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Journal Articles
V. S. Santosh K. Kondeti, Shurik Yatom, Ivan Romadanov, Yevgeny Raitses, Leonid Dorf, Andrei Khomenko
J. Vac. Sci. Technol. A 42, 063005 (2024)
Published: November 2024
Journal Articles
J. G. Tobin, S. Nowak, S.-W. Yu, P. Roussel, R. Alonso-Mori, T. Kroll, D. Nordlund, T.-C. Weng, D. Sokaras
J. Vac. Sci. Technol. A 40, 033205 (2022)
Published: April 2022
Journal Articles
J. Vac. Sci. Technol. A 38, 063204 (2020)
Published: September 2020
Journal Articles
J. Vac. Sci. Technol. A 38, 043206 (2020)
Published: June 2020
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 35, 01B142 (2017)
Published: December 2016
Journal Articles
Keisuke Nogami, Yasuhiro Sakai, Shota Mineta, Daiji Kato, Izumi Murakami, Hiroyuki A. Sakaue, Takahiro Kenmotsu, Kenji Furuya, Kenji Motohashi
J. Vac. Sci. Technol. A 33, 061602 (2015)
Published: August 2015
Journal Articles
J. Vac. Sci. Technol. A 33, 033001 (2015)
Published: March 2015
Journal Articles
J. Vac. Sci. Technol. A 33, 021514 (2015)
Published: January 2015
Journal Articles
Eugenie Martinez, Alberto Herrera-Gomez, Mickael Allain, Olivier Renault, Alain Faure, Amal Chabli, Francois Bertin
J. Vac. Sci. Technol. A 30, 040605 (2012)
Published: June 2012
Journal Articles
J. Vac. Sci. Technol. A 30, 011402 (2012)
Published: December 2011
Journal Articles
J. Vac. Sci. Technol. A 29, 031504 (2011)
Published: March 2011
Journal Articles
J. Vac. Sci. Technol. A 28, 697–701 (2010)
Published: June 2010
Journal Articles
J. Vac. Sci. Technol. A 27, 1144–1148 (2009)
Published: July 2009
Journal Articles
J. Vac. Sci. Technol. A 26, 956–960 (2008)
Published: July 2008
Journal Articles
J. Vac. Sci. Technol. A 24, 1484–1488 (2006)
Published: June 2006
Journal Articles
J. Vac. Sci. Technol. A 24, 641–644 (2006)
Published: May 2006
Journal Articles
J. Vac. Sci. Technol. A 22, 2014–2021 (2004)
Published: September 2004
Journal Articles
J. Vac. Sci. Technol. A 16, 1420–1424 (1998)
Published: May 1998
Journal Articles
J. Vac. Sci. Technol. A 15, 2561–2564 (1997)
Published: September 1997
Journal Articles
J. Vac. Sci. Technol. A 15, 1890–1896 (1997)
Published: July 1997
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