. Alff, S. Preu
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 39, 023407 (2021)
https://doi.org/10.1116/6.0000773
Published: February 2021
View article titled, Material properties and performance of ErAs:In(Al)GaAs photoconductors for 1550 nm laser operation
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Journal Articles

Physical vapor deposition of the halide perovskite CsBi2Br7

Editor’s Pick
Minh N. Tran, Iver J. Cleveland, Eray S. Aydil
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 39, 013409 (2021)
https://doi.org/10.1116/6.0000604
Published: January 2021
View article titled, Physical vapor deposition of the halide perovskite CsBi<sub>2</sub>Br<sub>7</sub>
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Includes: Supplementary data
Journal Articles

Effect of N2/H2 plasma on the growth of InN thin films on sapphire by hollow-cathode plasma-assisted atomic layer deposition

Mustafa Alevli, Nese Gungor
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 38, 062407 (2020)
https://doi.org/10.1116/6.0000494
Published: October 2020
View article titled, Effect of N<sub>2</sub>/H<sub>2</sub> plasma on the growth of InN thin films on sapphire by hollow-cathode plasma-assisted atomic layer deposition
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Includes: Supplementary data
Journal Articles

Opto-electrical characterization of quaternary sputtered copper indium gallium selenide nanorods via glancing angle deposition

Matthew Brozak, Emad Badraddin, Tansel Karabacak, Thomas Walsh
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 38, 062801 (2020)
https://doi.org/10.1116/6.0000382
Published: October 2020
View article titled, Opto-electrical characterization of quaternary sputtered copper indium gallium selenide nanorods via glancing angle deposition
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Journal Articles

Ablation of piezoelectric polyvinylidene fluoride with a 193 nm excimer laser

Jeffrey Elloian, Jeffrey Sherman, Tiago Costa, Chen Shi, Kenneth Shepard
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 38, 033202 (2020)
https://doi.org/10.1116/1.5142494
Published: March 2020
View article titled, Ablation of piezoelectric polyvinylidene fluoride with a 193 nm excimer laser
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Journal Articles

Atomic layer deposition of cobalt phosphate from cobaltocene, trimethylphosphate, and O2 plasma

Valerio Di Palma, Harm C. M. Knoops, Wilhelmus M. M. (Erwin) Kessels, Mariadriana Creatore
Journal: Journal of Vacuum Science & Technology A
J. Vac. Sci. Technol. A 38, 022416 (2020)
https://doi.org/10.1116/1.5143896
Published: February 2020
View article titled, Atomic layer deposition of cobalt phosphate from cobaltocene, trimethylphosphate, and O<sub>2</sub> plasma
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Includes: Supplementary data