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Journal Articles
J. Vac. Sci. Technol. A 33, 021603 (2015)
Published: January 2015
Journal Articles
J. Vac. Sci. Technol. A 29, 041601 (2011)
Published: May 2011
Journal Articles
J. Vac. Sci. Technol. A 25, 1475–1479 (2007)
Published: August 2007
Journal Articles
J. Vac. Sci. Technol. A 25, 746–750 (2007)
Published: June 2007
Journal Articles
J. Vac. Sci. Technol. A 23, 55–65 (2005)
Published: December 2004
Journal Articles
J. Vac. Sci. Technol. A 20, 138–145 (2002)
Published: January 2002
Journal Articles
J. Vac. Sci. Technol. A 18, 2728–2732 (2000)
Published: November 2000
Journal Articles
J. Vac. Sci. Technol. A 17, 2270–2273 (1999)
Published: July 1999
Journal Articles
J. Vac. Sci. Technol. A 16, 2524–2527 (1998)
Published: July 1998
Journal Articles
J. Vac. Sci. Technol. A 15, 678–682 (1997)
Published: May 1997
Journal Articles
J. Vac. Sci. Technol. A 15, 169–175 (1997)
Published: January 1997
Journal Articles
J. Vac. Sci. Technol. A 13, 551–555 (1995)
Published: May 1995
Journal Articles
J. Vac. Sci. Technol. A 12, 1635–1638 (1994)
Published: July 1994
Journal Articles
J. Vac. Sci. Technol. A 12, 962–978 (1994)
Published: July 1994
Journal Articles
J. Vac. Sci. Technol. A 11, 446–450 (1993)
Published: March 1993
Journal Articles
J. Vac. Sci. Technol. A 10, 1174–1179 (1992)
Published: July 1992
Journal Articles
J. Vac. Sci. Technol. A 10, 1244–1251 (1992)
Published: July 1992
Journal Articles
M. Ulrickson, J. Bialek, R. Goldston, W. Reiersen, S. Dinkevich, W. Fragetta, R. Rocco, J. Warren, R. Langley, G. H. Neilson, B. Nelson, J. Haines, H. Mantz, M. McSmith
J. Vac. Sci. Technol. A 10, 2092–2098 (1992)
Published: July 1992
Journal Articles
J. Vac. Sci. Technol. A 9, 747–752 (1991)
Published: May 1991
Journal Articles
J. Vac. Sci. Technol. A 9, 835–841 (1991)
Published: May 1991
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