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Journal Articles
J. Vac. Sci. Technol. A 42, 053201 (2024)
Published: July 2024
Journal Articles
J. Vac. Sci. Technol. A 42, 023209 (2024)
Published: February 2024
Journal Articles
J. Vac. Sci. Technol. A 41, 033201 (2023)
Published: March 2023
Journal Articles
J. Vac. Sci. Technol. A 41, 023204 (2023)
Published: February 2023
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. A 40, 043206 (2022)
Published: June 2022
Journal Articles
J. Vac. Sci. Technol. A 40, 042802 (2022)
Published: June 2022
Journal Articles
J. Vac. Sci. Technol. A 40, 010401 (2022)
Published: November 2021
Includes: Supplementary data
Journal Articles
J. G. Tobin, S. Nowak, S.-W. Yu, P. Roussel, R. Alonso-Mori, T. Kroll, D. Nordlund, T.-C. Weng, D. Sokaras
J. Vac. Sci. Technol. A 39, 043205 (2021)
Published: June 2021
Journal Articles
J. Vac. Sci. Technol. A 38, 036001 (2020)
Published: May 2020
Journal Articles
J. Vac. Sci. Technol. A 37, 031201 (2019)
Published: March 2019
Journal Articles
J. Vac. Sci. Technol. A 36, 061403 (2018)
Published: September 2018
Journal Articles
J. Vac. Sci. Technol. A 35, 061511 (2017)
Published: October 2017
Journal Articles
J. Vac. Sci. Technol. A 35, 031601 (2017)
Published: March 2017
Journal Articles
J. Vac. Sci. Technol. A 35, 021404 (2017)
Published: January 2017
Journal Articles
J. Vac. Sci. Technol. A 34, 020601 (2016)
Published: December 2015
Journal Articles
J. Vac. Sci. Technol. A 33, 061407 (2015)
Published: November 2015
Journal Articles
Junichiro Kamiya, Yusuke Hikichi, Michikazu Kinsho, Norio Ogiwara, Mitsuhiro Fukuda, Noriaki Hamatani, Kichiji Hatanaka, Keita Kamakura, Keiji Takahisa
J. Vac. Sci. Technol. A 33, 031605 (2015)
Published: April 2015
Journal Articles
John B. Boffard, Chun C. Lin, Shicong Wang, Amy E. Wendt, Cody Culver, Svetlana Radovanov, Harold Persing
J. Vac. Sci. Technol. A 33, 021306 (2015)
Published: December 2014
Journal Articles
John B. Boffard, Chun C. Lin, Cody Culver, Shicong Wang, Amy E. Wendt, Svetlana Radovanov, Harold Persing
J. Vac. Sci. Technol. A 32, 021304 (2014)
Published: January 2014
Journal Articles
J. Vac. Sci. Technol. A 28, 989–995 (2010)
Published: June 2010
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